JPS60262005A - 膜厚計測方法 - Google Patents

膜厚計測方法

Info

Publication number
JPS60262005A
JPS60262005A JP59118818A JP11881884A JPS60262005A JP S60262005 A JPS60262005 A JP S60262005A JP 59118818 A JP59118818 A JP 59118818A JP 11881884 A JP11881884 A JP 11881884A JP S60262005 A JPS60262005 A JP S60262005A
Authority
JP
Japan
Prior art keywords
thin film
anode
specimen
thickness
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59118818A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0376841B2 (enrdf_load_stackoverflow
Inventor
Masayuki Uda
応之 宇田
Fumiaki Kirihata
桐畑　文明
Sukenori Shirohashi
白橋　典範
Hiroshi Ishida
博志 石田
Shinji Marutani
新治 丸谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN
Original Assignee
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN filed Critical RIKEN
Priority to JP59118818A priority Critical patent/JPS60262005A/ja
Publication of JPS60262005A publication Critical patent/JPS60262005A/ja
Publication of JPH0376841B2 publication Critical patent/JPH0376841B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
JP59118818A 1984-06-09 1984-06-09 膜厚計測方法 Granted JPS60262005A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59118818A JPS60262005A (ja) 1984-06-09 1984-06-09 膜厚計測方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59118818A JPS60262005A (ja) 1984-06-09 1984-06-09 膜厚計測方法

Publications (2)

Publication Number Publication Date
JPS60262005A true JPS60262005A (ja) 1985-12-25
JPH0376841B2 JPH0376841B2 (enrdf_load_stackoverflow) 1991-12-06

Family

ID=14745895

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59118818A Granted JPS60262005A (ja) 1984-06-09 1984-06-09 膜厚計測方法

Country Status (1)

Country Link
JP (1) JPS60262005A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61104309U (enrdf_load_stackoverflow) * 1984-12-14 1986-07-02
JPS6437688U (enrdf_load_stackoverflow) * 1987-08-31 1989-03-07
JPS6437689U (enrdf_load_stackoverflow) * 1987-08-31 1989-03-07
US4823368A (en) * 1987-06-30 1989-04-18 Rikagaku Kenkyujyo Open counter for low energy electron detection with suppressed background noise
JPH03202709A (ja) * 1989-12-28 1991-09-04 Showa Alum Corp アルミニウム箔表面の圧延油付着量測定方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61104309U (enrdf_load_stackoverflow) * 1984-12-14 1986-07-02
US4823368A (en) * 1987-06-30 1989-04-18 Rikagaku Kenkyujyo Open counter for low energy electron detection with suppressed background noise
JPS6437688U (enrdf_load_stackoverflow) * 1987-08-31 1989-03-07
JPS6437689U (enrdf_load_stackoverflow) * 1987-08-31 1989-03-07
JPH03202709A (ja) * 1989-12-28 1991-09-04 Showa Alum Corp アルミニウム箔表面の圧延油付着量測定方法

Also Published As

Publication number Publication date
JPH0376841B2 (enrdf_load_stackoverflow) 1991-12-06

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term