JPS6030115A - 強誘電体薄膜素子 - Google Patents
強誘電体薄膜素子Info
- Publication number
- JPS6030115A JPS6030115A JP58138001A JP13800183A JPS6030115A JP S6030115 A JPS6030115 A JP S6030115A JP 58138001 A JP58138001 A JP 58138001A JP 13800183 A JP13800183 A JP 13800183A JP S6030115 A JPS6030115 A JP S6030115A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- substrate
- ferroelectric
- film
- film element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 31
- 239000000758 substrate Substances 0.000 claims description 35
- 239000010408 film Substances 0.000 description 10
- 230000010287 polarization Effects 0.000 description 10
- 239000010931 gold Substances 0.000 description 7
- 238000001514 detection method Methods 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 239000013078 crystal Substances 0.000 description 4
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910010252 TiO3 Inorganic materials 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000003776 cleavage reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 230000005621 ferroelectricity Effects 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 230000007017 scission Effects 0.000 description 1
- 239000013076 target substance Substances 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58138001A JPS6030115A (ja) | 1983-07-28 | 1983-07-28 | 強誘電体薄膜素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58138001A JPS6030115A (ja) | 1983-07-28 | 1983-07-28 | 強誘電体薄膜素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6030115A true JPS6030115A (ja) | 1985-02-15 |
| JPH0236048B2 JPH0236048B2 (enrdf_load_stackoverflow) | 1990-08-15 |
Family
ID=15211740
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58138001A Granted JPS6030115A (ja) | 1983-07-28 | 1983-07-28 | 強誘電体薄膜素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6030115A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002099009A (ja) * | 1994-08-31 | 2002-04-05 | Matsushita Electric Ind Co Ltd | 分極反転領域の製造方法ならびにそれを利用した光波長変換素子 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5330354A (en) * | 1976-09-01 | 1978-03-22 | Citizen Watch Co Ltd | Production of liquid display cell |
-
1983
- 1983-07-28 JP JP58138001A patent/JPS6030115A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5330354A (en) * | 1976-09-01 | 1978-03-22 | Citizen Watch Co Ltd | Production of liquid display cell |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002099009A (ja) * | 1994-08-31 | 2002-04-05 | Matsushita Electric Ind Co Ltd | 分極反転領域の製造方法ならびにそれを利用した光波長変換素子 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0236048B2 (enrdf_load_stackoverflow) | 1990-08-15 |
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