JPS6033293A - 単結晶半導体引上装置 - Google Patents

単結晶半導体引上装置

Info

Publication number
JPS6033293A
JPS6033293A JP13925483A JP13925483A JPS6033293A JP S6033293 A JPS6033293 A JP S6033293A JP 13925483 A JP13925483 A JP 13925483A JP 13925483 A JP13925483 A JP 13925483A JP S6033293 A JPS6033293 A JP S6033293A
Authority
JP
Japan
Prior art keywords
single crystal
convection
pulling
semiconductor
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13925483A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0157079B2 (en:Method
Inventor
Hidekazu Taji
田路　英一
Mitsuhiro Yamato
充博 大和
Osamu Suzuki
修 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP13925483A priority Critical patent/JPS6033293A/ja
Publication of JPS6033293A publication Critical patent/JPS6033293A/ja
Publication of JPH0157079B2 publication Critical patent/JPH0157079B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
    • C30B15/305—Stirring of the melt

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP13925483A 1983-07-29 1983-07-29 単結晶半導体引上装置 Granted JPS6033293A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13925483A JPS6033293A (ja) 1983-07-29 1983-07-29 単結晶半導体引上装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13925483A JPS6033293A (ja) 1983-07-29 1983-07-29 単結晶半導体引上装置

Publications (2)

Publication Number Publication Date
JPS6033293A true JPS6033293A (ja) 1985-02-20
JPH0157079B2 JPH0157079B2 (en:Method) 1989-12-04

Family

ID=15241020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13925483A Granted JPS6033293A (ja) 1983-07-29 1983-07-29 単結晶半導体引上装置

Country Status (1)

Country Link
JP (1) JPS6033293A (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5647904A (en) * 1987-09-21 1997-07-15 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing superconducting ceramics in a magnetic field

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58217493A (ja) * 1982-06-11 1983-12-17 Nippon Telegr & Teleph Corp <Ntt> 単結晶の引上方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58217493A (ja) * 1982-06-11 1983-12-17 Nippon Telegr & Teleph Corp <Ntt> 単結晶の引上方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5647904A (en) * 1987-09-21 1997-07-15 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing superconducting ceramics in a magnetic field

Also Published As

Publication number Publication date
JPH0157079B2 (en:Method) 1989-12-04

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