JPS6045082A - 半導体レ−ザ集積回路装置 - Google Patents
半導体レ−ザ集積回路装置Info
- Publication number
- JPS6045082A JPS6045082A JP15248983A JP15248983A JPS6045082A JP S6045082 A JPS6045082 A JP S6045082A JP 15248983 A JP15248983 A JP 15248983A JP 15248983 A JP15248983 A JP 15248983A JP S6045082 A JPS6045082 A JP S6045082A
- Authority
- JP
- Japan
- Prior art keywords
- laser
- recess
- semi
- groove
- electronic circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 14
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 238000005253 cladding Methods 0.000 claims description 5
- 239000004020 conductor Substances 0.000 claims 1
- 239000013078 crystal Substances 0.000 abstract description 10
- 238000000034 method Methods 0.000 abstract description 8
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 abstract description 5
- 229910001218 Gallium arsenide Inorganic materials 0.000 abstract description 4
- 230000010355 oscillation Effects 0.000 abstract description 4
- 238000009413 insulation Methods 0.000 abstract description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- 229910052681 coesite Inorganic materials 0.000 abstract 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 235000012239 silicon dioxide Nutrition 0.000 abstract 2
- 229910052682 stishovite Inorganic materials 0.000 abstract 2
- 229910052905 tridymite Inorganic materials 0.000 abstract 2
- 239000002184 metal Substances 0.000 description 6
- 238000005468 ion implantation Methods 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 235000014121 butter Nutrition 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 125000005842 heteroatom Chemical group 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15248983A JPS6045082A (ja) | 1983-08-23 | 1983-08-23 | 半導体レ−ザ集積回路装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15248983A JPS6045082A (ja) | 1983-08-23 | 1983-08-23 | 半導体レ−ザ集積回路装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6045082A true JPS6045082A (ja) | 1985-03-11 |
| JPH023314B2 JPH023314B2 (enrdf_load_stackoverflow) | 1990-01-23 |
Family
ID=15541588
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15248983A Granted JPS6045082A (ja) | 1983-08-23 | 1983-08-23 | 半導体レ−ザ集積回路装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6045082A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6344790A (ja) * | 1986-08-12 | 1988-02-25 | Matsushita Electric Ind Co Ltd | 半導体レ−ザ装置 |
| JPS6457781A (en) * | 1987-08-28 | 1989-03-06 | Mitsubishi Electric Corp | Planar type phase synchronous integrated optical element and manufacture thereof |
| US4940672A (en) * | 1989-03-17 | 1990-07-10 | Kopin Corporation | Method of making monolithic integrated III-V type laser devices and silicon devices on silicon |
-
1983
- 1983-08-23 JP JP15248983A patent/JPS6045082A/ja active Granted
Non-Patent Citations (1)
| Title |
|---|
| ELECTRONICS=1982 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6344790A (ja) * | 1986-08-12 | 1988-02-25 | Matsushita Electric Ind Co Ltd | 半導体レ−ザ装置 |
| JPS6457781A (en) * | 1987-08-28 | 1989-03-06 | Mitsubishi Electric Corp | Planar type phase synchronous integrated optical element and manufacture thereof |
| US4940672A (en) * | 1989-03-17 | 1990-07-10 | Kopin Corporation | Method of making monolithic integrated III-V type laser devices and silicon devices on silicon |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH023314B2 (enrdf_load_stackoverflow) | 1990-01-23 |
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