JPS6030115A - 強誘電体薄膜素子 - Google Patents

強誘電体薄膜素子

Info

Publication number
JPS6030115A
JPS6030115A JP58138001A JP13800183A JPS6030115A JP S6030115 A JPS6030115 A JP S6030115A JP 58138001 A JP58138001 A JP 58138001A JP 13800183 A JP13800183 A JP 13800183A JP S6030115 A JPS6030115 A JP S6030115A
Authority
JP
Japan
Prior art keywords
thin film
substrate
ferroelectric
film
film element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58138001A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0236048B2 (cs
Inventor
俊一郎 河島
賢二 飯島
一朗 上田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP58138001A priority Critical patent/JPS6030115A/ja
Publication of JPS6030115A publication Critical patent/JPS6030115A/ja
Publication of JPH0236048B2 publication Critical patent/JPH0236048B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP58138001A 1983-07-28 1983-07-28 強誘電体薄膜素子 Granted JPS6030115A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58138001A JPS6030115A (ja) 1983-07-28 1983-07-28 強誘電体薄膜素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58138001A JPS6030115A (ja) 1983-07-28 1983-07-28 強誘電体薄膜素子

Publications (2)

Publication Number Publication Date
JPS6030115A true JPS6030115A (ja) 1985-02-15
JPH0236048B2 JPH0236048B2 (cs) 1990-08-15

Family

ID=15211740

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58138001A Granted JPS6030115A (ja) 1983-07-28 1983-07-28 強誘電体薄膜素子

Country Status (1)

Country Link
JP (1) JPS6030115A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002099009A (ja) * 1994-08-31 2002-04-05 Matsushita Electric Ind Co Ltd 分極反転領域の製造方法ならびにそれを利用した光波長変換素子

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5330354A (en) * 1976-09-01 1978-03-22 Citizen Watch Co Ltd Production of liquid display cell

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5330354A (en) * 1976-09-01 1978-03-22 Citizen Watch Co Ltd Production of liquid display cell

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002099009A (ja) * 1994-08-31 2002-04-05 Matsushita Electric Ind Co Ltd 分極反転領域の製造方法ならびにそれを利用した光波長変換素子

Also Published As

Publication number Publication date
JPH0236048B2 (cs) 1990-08-15

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