JPS6042244A - シリコン単結晶引上用ルツボ - Google Patents
シリコン単結晶引上用ルツボInfo
- Publication number
- JPS6042244A JPS6042244A JP14668483A JP14668483A JPS6042244A JP S6042244 A JPS6042244 A JP S6042244A JP 14668483 A JP14668483 A JP 14668483A JP 14668483 A JP14668483 A JP 14668483A JP S6042244 A JPS6042244 A JP S6042244A
- Authority
- JP
- Japan
- Prior art keywords
- quartz glass
- nitrogen
- resistance
- glass
- melting loss
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 48
- 238000002844 melting Methods 0.000 title abstract description 8
- 230000008018 melting Effects 0.000 title abstract description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 34
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 17
- 239000000155 melt Substances 0.000 claims description 6
- 229910017464 nitrogen compound Inorganic materials 0.000 abstract description 3
- 150000002830 nitrogen compounds Chemical class 0.000 abstract description 3
- 239000010453 quartz Substances 0.000 abstract description 3
- 230000015572 biosynthetic process Effects 0.000 abstract description 2
- 238000005336 cracking Methods 0.000 abstract description 2
- 239000011521 glass Substances 0.000 abstract description 2
- 239000012299 nitrogen atmosphere Substances 0.000 abstract description 2
- 125000004433 nitrogen atom Chemical group N* 0.000 abstract description 2
- 125000004430 oxygen atom Chemical group O* 0.000 abstract description 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 238000006467 substitution reaction Methods 0.000 abstract 1
- 230000003628 erosive effect Effects 0.000 description 13
- 239000013078 crystal Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000005304 optical glass Substances 0.000 description 4
- 238000005728 strengthening Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 241000257465 Echinoidea Species 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- UMVBXBACMIOFDO-UHFFFAOYSA-N [N].[Si] Chemical compound [N].[Si] UMVBXBACMIOFDO-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004031 devitrification Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/045—Silicon oxycarbide, oxynitride or oxycarbonitride glasses
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Compositions (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14668483A JPS6042244A (ja) | 1983-08-12 | 1983-08-12 | シリコン単結晶引上用ルツボ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14668483A JPS6042244A (ja) | 1983-08-12 | 1983-08-12 | シリコン単結晶引上用ルツボ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6042244A true JPS6042244A (ja) | 1985-03-06 |
| JPH0135780B2 JPH0135780B2 (cs) | 1989-07-27 |
Family
ID=15413244
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14668483A Granted JPS6042244A (ja) | 1983-08-12 | 1983-08-12 | シリコン単結晶引上用ルツボ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6042244A (cs) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63206329A (ja) * | 1987-02-20 | 1988-08-25 | Sunao Tsunetomi | 微結晶を起こすガラス製造方法 |
| JPH01172239A (ja) * | 1987-04-24 | 1989-07-07 | Tosoh Corp | 高硬度石英ガラス及びその製造方法 |
| JPH03223136A (ja) * | 1990-01-26 | 1991-10-02 | Shimadzu Corp | オキシナイトライドガラスおよびガラス繊維の製造法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5087339A (cs) * | 1973-11-27 | 1975-07-14 | ||
| JPS53113817A (en) * | 1977-03-17 | 1978-10-04 | Toshiba Ceramics Co | Quartz glass crucible for pulling up single crysal of silicon |
| JPS54157779A (en) * | 1978-06-02 | 1979-12-12 | Toshiba Corp | Production of silicon single crystal |
| JPS5832037A (ja) * | 1981-08-13 | 1983-02-24 | Nippon Telegr & Teleph Corp <Ntt> | 添加物含有ガラスの製造方法 |
-
1983
- 1983-08-12 JP JP14668483A patent/JPS6042244A/ja active Granted
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5087339A (cs) * | 1973-11-27 | 1975-07-14 | ||
| JPS53113817A (en) * | 1977-03-17 | 1978-10-04 | Toshiba Ceramics Co | Quartz glass crucible for pulling up single crysal of silicon |
| JPS54157779A (en) * | 1978-06-02 | 1979-12-12 | Toshiba Corp | Production of silicon single crystal |
| JPS5832037A (ja) * | 1981-08-13 | 1983-02-24 | Nippon Telegr & Teleph Corp <Ntt> | 添加物含有ガラスの製造方法 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63206329A (ja) * | 1987-02-20 | 1988-08-25 | Sunao Tsunetomi | 微結晶を起こすガラス製造方法 |
| JPH01172239A (ja) * | 1987-04-24 | 1989-07-07 | Tosoh Corp | 高硬度石英ガラス及びその製造方法 |
| JPH03223136A (ja) * | 1990-01-26 | 1991-10-02 | Shimadzu Corp | オキシナイトライドガラスおよびガラス繊維の製造法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0135780B2 (cs) | 1989-07-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |