JPS6260106A - Production of magnetic head - Google Patents

Abstract

PURPOSE:To easily and accurately set the track width and the depth of a magnetic gap by deciding optically said track width and at the same time controlling the depth of the gap according to the film thickness of a nonmagnetic material. CONSTITUTION:A nonmagnetic thin film 2 having wear resistance is attached over a magnetic block 1 and an aluminum thin film 3 is formed on the film 2. Then a photoresist layer 4 is coated on the film 3. Then the layer 4 is exposed to the light via a prescribed optical pattern to delete an area equivalent to the track width of a magnetic head for formation of cut grooves 7. The ferromagnetic material 8 is filled into each groove 7 and the film 3 and the extra material 8 are removed. Thus a block is obtained and then cut into magnetic heads. In such a way, the track width is formed optically with the depth controlled by the thickness of the film 2 for a magnetic gap. This facilitates the easy production of a magnetic head having the accurate width and depth of the magnetic gap.

Description

[Detailed description of the invention] (Industrial application field) The present invention relates to a method of manufacturing a magnetic head.

(Prior Art) With the progress of high-density recording of information signals on magnetic recording media, it has become necessary to narrow the recording line width (track width). As is well known, there has been a demand for magnetic heads with small track widths for use in magnetic heads, and various types of magnetic heads with narrow track widths have been proposed.

The magnetic heads that have been proposed in the past as narrow magnetic heads for the track 11 include: (1) a magnetic head with protrusions in two bulk magnetic core halves, such as those currently widely used as magnetic heads for VTRs; A magnetic head (2) in which the track width near the magnetic gap is narrowed by cutting and removing the part on the magnetic gap side of the mating surfaces by machining.
) A magnetic head configured such that the thickness of a thin plate of ferromagnetic material itself or the thickness of a thin film of ferromagnetic material itself becomes the track width of the magnetic head; (3) A floating magnetic head. A typical example is a magnetic head in which a magnetic core, coil, insulating layer, etc. are constructed by applying film-forming technology, such as those used in the present invention.

(Problem that the invention attempts to solve) However, in the conventional magnetic head described above.

The conventional magnetic head has the configuration shown as (1).

Since the track width of the magnetic head is determined by machining, the track rlJ is limited to about 20 microns, and since the track width is machined for each magnetic head, the manufacturing time is shortened. This is true if the material used for the magnetic core has a high saturation magnetic flux density.

There are problems such as the fact that there is currently no known material that can be machined in the same way as ferrite. In magnetic heads with this configuration, the track width is made of the thin plate or film of ferromagnetic material itself, so the thin plate or film of ferromagnetic material is sandwiched between wear-resistant supports from both sides. Since it is necessary to support the magnetic head, productivity is extremely low, and there is a problem that cost reduction cannot be expected even in mass production.Furthermore, the magnetic head with the configuration shown in the conventional example (3) ,
For example, it is possible to easily manufacture a magnetic head in which a magnetic core consisting of a pattern of ferromagnetic material having a predetermined minute tracking width is formed on a substrate using lithography, but there is a trade-off with the precision of the pattern. Since it is difficult to make a thick magnetic core, there are problems such as low efficiency of the magnetic core, easy saturation of the AI magnetic core, and inability to increase the number of turns of the coil. There are many problems that need to be solved regarding the magnetic head of this configuration, and it has been desired that solutions to these problems be found.

(Means for Solving the Problems) The present invention includes a step of mirror-polishing one surface of a magnetic block on which the sliding surface side of a magnetic head is to be formed, and a step of mirror-polishing one surface of the magnetic block on which the sliding surface of the magnetic head is to be formed. , a step of depositing and forming a thin film of wear-resistant non-magnetic material with a thickness slightly larger than the depth of the magnetic gap; A cut groove having a width corresponding to the track width of the air gap and a depth reaching the magnetic block,
a step of forming a large number of grooves at predetermined intervals; a step of filling each of the plurality of grooves with a ferromagnetic material; A step of cutting the magnetic block in a direction perpendicular to the kerf to obtain a half magnetic block, and providing a window for coil winding in one or both of the pair of two magnetic block halves. A step of machining the hole, a step of polishing the abutting surfaces of the pair of two magnetic block halves, and a step of interposing a gap spacer made of a non-magnetic material in the magnetic gap part, The process of butting the magnetic block halves and fixing them together to obtain the core block of the magnetic head, and the process of assembling the finished magnetic A process of mirror polishing into a curved surface shape required for the sliding surface of the head, and a process of cutting the core block of the magnetic head to obtain the core of each magnetic head.

The present invention provides a method for manufacturing a magnetic head, which includes the step of winding a coil around the core of the magnetic head.

(Example) Hereinafter, a method for manufacturing a magnetic head of the present invention will be described in detail with reference to the accompanying drawings. The accompanying drawings are diagrams for illustrating and explaining the outline of the steps in the manufacturing method of the magnetic head of the present invention, and FIG. For example, a ferrite plate is used as the body block 1.

One surface 1a of the magnetic block 1 shown in FIG. 1, on which the sliding surface of the magnetic head is to be formed, is mirror-polished.

The mirror-polished surface 1 of the magnetic block l
Next, as shown in FIG. 2, a wear-resistant non-magnetic material such as silicon dioxide (Si
02), a thin film 2 with a thickness slightly greater than the depth of the magnetic gap, for example 5 to 20 microns, is deposited by a suitable film deposition technique.

The thickness t of the thin film 2 of the non-magnetic material having wear resistance mentioned above is the depth of the magnetic gap in the completed magnetic head, which is D, and the sliding surface is polished into a predetermined curved surface in a later step. If α is the decrease in thickness that occurs during the process, and β is the decrease in thickness that occurs during the processing of the window hole for coil winding in the later process, then t = D + α + β is expressed (Fig. 3). (See, however, FIG. 3 shows a part of the vicinity of the magnetic gap in the magnetic core half of the magnetic head.)

Next, the thin film 2 of the wear-resistant non-magnetic material shown in FIG. Both forms a kerf having a depth t that reaches the magnetic block 1. However, the formation of the kerf on the thin film 2 of the wear-resistant non-magnetic material described above is different from the kerf to be formed in the thin film 2. This can be done by applying an appropriate known method depending on the dimension of the groove width Tw. That is, if the groove width Tv is relatively large, the cut grooves may be formed by applying a mechanical processing method, for example, but in order to form the cut grooves, After forming a mask pattern using a suitable metal such as aluminum on the thin film 2 of the wear-resistant non-magnetic material, the above-described thin film 2 of the wear-resistant non-magnetic material is etched by applying an appropriate etching means. Once kerfs with a desired pattern and a predetermined depth are formed, in the first step, a ferromagnetic material with high magnetic permeability is filled into the kerfs by applying a vapor deposition method or a sputtering method. In this case, the mask pattern described above can be used conveniently, so the second embodiment described below is used.
After forming a mask pattern using a suitable metal such as aluminum on the thin film 2 of the non-magnetic material having wear resistance in the illustrated state, the above-described non-magnetic material having wear resistance is etched by applying an appropriate etching means. A case where grooves of a predetermined depth are formed in a desired pattern in the thin film 2 is illustrated and explained.

FIG. 4 shows a thin film 3 of a suitable metal having a thickness of about 2 to 10 microns ( For example, a state in which a thin film 3) of aluminum is deposited is shown.

In the following explanation, a thin film 2 of a non-magnetic material having wear resistance is used.
It is said that the silicon dioxide film 2 is a silicon dioxide film 2, and the suitable metal thin film 3 is an aluminum film 3.

Next, a photoresist layer 4 is coated on the aluminum thin film 3 shown in FIG. 4 to obtain the state shown in FIG. 5, and the photoresist layer 4 is exposed to light through a predetermined optical pattern. When the photoresist layer 4 is developed, removed portions 5, 5, . . . having a width Tv corresponding to the track width Tv of the magnetic head are formed in the photoresist layer 4, as shown in FIG.

FIG. 7 shows the track width T of the magnetic head applied to the aluminum thin film 3 by applying, for example, wet etching means or other suitable means to the state shown in FIG.
The photoresist layer 4 is shown removed after forming removed portions 6, 6, . . . having a width Tv corresponding to v.

Next, as shown in FIG. 7, dry etching is carried out in a reactive gas such as CF4 gas or NF3 gas using the aluminum thin film 3 on which a predetermined pattern is formed as a mask pattern. Cut grooves 7, 7, . . . having a width Tw corresponding to the track width Tw of the magnetic head are formed in the silicon dioxide film 2.
Obtain the condition shown.

Next, by applying a vacuum evaporation method or a sputtering method, a ferromagnetic material 8, such as Sendust 8, is filled into the grooves 7, 7, etc. of the state shown in Fig. 8, and the state shown in Fig. 9 is obtained. get.

Next, when the aluminum thin film 3 and the ferromagnetic material outside the kerfs 7, 7, . . . are removed, a state as shown in FIG. 1θ is obtained.

Then, in the part indicated by the dotted line in FIG. When cut into two, a large number of half magnetic blocks A, A, . . . are obtained as shown in Figure 11.

The magnetic block halves A, A, etc. shown in Figure 11 made as described above are made into a pair of two adjacent ones, and the pair of magnetic block halves are butted. When the surface is mirror-polished and a window hole 9 for coil winding is formed in one (or both) of the pair of magnetic blocks described above using, for example, a dicing machine, the block shown in FIG. 12 is obtained.

A pair of magnetic block halves A shown in FIG.
A non-magnetic material is used in the part where the magnetic gap is formed.

For example, silicon dioxide (Si02) l! By interposing the gap spacers 10 and fixing them together, a core block B of a magnetic head as shown in FIG. 13 is obtained.

Next, mirror polishing is performed on the surface of the core block B of the magnetic head that is to be the sliding surface of the magnetic head, and then the core block B of the magnetic head is cut at the part indicated by the dotted line in FIG. 13. Cores C2C of individual magnetic heads as shown in FIG. 14 are obtained.

Core C2C of each magnetic head shown in FIG.
The magnetic head is completed by winding the coil around the coil winding window 9 in .

In the embodiment of the method for manufacturing a magnetic head of the present invention described with reference to FIGS. 1 to 14, only a magnetic head having one type of track width Tw is manufactured from one magnetic block 1. However, in the manufacturing method of the magnetic head of the present invention, 1. magnetic block 1
It is also possible to manufacture a plurality of types of magnetic heads each having a different track width. Figure 15 shows different track widths T from one magnetic block 1.
An example of the pattern of the kerfs 7, 7, . . . is shown in the case where two types of magnetic heads equipped with Vl and Tv2 are manufactured. The kerfs 7, 7, . . . in the state shown in FIG. Filling the inside with a ferromagnetic material, obtaining a pair of magnetic blocks, and other processing can also be realized by applying processing means similar to those described in the embodiments described above.

(Effects) As is clear from the above detailed explanation, the manufacturing method of the magnetic head of the present invention includes a step of mirror polishing one surface of the magnetic block where the sliding surface side of the magnetic head is to be formed, and A step of depositing and forming a thin film of wear-resistant non-magnetic material with a thickness slightly larger than the depth of the magnetic gap on the mirror-polished surface of the block; forming a large number of kerfs at predetermined intervals in a thin film of magnetic material, each having a width corresponding to track [1] of the magnetic gap in the magnetic head and having a depth that reaches the magnetic block; The step of filling each of the plurality of kerfs with a ferromagnetic material, and the step of filling the ferromagnetic material in a direction perpendicular to the kerfs at predetermined intervals in the longitudinal direction of the kerfs. A step of cutting the body block to obtain a magnetic block half, a step of machining a window hole for coil winding in one or both of the two paired magnetic block halves, and forming the pair described above. A process of polishing the abutting surfaces of the two magnetic block halves, interposing a gap spacer made of non-magnetic material in the magnetic gap, and abutting the two magnetic block halves to integrate them. The process of fixing the core block of the magnetic head to obtain the core block of the magnetic head, and converting the surface of the core block of the magnetic head that is to be the sliding surface of the magnetic head to the curved surface required for the sliding surface of the completed magnetic head. The present invention is comprised of a process of mirror polishing to a shape, a process of cutting the core block of the magnetic head to obtain individual magnetic head cores, and a process of winding a coil around the core of the magnetic head. According to the manufacturing method of the magnetic head, the track width of the magnetic gap is accurately determined by the mask pattern used, and the depth of the magnetic gap of the magnetic head is controlled by depositing and forming it on the surface of the magnetic block. The thickness of the non-magnetic material having wear resistance is easily controlled during the formation of the thin film. Therefore, with the method of manufacturing a magnetic head of the present invention, it is easy to mass-produce magnetic heads having a magnetic gap having a predetermined track width and a predetermined depth. According to the above-mentioned conventional technology, it becomes easy to manufacture a magnetic head compatible with high He magnetic recording media, which was difficult to manufacture, and a magnetic head with excellent performance can be provided at a low cost. In the method for manufacturing a magnetic head of the present invention, a single magnetic body is formed by determining a desired pattern of grooves to be formed in a wear-resistant non-magnetic material adhered to a magnetic block. A plurality of types of magnetic heads each having a different track width can be easily manufactured from a block.

[Brief explanation of the drawing]

1 to 15 are perspective views showing the outline of steps in manufacturing a magnetic head using the magnetic head manufacturing method of the present invention. 1... Magnetic block, 2... Thin film of #I abrasive non-magnetic material, 3... Metal thin film, 4... Photoresist layer, 5, 6... Removal portion , 7...kerf. 8... Ferromagnetic material, 9... Window hole for coil winding,
10... Gap spacer, A... Half magnetic block, B... Core block of magnetic head, C... Core of magnetic head,

Claims (1)

[Claims] A process of mirror-polishing one surface of the magnetic block where the sliding surface side of the magnetic head is to be formed, and forming a magnetic gap on the mirror-polished surface of the magnetic block using a wear-resistant non-magnetic material. A step of depositing a thin film having a thickness slightly larger than the depth, and adding a magnetic material to the thin film of the wear-resistant non-magnetic material having a width corresponding to the track width of the magnetic gap in the magnetic head. forming a large number of kerfs having a depth that reaches the block at predetermined intervals; filling each of the kerfs with a ferromagnetic material in the longitudinal direction of the kerf; a step of cutting the magnetic block in a direction perpendicular to the kerf at a predetermined interval apart from each other to obtain a magnetic block half; and two paired magnetic block halves. A step of machining a window hole for coil winding in one or both of the above, a step of polishing the abutting surfaces of the two magnetic block halves forming the pair, and a step of machining a non-magnetic material in the magnetic gap area. The step of obtaining a core block of a magnetic head by abutting two halves of magnetic material blocks and fixing them together with a gap spacer of A process of mirror-polishing the surface to be made into a curved surface shape required for the sliding surface of the completed magnetic head, and a process of cutting the core block of the magnetic head to obtain the core of each magnetic head. , a method for manufacturing a magnetic head that consists of the process of winding a coil around the core of the magnetic head.