JPS6042664A - Testing device for integrated circuit device - Google Patents

Abstract

PURPOSE:To shorten a test time and to reduce the cost of the test by guaranteeing the manufacture quality of a lot on the basis of statistical data on a specific quantity of measured values, and then omitting the guaranteed test items about the remaining quantity. CONSTITUTION:A CPU3 controls a measuring part 5 according to a test program 7 in a storage part 4 to test bodies 6 to be tested about all test items. Measured values are stored in measured value storage parts 101-, and the total number of tests and the quantity of conforming articles are stored in storage parts 8 and 9 of counters. The CPU3 interrupts the test temporarily when the number of conforming article attains to a set value to calculate the yield, and then obtains statistical data on the mean value, standard deviation, maximum value, minimum value, etc., of every test item. A host computer part 1 compares the past data with a reference value to inform the CPU3 of whether individual test items are omitted or not. The CPU3 edits the program 7 so as to jump test items which can be omitted, and restarts the test.

Description

[Detailed description of the invention] The present invention relates to a testing device for semiconductor integrated circuits, etc.

Recently, the scale of semiconductor integrated circuits has increased significantly, and as a result, test equipment has become more sophisticated, complex, and expensive.Also, the number of test items and test time have increased significantly, resulting in test costs. is rapidly increasing.

Generally, in testing and inspecting semiconductor integrated circuits, etc., test equipment is used, and a test program is prepared that defines test conditions, test items, and the flow of the test according to each product building. All test objects, such as semiconductor integrated circuits, are normally tested and inspected to determine whether they are good or bad.

However, as mentioned above, test equipment has become more expensive, the number of test items on test objects has increased, and testing time has increased significantly, resulting in a decrease in the throughput of test equipment and an increase in testing costs. .

The present invention provides a test method and a test device that solve these problems.

Conventionally, tests for semiconductor integrated circuits and the like have been performed on all items from the first test to the second test for non-defective products, as shown in the flowchart of FIG. However, the manufacturing technology for semiconductor integrated circuits has made remarkable progress, and it has become possible to stably exhibit extremely high yield rates.The manufacturing process for semiconductor integrated circuits is basically a batch process. Semiconductor integrated circuits, etc. in the same lot exhibit similar characteristics, so some of the tests in the N test items are
It is often the case that all 10 test results are good, including those with poor final results.

The present invention focuses on this point and aims to reduce testing costs.

Manage the metal manufacturing process based on the yield rate and one measurement, and improve the manufacturing quality of lofts to 4i! For the tests for which all test results are expected to be good, it is determined that the tests can be omitted for the reasons mentioned above.

A feature of the present invention is that in a test method and test apparatus for semiconductor integrated circuits, etc., all test items are tested for a predetermined number of 10 tests, and statistical data such as the average value and standard deviation of the yield and defined values are obtained. and whether the statistical data of the yield and measured values are within a predetermined standard value, and whether Vc is within a predetermined range in the distribution of the statistical data of the yield and measured values of lofts tested in the past. and means for making a soft judgment (based on the comparison judgment results), and means for jumping test items that are within the reference value or within the range, and a trial driving method that does not test the jumped test items with respect to the remaining quantity. Place in test equipment.

One example of feeding according to the present invention is shown in FIG. 2 below. 1 is the host computer section, 2 is the test section and the central processing unit* (hereinafter referred to as CPU)
(abbreviated as) 3, storage section 4, measurement section 5, and 6 are test objects. The CPU 3 controls the clearance measuring section 5 based on the contents of the test program 7 stored in the storage section 4, tests the test object 6, and stores the results of the test on the test object 6 in the storage section 4. After the start of the 10 test, all test items are tested as before until a predetermined quantity, for example, the number of non-defective products reaches P.
And the measured values, such as input current value, output voltage value, access time value, etc., are changed according to the reduction of each test item.
Measurement i 脩fi & 1 part 10. , 10.・・・・・・1 o
The total number of pieces tested and the number of non-defective pieces are stored in the storage sections 8 and 9 of each counter operation. When the contents of the non-defective number storage section 9 reach the preset value PK, the JCPU 3 temporarily suspends the test of the next test object and returns P(L).
! Moving on to processing the test results for 1, the number of non-defective products storage section 9
The content of . , 10. ,...ION
Read each content and calculate the average value for each test item,
After collecting statistical data such as standard deviation, maximum value, minimum value, etc., the yield value and statistical data are sent to the post computer section 1. In the host computer section 1, when the sent yield value and standard data are stored in the storage section 11, the statistical data of past lbJ holidays' takes, that is, the average value standard of each 6i11 k take, is stored. The deviation, the maximum value, the ratio with the minimum 1i% take, and the ratio with the standard 1ill set for smooth dampness are calculated. The Mb distribution must be within a stable range, the average standard deviation of the delimited values for each test item must be better than the reference value, and the past average standard deviation, etc. must be within a stable range.
The CPU 3 makes judgments such as whether the foot is within the range of the foot, and determines whether or not to omit the test items for the foot and the foot.
send to Based on this result, the CPU 3 edits the test program 7 to jump to the test item for which the test can be omitted, and resumes the temporarily suspended test. In the tests of the test objects after the final test, all test items will not be tested, and some test items will be omitted.

Therefore, the test time is shortened according to the number of test items that are omitted.

As explained above, if the present invention is implemented, the manufacturing quality of the loft is guaranteed by statistical analysis of the predetermined values of 10 predetermined quantities, and the guaranteed test items are applied to the remaining quantities. I will omit the #! As long as the manufacturing quality is stable, the test time can be significantly shortened to 6 hours, making a significant contribution to reducing test costs.

[Brief explanation of the drawing]

FIG. 1 is a flowchart of a conventional test program, and FIG. 2 is a block diagram showing the implementation of the present invention. In the figure, 1...Host computer, 2...Test *+i, 3...Central storage unit, 4...Storage unit, ...Measurement section, 6
...... Test object, 7... Test program storage section, 8... Total test number storage section, 9...
...Non-defective product storage section, 10. ．． 102.10□,...1
ON...... Gari 11 Il Kaya Wj neck is, 11.
・・・・・・It is my memory. 7- Figure 1

Claims (1)

[Claims] In a testing device for semiconductor integrated circuits, etc., means for testing all test items on a predetermined number of 10 tests to obtain a yield chart and statistical data such as the average value and standard deviation of the measured values; means for comparing and determining whether the statistical data of the measured values are within a predetermined reference value and whether the distribution of the statistical data of the Rosito yield 9 and the measured values tested in the past is within a predetermined range; means for jumping test items whose comparison and judgment results are within a predetermined reference value or within a predetermined range, and with respect to the remaining quantity, the jump test items are not tested. Abbreviated test equipment.