JPS6045652U - ポリシング装置 - Google Patents

ポリシング装置

Info

Publication number
JPS6045652U
JPS6045652U JP1983136220U JP13622083U JPS6045652U JP S6045652 U JPS6045652 U JP S6045652U JP 1983136220 U JP1983136220 U JP 1983136220U JP 13622083 U JP13622083 U JP 13622083U JP S6045652 U JPS6045652 U JP S6045652U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
fixing plate
wafer fixing
polishing
cylindrical magnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1983136220U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0340536Y2 (cs
Inventor
為我井　昌司
恒夫 濱口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1983136220U priority Critical patent/JPS6045652U/ja
Publication of JPS6045652U publication Critical patent/JPS6045652U/ja
Application granted granted Critical
Publication of JPH0340536Y2 publication Critical patent/JPH0340536Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
JP1983136220U 1983-09-02 1983-09-02 ポリシング装置 Granted JPS6045652U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983136220U JPS6045652U (ja) 1983-09-02 1983-09-02 ポリシング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983136220U JPS6045652U (ja) 1983-09-02 1983-09-02 ポリシング装置

Publications (2)

Publication Number Publication Date
JPS6045652U true JPS6045652U (ja) 1985-03-30
JPH0340536Y2 JPH0340536Y2 (cs) 1991-08-26

Family

ID=30306355

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983136220U Granted JPS6045652U (ja) 1983-09-02 1983-09-02 ポリシング装置

Country Status (1)

Country Link
JP (1) JPS6045652U (cs)

Also Published As

Publication number Publication date
JPH0340536Y2 (cs) 1991-08-26

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