JPS60248518A - Conveyor - Google Patents
ConveyorInfo
- Publication number
- JPS60248518A JPS60248518A JP10382184A JP10382184A JPS60248518A JP S60248518 A JPS60248518 A JP S60248518A JP 10382184 A JP10382184 A JP 10382184A JP 10382184 A JP10382184 A JP 10382184A JP S60248518 A JPS60248518 A JP S60248518A
- Authority
- JP
- Japan
- Prior art keywords
- conveying body
- magnetic field
- guide
- dust
- injection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G54/00—Non-mechanical conveyors not otherwise provided for
- B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
Landscapes
- Non-Mechanical Conveyors (AREA)
- Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
Abstract
Description
【発明の詳細な説明】 〔技術分野〕 本発明は搬送機の構成に関する。[Detailed description of the invention] 〔Technical field〕 The present invention relates to the structure of a conveyor.
従来、搬送機は、レール、ガイド上を車輪を有する車輌
体に搬送物を入れ、電気モーター等により搬送するのが
通例であった。BACKGROUND ART Conventionally, it has been customary for a conveyance machine to place a conveyed object into a vehicle body having wheels on rails or guides, and to convey the object using an electric motor or the like.
しかし、上記従来技術によると、軸受部、レールと車輪
、ある゛いはバンク、グラフと電線との接触部での摩耗
により粉塵が発生し、このような発塵のある搬送機は、
ＬＳＩ等のウェーハやマスクツ搬送には発塵を極度に嫌
うところから不向きであるという欠点があった。However, according to the above-mentioned conventional technology, dust is generated due to wear at the bearings, the rails and wheels, or the contact areas between banks, graphs, and electric wires.
It has the disadvantage that it is unsuitable for transporting wafers such as LSI and masks because it is extremely sensitive to dust generation.
本発明は、かかる従来技術の欠点をなくシ、ＬＳＩウェ
ーハやマスクの搬送に適した無塵搬送機を提供すること
を目的とする。SUMMARY OF THE INVENTION An object of the present invention is to eliminate the drawbacks of the prior art and provide a dust-free transport machine suitable for transporting LSI wafers and masks.
上記目的を達成するための本発明の基本的な構成は、搬
送機に於て、強磁性体または強磁場ガイド内には強磁性
体を有する搬送体が磁気浮上して設置され、該搬送体を
外部磁場により搬送することを特徴とする。The basic configuration of the present invention for achieving the above object is that a carrier having a ferromagnetic material is magnetically levitated and installed in a ferromagnetic material or a strong magnetic field guide, and the carrier is It is characterized by being transported by an external magnetic field.
以下、実施例により本発明を詳述する。 Hereinafter, the present invention will be explained in detail with reference to Examples.
第１図は本発明の一実施例を示す搬送機の要部の断面図
である。すなわち、射出成形された希土類磁石から成る
ガイド３内には、射出成形された希土類磁石から成る搬
送体２が磁気浮上して設置され、該搬送体２内にはＳｉ
ウェーハーカセット１が設置され、外部磁石４により磁
場を変えながら前記搬送体２をガイド６に沿って搬送す
ることによりＳｉウェーハ・カセット１を任意の所定位
置に搬送する。FIG. 1 is a sectional view of the main parts of a conveying machine showing an embodiment of the present invention. That is, a carrier 2 made of an injection-molded rare earth magnet is magnetically levitated and installed in a guide 3 made of an injection-molded rare earth magnet, and a Si is placed inside the carrier 2.
A wafer cassette 1 is installed, and the Si wafer cassette 1 is transported to an arbitrary predetermined position by transporting the carrier 2 along the guide 6 while changing the magnetic field by an external magnet 4.
尚、ガイド３は強磁場を外部コイル等による強磁石から
溝状に発生させると共に、それ自身の磁場を変えて、搬
送体２を搬送しても良い。The guide 3 may generate a strong magnetic field in the form of a groove from a strong magnet such as an external coil, and may also change its own magnetic field to transport the transport body 2.
上述の如く、常磁性搬送体を磁気浮上させて搬送するこ
とにより、摩擦部が一切無く、無塵で搬送することがで
き、ＬＳＩ製造の場合に用いると、ＬＳＩが高歩留にで
きる効果がある。As mentioned above, by magnetically levitating the paramagnetic carrier and transporting it, there are no friction parts and the transport is dust-free, and when used in LSI manufacturing, it has the effect of increasing the yield of LSI. be.
第１図は本発明の一実施例を示す磁気浮上搬送機の要部
の断面図である。
１・・・・・・ウェーハ・カセット
２・・・・・・磁気搬送体
５・・・・・・磁気ガイド
４・・・・・・外部磁石
以 上
出願人 株式会社諏訪精工舎
代理人 弁理士 最上 務FIG. 1 is a cross-sectional view of the main parts of a magnetically levitated conveyor according to an embodiment of the present invention. 1...Wafer cassette 2...Magnetic carrier 5...Magnetic guide 4...External magnet or more Applicant Suwa Seikosha Co., Ltd. Agent Patent attorney Tsutomu Mogami
Claims (1)
送体が磁気浮上して設置され、該搬送体を外部磁場によ
り搬送することを特徴とする搬送機。A conveying machine characterized in that a conveying body having a ferromagnetic substance is magnetically levitated and installed in a ferromagnetic body or a strong magnetic field guide, and the conveying body is conveyed by an external magnetic field.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10382184A JPS60248518A (en) | 1984-05-23 | 1984-05-23 | Conveyor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10382184A JPS60248518A (en) | 1984-05-23 | 1984-05-23 | Conveyor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60248518A true JPS60248518A (en) | 1985-12-09 |
Family
ID=14364071
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10382184A Pending JPS60248518A (en) | 1984-05-23 | 1984-05-23 | Conveyor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60248518A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04142734A (en) * | 1990-10-03 | 1992-05-15 | Mitsubishi Electric Corp | Fine processing device and method |
-
1984
- 1984-05-23 JP JP10382184A patent/JPS60248518A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04142734A (en) * | 1990-10-03 | 1992-05-15 | Mitsubishi Electric Corp | Fine processing device and method |
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