JPS60252276A - 回路部品の測定装置 - Google Patents

回路部品の測定装置

Info

Publication number
JPS60252276A
JPS60252276A JP59107623A JP10762384A JPS60252276A JP S60252276 A JPS60252276 A JP S60252276A JP 59107623 A JP59107623 A JP 59107623A JP 10762384 A JP10762384 A JP 10762384A JP S60252276 A JPS60252276 A JP S60252276A
Authority
JP
Japan
Prior art keywords
tester
temperature
temp
circuit component
measuring device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59107623A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0150872B2 (enExample
Inventor
Katsumi Takami
高見　勝己
Yukichi Yamaguchi
山口　祐吉
Fujio Ozawa
小沢　不二夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP59107623A priority Critical patent/JPS60252276A/ja
Publication of JPS60252276A publication Critical patent/JPS60252276A/ja
Publication of JPH0150872B2 publication Critical patent/JPH0150872B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
JP59107623A 1984-05-29 1984-05-29 回路部品の測定装置 Granted JPS60252276A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59107623A JPS60252276A (ja) 1984-05-29 1984-05-29 回路部品の測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59107623A JPS60252276A (ja) 1984-05-29 1984-05-29 回路部品の測定装置

Publications (2)

Publication Number Publication Date
JPS60252276A true JPS60252276A (ja) 1985-12-12
JPH0150872B2 JPH0150872B2 (enExample) 1989-10-31

Family

ID=14463874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59107623A Granted JPS60252276A (ja) 1984-05-29 1984-05-29 回路部品の測定装置

Country Status (1)

Country Link
JP (1) JPS60252276A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0429882U (enExample) * 1990-06-29 1992-03-10
JPH0534405A (ja) * 1991-07-31 1993-02-09 Hitachi Electron Eng Co Ltd Ｉｃハンドラの温度制御方式
JPH05180898A (ja) * 1991-12-27 1993-07-23 Hitachi Electron Eng Co Ltd 低温ハンドラの温度制御方式

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0429882U (enExample) * 1990-06-29 1992-03-10
JPH0534405A (ja) * 1991-07-31 1993-02-09 Hitachi Electron Eng Co Ltd Ｉｃハンドラの温度制御方式
JPH05180898A (ja) * 1991-12-27 1993-07-23 Hitachi Electron Eng Co Ltd 低温ハンドラの温度制御方式

Also Published As

Publication number Publication date
JPH0150872B2 (enExample) 1989-10-31

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