JPS6025017A - Thin film magnetic head - Google Patents

Abstract

PURPOSE:To enable exact control of a gap width and to prevent the crack in magnetic pole parts and the deformation of the magnetic poles by disposing at least one film consisting of the IV-A group or the nitride of the metal belonging to the VI-A group between the magnetic poles. CONSTITUTION:A thin film 2 consisting of the IV-A group in the long form of period table or the nitride of the metal belonging to the VI-A group, for example, titanium oxide, is formed on a base plate 1 and a quartz glass layer 3 which is the reformed layer of the boundary surface is formed thereon. The film 2 is sandwiched between one end of a ''Permalloy'' yoke 6 constituting a magnetic pole and the plate 1 to form a head gap 7. The thin titanium oxide film which is mechanically and chemically strong is positioned in the gap part by the above-mentioned constitution, by which the gap is stabilized and the wear resistance is improved. A quartz glass layer is provided on the boundary surface between the titanium nitride film and the magnetic film of the metallic crystal, by which the influence on the magnetic film of the metallic crystal owing to the crystal growth of the thin titanium nitride film and the deterioration of the magnetic characteristic are prevented.

Description

TECHNICAL FIELD The present invention relates to a thin film magnetic head, and more particularly to a thin film magnetic head in which a magnetic film is formed as a thin film on a substrate.

Prior Art A thin film magnetic head, in which a magnetic thin film, electrodes, etc. are formed on a substrate using a thin film deposition method such as sputtering or vapor deposition,
As magnetic recording density increases, it is widely used in information devices such as external storage devices for electronic computers, as well as video tape recorders, magnetic recording cameras, digital audio recorders, etc.

Since such a thin film magnetic head can be manufactured using the same thin film technology as an IC, it is highly suitable for mass production and can achieve stable and uniform performance.

In addition, accuracy has improved with the development of IC processing methods, and heads that are densely integrated, such as multi-track heads in which a large number of heads are arranged on the same substrate, are now being manufactured.

In the conventional thin film magnetic head of this type, a quartz glass layer used in the process of forming a thin film laminated circuit on a ferrite substrate is used as an insulating film for a wire loop circuit, and at the same time, a magnetic helad gap is also formed.

However, using this structure has the following drawbacks.

One of these is that when attempting to form a narrow head gap, it is extremely difficult to control the gap width.

Another reason is that the silica glass layer is brittle and weak, so if the magnetic pole is made of ferrite or the like, it is likely to cause chips and cracks in the gap, causing so-called microcranks, which are fine cracks, to occur when the magnetic recording medium slides. The problem is that the head may be damaged.

The other is when the magnetic pole is made of a metal material, such as sendust or permalloy, and if the magnetic recording medium continues to slide, the metal magnetic pole will undergo plastic deformation, causing the gap to deform, move, or flow, making it unusable. This is the point at which the state of .

Objective: The present invention has been made to eliminate the above-mentioned drawbacks of the conventional method, and it is possible to accurately control the gap width, prevent the occurrence of microcracks in the magnetic pole portion, and prevent deformation of the magnetic pole. The object of the present invention is to provide a magnetic head configured to perform the following functions.

Embodiments First Embodiment Hereinafter, the present invention will be explained in detail based on embodiments shown in the drawings.

FIG. 1 and FIG. 2 illustrate one embodiment of the present invention.
FIG. 2 shows the main part of the section A-B in FIG. 1. (However, in FIG. 2, the quartz glass layer 5 is removed.) In the figure, reference numeral 1 designates a substrate, which is made of ferrite or the like and constitutes one magnetic pole of the magnetic head.

On this substrate 1, a nitride of a metal belonging to Group B1 or Group B in the long-period periodic table of elements (according to Iwanami Physical and Chemical Dictionary), such as titanium nitride thin film 2, is formed. Furthermore, an insulating layer made of an insulating material, such as a quartz glass layer 3, is formed as a modified layer on the boundary surface.

A conductor coil 4 and a magnetic circuit (not shown) are formed in a spiral shape by a thin film deposition method or the like on the upper side of the quartz glass layer 3, and the outside thereof is covered with a quartz glass layer 5 which is an insulating layer. There is.

The outer side of this quartz glass layer 5 is covered with a permalloy yoke 6 that constitutes another magnetic pole of the magnetic head.
A head gap 7 is formed between one end of the titanium nitride thin film 2 and the substrate 1 with the titanium nitride thin film 2 sandwiched therebetween.

This titanium nitride thin film 2 is extremely hard with a Vickers hardness of 700 HV or more, is chemically stable, and exhibits excellent wear resistance and prevention of plastic deformation when the magnetic recording medium slides.

By forming such a mechanically and chemically strong titanium nitride thin film 2, it is possible to prevent damage to the magnetic circuit and the like due to ion milling performed during the manufacturing process.

Next, the functions of the magnetic head according to the present invention configured as described above will be explained.

When a current is supplied to the conductor coil 4, a magnetic field is induced between the substrate 1 and the Tsukuma alloy yoke 6, and a magnetic flux is generated at the bed gap 7.

This magnetic flux performs the recording function on the magnetic recording medium.

On the other hand, according to the amount of change in the magnetic flux flowing in from the head gap 7, the magnetic flux is circulated through the permalloy yoke 6 and the ferrite substrate 1, thereby generating a voltage in the conductor coil 4, thereby making it possible to reproduce magnetic recording. .

By the way, when a crystalline titanium nitride thin film is formed on the chemically polished surface of the substrate 1, a phenomenon similar to autoepitachy/- occurs according to the crystal orientation of the polished surface, and titanium dinitride is affected according to the grain and crystal plane of the substrate 1. A film is formed.

When a metal crystal magnetic film such as Permalloy or Sendust, which constitutes a magnetic circuit, is formed on this titanium dinitride film, these are directly affected by the growth surface of the titanium dinitride film, and the magnetic properties change to the metal crystal magnetic film on the amorphous substrate. It deteriorates significantly compared to when a film is formed.

Therefore, in the present invention, in order to prevent this, a quartz glass layer is formed on the interface between the titanium nitride thin film 2 and the metal crystal magnetic film in order to eliminate the history of interlayer growth.

As described above, metal crystal magnetic films such as permalloy and sendust are greatly influenced by the underlying material on which they are formed, and Table 1 shows these conditions.

As is clear from Table 1, it can be seen that when the base is a titanium nitride film, the coercive force -IC becomes significantly large.

Since this embodiment is constructed as described above, a mechanically and chemically extremely strong titanium nitride thin film is placed in the gap to prevent chipping or deformation of the gap when the magnetic recording medium slides. A thin film magnetic head with a stable head gap and excellent wear resistance can be obtained. Also,
Since the quartz glass layer is provided at the interface between the titanium nitride film and the metal crystal magnetic film, the metal crystal magnetic film can prevent the effects of crystal growth of the titanium nitride thin film and prevent deterioration of magnetic properties.

Second Embodiment In the above-described embodiment, a structure using titanium nitride was adopted as the material for forming the gear saw, but nitrides of metals belonging to Group B or Group B in the long-period element periodic table may also be used. It is possible to use.

For example, even when using chromium nitride, it is necessary to form a quartz glass layer on top of the insulating layer to prevent the effects of crystal growth of chromium nitride from affecting the metal crystal magnetic film. .

In addition, like laminating a titanium nitride film and a chromium nitride film,
A structure in which a plurality of layers of different nitrides of metals belonging to Group B or Group B are laminated may be adopted.

Further, in each of the embodiments described above, a ferrite substrate is used as the substrate 1, but the ferrite may be a single crystal ferrite or a polycrystalline ferrite.

The present invention also applies to a structure in which a different magnetic material is laminated on a ferrite substrate and a head gap is formed thereon, or a structure in which a magnetic thin film is formed on a non-magnetic substrate and a head gap is formed thereon. can be applied.

In the above embodiment, only one head is constituted by one coil on the substrate 1, but the substrate 1
Of course, a plurality of coils may be placed thereon to form a plurality of heads.

Effects As is clear from the above description, according to the present invention, at least one titanium nitride film or a chromium nitride film is formed between one magnetic pole and the other magnetic pole arranged on the substrate facing each other.
Since this structure employs a structure in which a gap is formed, it is possible to obtain a thin-film magnetic head with less damage to the gap portion, excellent wear resistance, and a stable head gap.

In addition, since a silica glass layer is formed on the top of the titanium nitride film or chromium nitride film, the crystal growth of the titanium nitride or chromium nitride film does not affect the metal crystal magnetic film, thereby preventing deterioration of magnetic properties. never occurs.

[Brief explanation of the drawing]

7-7 FIG. 1 is a perspective view, and FIG. 2 is an A-β of FIG. 1.
It is a partially enlarged sectional view of the line. 1... Substrate 2... Titanium nitride thin film 3... Quartz glass layer 4... Conductor coil 5... Glass layer 6
...Permalloy yoke γ...magnetic gap. Patent Applicant: Canon Co., Ltd. Procedural Amendment (September 20, 1980, Mr. Commissioner of the Japan Patent Office, 1, Indication of the Case: 1982 Patent Application No. 132806, 2, Name of the Invention: 11, Magnetic Head 3, Relationship with the case of the person making the amendment Patent applicant name (ioo) Canon Co., Ltd. 4, agent Telephone: 03 (268) 2481 (I. 6. Contents of the amendment As shown in the attached sheet. Contents of the amendment 1) The scope of the patent claims should be written in the attached sheet. 2) Change "Figure 2" from page 4, line 11 of the specification to "Figure 1".
Correct. 3) Change “■ Genus B” from line 16 to line 17 of the same page section to “■
"Genus A" and "■ Genus B" are corrected to "■ Genus A." 4) Correct "■ Genus B" to "■ Genus A" and "■ Genus B" to "■ Genus A" on page 8, line 10 of the same page. 5) In the 19th line of the same page, change “■Genus B” to “■Genus A” and “■
``Genus B'' is corrected to ``■Genus A.'' The scope of patent claims will be amended as follows. (+) In a thin n-type magnetic head that has one or more magnetic poles provided on a substrate constituting one magnetic pole and a magnetic gap between them, 1. A thin-film magnetic head characterized in that fl films made of nitrides of metals of the same type are arranged. (2) The thin film magnetic head according to claim 1, wherein an insulating layer is formed on the film made of nitride disposed between the magnetic poles. (3) Kunou J or between the magnetic poles! A thin film magnetic head according to claim 1, characterized in that a plurality of layers made of nitrides of different metals belonging to ML are arranged in a stacked manner. 95-

Claims (3)

[Claims] (1) In a thin film magnetic head that has one or more magnetic poles provided on a substrate constituting one magnetic pole and a magnetic gap between the two, there is a gap between the magnetic poles.
A thin film magnetic head characterized in that at least one film made of a nitride of a metal belonging to Group B is disposed. (2) The thin film magnetic head according to claim 1, wherein an insulating layer is formed on the film made of nitride disposed between the magnetic poles. (3) A thin film magnetic head according to claim 1, characterized in that a plurality of layers made of nitrides of different metals belonging to Group B or Group B are stacked and arranged between the magnetic poles.