JPS6042235Y2 - クライオポンプ - Google Patents

クライオポンプ

Info

Publication number
JPS6042235Y2
JPS6042235Y2 JP1980139075U JP13907580U JPS6042235Y2 JP S6042235 Y2 JPS6042235 Y2 JP S6042235Y2 JP 1980139075 U JP1980139075 U JP 1980139075U JP 13907580 U JP13907580 U JP 13907580U JP S6042235 Y2 JPS6042235 Y2 JP S6042235Y2
Authority
JP
Japan
Prior art keywords
pump body
cryopump
cold head
heating plate
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980139075U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5761188U (enExample
Inventor
卓司 長本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP1980139075U priority Critical patent/JPS6042235Y2/ja
Publication of JPS5761188U publication Critical patent/JPS5761188U/ja
Application granted granted Critical
Publication of JPS6042235Y2 publication Critical patent/JPS6042235Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP1980139075U 1980-09-30 1980-09-30 クライオポンプ Expired JPS6042235Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980139075U JPS6042235Y2 (ja) 1980-09-30 1980-09-30 クライオポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980139075U JPS6042235Y2 (ja) 1980-09-30 1980-09-30 クライオポンプ

Publications (2)

Publication Number Publication Date
JPS5761188U JPS5761188U (enExample) 1982-04-10
JPS6042235Y2 true JPS6042235Y2 (ja) 1985-12-24

Family

ID=29499063

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980139075U Expired JPS6042235Y2 (ja) 1980-09-30 1980-09-30 クライオポンプ

Country Status (1)

Country Link
JP (1) JPS6042235Y2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH037585Y2 (enExample) * 1985-08-01 1991-02-25
JPH037586Y2 (enExample) * 1985-08-01 1991-02-25
JPS62131983A (ja) * 1985-12-05 1987-06-15 Anelva Corp クライオポンプ
WO2010002884A2 (en) * 2008-07-01 2010-01-07 Brooks Automation, Inc. Method and apparatus for providing temperature control to a cryopump

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5124690A (en) * 1974-08-23 1976-02-28 Teijin Ltd Horiesuteruno seizoho

Also Published As

Publication number Publication date
JPS5761188U (enExample) 1982-04-10

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