JPS60254408A - Multiple-layer film magnetic head - Google Patents

Abstract

PURPOSE:To form a multiple-layer film magnetic head which is excellent in finishing accuracy and mass-productivity, by forming a magnetic gap layer composed of a nonmagnetic material on a resist pattern surface formed on a common substrate and alternately forming magnetic films and nonmagnetic films on the substrate. CONSTITUTION:A resist 2 applied to the surface of a nonmagnetic substrate 1 is removed by leaving part of the resist 2 forming a prescribed pattern as it is (Fig. 2) then the surface of the remaining resist 2 and the substrate 1 at the locations where the resist 2 is removed are covered with a nonmagnetic film 3 which is used as a gap spacer. Then the 1st multiple-layer film 4a is formed by sputtering, etc. (Fig. 4), and the 1st multiple-layer film 4a and nonmagnetic film 3 are removed along the line A so that a plane can be formed along the line A (Fig. 5). After the plane is formed, all of the remaining resist 2 is removed and the 2nd multiple-layer film 4b is formed by using the same material and method as those used for the film 4a (Figs. 6 and 7). Then a plate 5 made of the same material as that used for the substrate 1 is firmly adhered to the 1st and 2nd multiple-layer films 4a and 4b so that the films 4a and 4b are put between the substrate 1 and plate 5 and can be protected (Fig. 9). After the plate 5 is fitted, groove holes 6 for winding are formed by piercing the holes 6 from the top to bottom by press working, etc., at every section to be separated individually.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a multilayer magnetic head in which magnetic films and magnetic films are alternately laminated, and the present invention relates to a magnetic head that can be used in, for example, video tape recorders. It is related to.

2. Description of the Related Art In recording signals on recording media such as magnetic tapes, magnetic sheets, magnetic disks, etc., magnetic heads with narrow trunks and narrow gears are required to increase the recording density. Therefore, on a substrate of crystallized glass, nonmagnetic ferrite, etc., a multilayer film is created by alternately growing magnetic films such as amorphous or sendust and nonmagnetic films such as silicon oxide using thin film forming methods such as vapor deposition, sputtering, and plating. A technique has been proposed in which a magnetic head with a narrow track can be easily obtained by using the multilayer film as a track width and the thickness of this multilayer film as the track width. The one described in Japanese Patent Publication No. 53-25491 is one of them.

As is well known, high-density recording head materials are required to have a sufficiently large saturation magnetic flux density Bs and a sufficiently large effective magnetic permeability μe at high frequencies, and amorphous alloys,
Multilayer film heads made of Sendust alloy and the like are attracting attention.

However, in conventional multilayer magnetic heads, multilayer films are formed on two magnetic substrates, the sides of the substrates and the multilayer films are mirror-polished, a non-magnetic gap member is formed on the polished surfaces, and the magnetic head is butted against each other. It is something that is integrated. Therefore, three different materials, the magnetic and non-magnetic materials that make up the multilayer film, and the substrate material, are polished simultaneously in the polishing process, and each material has different characteristics such as strength and wear resistance. As a result, the degree of polishing differs for each material, resulting in so-called "surface sagging", making it difficult to obtain a gap surface with good straightness, causing the gap to become undulating, and causing gaps between the material and the substrate material. It was creating a void. Furthermore, polishing the two surfaces and butting them together makes it difficult to improve the precision of the finish and is also poor in mass production.

Problems to be Solved by the Invention It is an object of the present invention to provide a multilayer magnetic head that has good gap linearity, good finishing accuracy, and is excellent in mass production.

Means for Solving the Problems The multilayer magnetic head of the present invention has a winding groove formed on one common substrate, and a small magnetic gap (from the winding groove to the recording medium sliding surface). A magnetic gap layer formed by depositing a non-magnetic material on the substrate is provided, and magnetic films and magnetic films are alternately deposited on the substrate.

According to the present invention, a resist pattern is first formed on one common substrate, a magnetic gap layer made of a non-magnetic material is formed on the surface of the pattern, and then a magnetic film and a non-magnetic film are formed on the substrate. The magnetic head can be formed by alternately depositing the two parts, and there is no need to butt and integrate the two parts as in the conventional case.

EXAMPLES The present invention will now be described in detail with reference to examples of manufacturing steps shown in the drawings.

In FIG. 1, first, as shown in (1),
A heat-resistant resist 2 is applied onto a non-magnetic substrate 1 made of glass, ceramics, non-magnetic ferrite, etc. using a spin coater or the like. The thickness of the resist 2 is equal to or greater than the thickness of the multilayer film to be described later which is the trunk width (20 to 50 μm).
Apply once or several times. Next, as shown in (2), a part of the resist 2 is removed by etching or the like, leaving a predetermined pattern and other parts.

Next, as shown in (3), a non-magnetic film 3 made of silicon oxide or the like, which will serve as a gap spacer, is sputtered to cover the entire surface of the resist 2 and the exposed surface of the substrate 1 after the resist has been removed. Deposit by. Next (4
), the first multilayer film 4a is deposited by sputtering or the like. The first multilayer film 4a is formed by alternately laminating magnetic materials such as cobalt-based amorphous, sendust, and permalloy alloys, and non-magnetic materials such as silicon oxide. The first multilayer film 4a is
It is formed in the valley between adjacent resists 2, and also on the resist 2. When sputtering alloys such as sendust and permalloy, it is desirable to forcibly heat them to 300 to 350°C in order to improve their magnetic properties. However, since the resist 2 is thermally unstable, there is a risk of emitting harmful gases if it is heated during the formation of the first multilayer film 4a by sputtering. However, in the above manufacturing process, since sputtering is performed with the entire surface of the resist 2 covered with the non-magnetic film 3, no harmful gases are released. However, the stable temperature of heat-resistant resist 2 is 1
00 to 150°C, it is desirable to pay sufficient attention to the substrate temperature during sputtering and to keep the substrate temperature below 100°C by passing cooling water or the like. Next, the first multilayer film 4a and the nonmagnetic material film 3 formed on the resist 2 so as to be flush with each other along the line A shown in FIG. 1(4) are removed. As a result, as shown in FIG. 1(5), the resist 2, the first multilayer film 4a formed between the resists 2, and the gap between the resist 2 and the first multilayer film 4a are formed. A film 3 of non-magnetic material interposed between the two remains. Next, as shown in (6), all remaining resist 2 is removed. Next, as shown in (7), a second multilayer film 4b is formed using the same material and using the same method as the first multilayer film 4a. The second multilayer film 4b is deposited in the valley after the resist 2 is removed, and is also deposited on the first multilayer film 4a.

Next, planing and ramp processing are performed along line B in FIG. 1 (7) to remove the second multilayer film 4b on the first multilayer film 4a to make it flush. As a result, as shown in (8),
On the substrate 1, a first multilayer film 4a and a second multilayer film 4b are formed in an alternating manner, and each multilayer film 4a,
A film 3 of a non-magnetic material to form a magnetic gap between the 4b is formed, and the upper surface of each of these films is formed to be flat. Next, as shown in (9), a counter plate 5 made of the same non-magnetic material as the substrate 1 is fixed to the top surface of each of the above films so that these films are sandwiched between the substrate 1 and the substrate 1. to protect the multilayer film. Next, as shown in (10),
For each portion to be separated individually, a slot 6 for winding is formed vertically through the wire by pressing or the like. However, the winding slots 6 may be formed in advance on the substrate 1 and the opposing plate 5. In that case, a film 3 of a non-magnetic material, a first multilayer film 4a and a second multilayer film 4a, etc. are formed around the groove of the substrate by sputtering or the like.
Since films similar to each of these films are formed when forming the multilayer film 4b, the film formed around the grooves of the above-mentioned one example of the substrate is subjected to mechanical processing or optical or chemical treatment as a post-treatment. Then, the facing plate 5 is fixed.

Next, one substrate 1, one first multilayer film 4a, one second multilayer film 4b, and one nonmagnetic material are separated along the chain line shown in FIG. 1 (10). The magnetic heads are separated into individual magnetic heads each consisting of a film 3 and one opposing plate 5. The portion of the film 3 made of non-magnetic material becomes a magnetic gap as described above. The opposing plate 5 is made of wear-resistant material bonded to the substrate 1, or made of 5i02, Si3N4, Al2O3.
Abrasion-resistant magnetically insulating materials such as those may be formed by sputtering, vapor deposition, ion blasting, or the like.

Next, another embodiment shown in FIGS. 2 and 3 will be described. In this embodiment, the magnetic gap has an azimuth angle.

In FIG. 2, as shown in (1) and (2), a heat-resistant resist 2 is applied on a non-magnetic substrate 1, and the resist 2 is formed into a predetermined pattern by etching or the like, as described above. Similar to the example.

Next, as shown in FIG. 2(3), at least the surface that is to become the magnetic gap forming surface among both side surfaces of the remaining resist 2 is formed into a slope 2a having an angle corresponding to the azimuth angle. do. The slope 2a may be formed by mechanical cutting, or by utilizing the Taber etching characteristics that occur when the resist 2 is etched. After the resist 2 having a predetermined pattern having the slope 2a is formed in this way, a film 3 of a non-magnetic material which will become a gap spacer is then formed as shown in FIG. 2(4).

Furthermore, as shown in (5), a first multilayer film 4a is deposited by sputtering or the like. Figure 2 (4)
(5) corresponds to steps (3) and (4) in Figure 1, and the following:
The same steps as in the example of FIG. 1 are performed.

FIG. 3 shows that the first multilayer film 4a and the second multilayer film 4b are thus formed on the substrate 1 in an alternating manner, and each multilayer film 4a is
, Ill of non-magnetic material between 4b! 3 shows a state in which a gap is formed, which corresponds to (8) in FIG. As is clear from FIG. 3, since the non-magnetic material film 3 to serve as a gap spacer is formed on the resist 2, the non-magnetic material II formed along the slope 2a of the resist 2 ! The portion i3 becomes an inclined surface having the same angle as the above-mentioned inclined surface 2a, thereby forming an azimuth angle.

When forming the non-magnetic material film 3 to serve as a gap spacer by sputtering, as shown in FIG. Alternatively, sputtering may be performed to form the non-magnetic material film 3 only on at least the portion extending from the winding groove to the recording medium sliding contact portion.

After forming the film 3 in this way, a magnetic head is formed through the same steps as those described above, but the completed magnetic head substrate 1, a non-magnetic material III+3 as a gap spacer, and a winding. FIG. 5 hypothetically shows only the line groove 6, and FIG. 6 shows the magnetic circuit of the completed magnetic head. As shown in FIG. 6, recording and reproduction are performed by leakage magnetic flux in the gap formed by the non-magnetic film 3, so it is not necessary to form the non-magnetic film 3 that forms the gap. Although it is essential,
The lower the magnetic resistance of the magnetic circuit, the better the efficiency, so it is better for the non-magnetic material 11*3 that forms the gap to occupy as small an area as possible except for the essential parts. In forming the film 3, it is effective to apply a mask 7 and perform deposition by sputtering or the like as in the example shown in FIG.

Effects of the Invention The multilayer magnetic head of the present invention is formed by providing a magnetic gap layer on a common substrate and alternately depositing magnetic films and nonmagnetic films on the substrate. Unlike magnetic heads, multilayer films are formed on individual substrates and are not polished and butted together to integrate them.
Since a gap with good linearity can be obtained and there is no need to polish and butt the gap portion, it is possible to provide a multilayer magnetic head with good finishing accuracy and excellent mass productivity.

[Brief explanation of drawings]

FIG. 1 is a sectional view showing an example of the manufacturing process for obtaining a multilayer magnetic head of the present invention by changing the object; FIG. 2 is a sectional view showing another example of the manufacturing process by changing the object; Figure 3 is a sectional view showing the object at the final stage of the manufacturing process in Figure 2;
FIG. 4 is a perspective view showing an example of the step of adhering the magnetic gap forming member in each of the manufacturing steps described above; FIG. 5 is a perspective view partially illustrating an example of the multilayer magnetic head of the present invention; FIG. 6 is a plan view showing an example of the magnetic circuit of the multilayer magnetic head of the present invention. ■One substrate, 3--Magnetic gap layer made of a film of non-magnetic material, 4a--Rain 1 multilayer film, 4b--Second multilayer film,
6...-Winding groove.

Claims (1)

[Claims] A winding groove is formed on one common substrate, and a magnetic gap layer is provided in which a non-magnetic material is interposed in at least the magnetic gap portion from the winding groove to the recording medium sliding surface, and the above-mentioned A multilayer magnetic head is formed by alternately depositing magnetic films and magnetic films on a substrate.