JPS60242713A - Electrode structure of piezoelectric transducer - Google Patents
Electrode structure of piezoelectric transducerInfo
- Publication number
- JPS60242713A JPS60242713A JP9957584A JP9957584A JPS60242713A JP S60242713 A JPS60242713 A JP S60242713A JP 9957584 A JP9957584 A JP 9957584A JP 9957584 A JP9957584 A JP 9957584A JP S60242713 A JPS60242713 A JP S60242713A
- Authority
- JP
- Japan
- Prior art keywords
- vibrating
- electrode
- branches
- electrode structure
- longitudinal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 abstract description 6
- 238000007740 vapor deposition Methods 0.000 abstract description 4
- 238000004904 shortening Methods 0.000 abstract 1
- 230000005684 electric field Effects 0.000 description 16
- 238000000034 method Methods 0.000 description 15
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/21—Crystal tuning forks
- H03H9/215—Crystal tuning forks consisting of quartz
Abstract
Description
【発明の詳細な説明】
〔産業上の″ｆＦＩＪ用分野〕
本発明は、長さたて振動モードで動作する。３本の振動
枝を有する圧電振動子（以下簡単のためＥ型振動子゛と
略称する）の高次振動を励振する電極構造に関する。Detailed Description of the Invention [Industrial field of fFIJ] The present invention operates in a longitudinal vibration mode.A piezoelectric vibrator (hereinafter referred to as an E-type vibrator for simplicity) having three vibrating branches. It relates to an electrode structure that excites higher-order vibrations (abbreviated as ).
近年エレクトロニクスの発展に伴って一使用される水晶
振動子の周波数帯は拡大の一途をた片っている。高周波
帯では厚みすべりモードを利用し。In recent years, with the development of electronics, the frequency band of the crystal oscillators used has continued to expand. In the high frequency band, the thickness shear mode is used.
たＡＴカット振動子が主流であり一低周波帯では屈曲モ
ードを利用した音叉型振動子が主流となっている、一方
中周波帯では、長さたてモードを利用した振動子が注目
されはじめており、Ｅ型振動子もそのなかの一つである
。しかし従来のＥ型振動子は−１次振動モードの励振に
適し、た電極構造をとって℃・るため１周波数の高いＥ
型振動子を設計しようとすると一娠動枝の長さ寸法は、
非常に短かくしなければならず、その結果クリスタルイ
ンピーダンス（ＣＩ値）が大きくなってしまうという欠
点があった、
〔発明の目的〕
本発明の目的は２周波数を高く設計してもＣＩ値が大き
くならないようなＥ型振動子の電極構造を提供すること
にある。AT-cut vibrators are mainstream, and in the low frequency band, tuning fork type vibrators that use a bending mode are the mainstream.On the other hand, in the medium frequency band, vibrators that use a longitudinal mode are beginning to attract attention. The E-type resonator is one of them. However, the conventional E-type vibrator is suitable for excitation in the -1st vibration mode, and has a high-frequency E
When trying to design a type oscillator, the length dimension of the single moving branch is
[Object of the Invention] The purpose of the present invention is to make the crystal impedance (CI value) large as a result of having to make it extremely short. It is an object of the present invention to provide an electrode structure for an E-type vibrator that does not occur.
この目的を達成するために一本発明では−長さたて振動
モードで動作する− ３本の振動枝を有する圧電振動子
の電極構造において一振動枝に固着されている電極の極
性が一振動枝の長手方向にそって交互に反転しているこ
とを特徴とし７ている。In order to achieve this object, in the present invention, in the electrode structure of a piezoelectric vibrator having three vibrating branches, which operates in a longitudinal vibration mode, the polarity of the electrode fixed to one vibrating branch is set to one vibration. It is characterized by alternating inversions along the longitudinal direction of the branches.
以下図面に基づき本発明の詳細な説明する。 The present invention will be described in detail below based on the drawings.
第１図は本発明の一実施例を示す斜視図である。FIG. 1 is a perspective view showing an embodiment of the present invention.
Ｅ型振動子１０はｍ＝様な板厚の水晶から一体に形成さ
れており、振動技１１１１１３の側面には、電極として
金属の蒸着膜がもうけられている、例えば、振動技１１
の一方の側面１１ａ上には電極膜ＩＡａ−１５ａが各々
独立に基部側からこの順に蒸着により形成されている。The E-type vibrator 10 is integrally formed from crystal with a plate thickness of m=, and a metal vapor-deposited film is formed as an electrode on the side surface of the vibration technique 111113.
Electrode films IAa-15a are independently formed on one side surface 11a of the electrode film IAa-15a in this order from the base side by vapor deposition.
そして電極膜１ｄａ−１５ａは極性が互℃・に逆極性と
なるように電極端子１４−１５に接続されている。そし
て振動技１１の他方の側面１ｉｂ上には電極膜１５ｂ−
１ａｂがやはり基部側からこの順に蒸着にて形成されて
いる。そして電極膜１ｄｂ−１５ｂの極性も互いに逆極
性となるよう電極端子１１１５に接続されており、それ
と共に電極膜ＩＡａと１５ｂ−１５ａとｔａｂは夫々枝
を挾んで逆極性にて対向配置されている。振動技１２−
１３の電極配置も同様である。Ｅ型振動子１０の電極端
子１１１５に２次の長さたて振動モードの共振周波数に
等しい周波数の交流電圧を印加すると振動技１１１１１
３の巾方向には一矢印で示す向きの駆動電界（以下簡単
に平行電界と称する）が発生する。その結果−振動技１
１．１２−１３は、水晶の逆圧電効果によって、長手方
向にのび縮みのひずみ成分を伴った２次の長さたて振動
を行う。この場合振動技１１と１６は同相で−振動枝１
２は逆相で振動する。The electrode films 1da-15a are connected to electrode terminals 14-15 so that their polarities are opposite to each other. Then, on the other side surface 1ib of the vibration technique 11, an electrode film 15b-
1ab are also formed by vapor deposition in this order from the base side. The electrode films 1db-15b are connected to the electrode terminal 1115 so that the polarities are opposite to each other, and the electrode films IAa, 15b-15a and tab are arranged opposite to each other with opposite polarities between the branches. . Vibration technique 12-
The arrangement of electrodes No. 13 is also similar. When an AC voltage with a frequency equal to the resonance frequency of the secondary longitudinal vibration mode is applied to the electrode terminal 1115 of the E-type vibrator 10, the vibration technique 11111
In the width direction of 3, a driving electric field (hereinafter simply referred to as a parallel electric field) is generated in the direction indicated by an arrow. The result - vibration technique 1
1.12-13 performs second-order longitudinal vibration accompanied by a strain component of expansion and contraction in the longitudinal direction due to the inverse piezoelectric effect of the crystal. In this case, vibration techniques 11 and 16 are in phase - vibration branch 1
2 vibrates in opposite phase.
第２図は本発明の他の実施例を示す斜視図である。本実
施例においては振動技２１２１２３の上下面に金属の蒸
着膜がもうけられていて一駆動電界の方向は振動技の厚
み方向（以下簡単に垂直電界と称す）になっている。電
極配置と振動子の動作については前記第１図の実施例と
同様である。FIG. 2 is a perspective view showing another embodiment of the invention. In this embodiment, a metal vapor deposited film is formed on the upper and lower surfaces of the vibration technique 212123, and the direction of the driving electric field is the thickness direction of the vibration technique (hereinafter simply referred to as a vertical electric field). The electrode arrangement and the operation of the vibrator are the same as in the embodiment shown in FIG. 1 above.
第３図は本発明の他の実施例を示す斜視図である。、Ｅ
型振動子６０は３次の長さたて振動モードで動作する、
電極配置については−例えば振動技３１の同一側面−３
１８は極性が交互に反転した３つの電極３５．６６−３
７が配置されており、振動技６１の反対側の同一側面３
１ｂにも同様の電極が配置されている、他の振動技３１
３３の電極配置も同様である。この場合のＥ型振動子の
駆動は平行電界で行われる。第３図の実施例に対応する
実施例とｌ、て−雷、極配置は振動技の上下面にもうけ
、駆動は垂直電界で行う方法があるが一図示は省略する
。FIG. 3 is a perspective view showing another embodiment of the present invention. , E
The mold vibrator 60 operates in a third-order longitudinal vibration mode.
Regarding electrode placement - for example, the same side of vibration technique 31 - 3
18 is three electrodes 35.66-3 whose polarity is alternately reversed.
7 is placed, and the same side 3 opposite the vibration technique 61
Other vibration technique 31 where similar electrodes are placed in 1b
The arrangement of electrodes 33 is also similar. In this case, the E-type vibrator is driven by a parallel electric field. In an embodiment corresponding to the embodiment shown in FIG. 3, there is a method in which the pole arrangement is provided on the upper and lower surfaces of the vibrating device and the driving is performed using a vertical electric field, but this method is omitted from illustration.
以上の説明から明らかなように一般に０次（ｎ＝１、ｌ
：ｌ ４・・・・・・）の長さたて振動モードを励振す
る場合は一極性が交互に反転するｎ個の電極を配置すれ
ばよく一電極を振動技の側面にもうけるか、上下面にも
うけるかは一駆動電界を平行電界とするか一垂直電界と
するかによって決めればよいことがわかる。以上の実施
例では、振動子の材質は水晶でできている場合について
説明してきたが１本発明は材質が水晶に限定されるもの
ではなく、他の圧電材−例えば−タンタル酸リチウム−
ニオブ酸リチウム、セラミックス等に適用できることは
明らかである、又Ｅ型振動子の形状も一３大の場１１）
Ｉ朽の妨由寸炊が笛りい場合に限らず一枝巾寸法が互い
に異なっている場合にも適用できるものである。As is clear from the above explanation, it is generally 0th order (n=1, l
:l 4...) When exciting the vertical vibration mode, it is sufficient to arrange n electrodes whose polarity is alternately reversed. Either place one electrode on the side of the vibration technique, or It can be seen that whether to apply the driving electric field to the lower surface can be determined depending on whether the driving electric field is a parallel electric field or a perpendicular electric field. In the above embodiments, a case has been described in which the material of the vibrator is quartz; however, the present invention is not limited to quartz, and may be made of other piezoelectric materials such as lithium tantalate.
It is clear that it can be applied to lithium niobate, ceramics, etc., and the shape of the E-type resonator is also applicable to 13 major fields11)
This can be applied not only to cases where the length of the pipe is different, but also to cases where the width of one branch is different from each other.
本発明によれば一高次の長さたて撮動モードが容易に励
振できるため一振動枝の長さ寸法は短かくすることなく
、高い周波数で−低いＣＩ値をもったＥ型振動子が中周
波帯（３００ＫＨｚ〜３’ＭＨｚ）の全レンジで製造で
きるようになり、中周波帯振動子の周波数拡大に対する
本発明の効果は大きい。According to the present invention, since the first higher-order length vertical imaging mode can be easily excited, the length dimension of one vibration branch does not need to be shortened, and an E-type vibrator with a -low CI value is produced at high frequencies. can now be manufactured in the entire range of medium frequency bands (300 KHz to 3'MHz), and the present invention has a great effect on frequency expansion of medium frequency band vibrators.
第１図は本発明の実施例の電極構造を示す斜視図で一２
次の長さたてモードを励振する電界は平行電界の場合で
ある。
第２図は本発明の他の実施例の電極構造を示す斜視図で
、２次の長さたてモードを励振する電界は垂直電界の場
合である。
第３図は本発明の他の実施例を示す斜視図で一３次の長
さたてモードを励振する電界は平行電界の場合である。
′
１０−３０・・・・・・Ｅ型振動子。
１１ １１ １１ ２１ ２１ ２．１１ ３１３１３
３・・・・・・振動技−
１ｄａ−１５ａ−３５−６６−３７・・・・・・金属の
蒸着膜電極。
特許出願人 シチズン時計株式会社FIG. 1 is a perspective view showing the electrode structure of an embodiment of the present invention.
The next electric field that excites the longitudinal mode is a parallel electric field. FIG. 2 is a perspective view showing the electrode structure of another embodiment of the present invention, in which the electric field that excites the second-order longitudinal mode is a vertical electric field. FIG. 3 is a perspective view showing another embodiment of the present invention, in which the electric field that excites the 13th-order longitudinal mode is a parallel electric field. ' 10-30...E-type vibrator. 11 11 11 21 21 2.11 31313
3... Vibration technique - 1da-15a-35-66-37... Metal vapor deposited film electrode. Patent applicant Citizen Watch Co., Ltd.
Claims (1)
電振動子の電極構造において一振動枝の長手方向に沿っ
て固着されている複数の電極の極性が、交互に反転して
いることを特徴とする圧電振動子の電極構造。In the electrode structure of a piezoelectric vibrator having three vibrating branches that operate in a longitudinal vibration mode, the polarity of the plurality of electrodes fixed along the longitudinal direction of one vibrating branch is alternately reversed. An electrode structure of a piezoelectric vibrator featuring:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9957584A JPS60242713A (en) | 1984-05-17 | 1984-05-17 | Electrode structure of piezoelectric transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9957584A JPS60242713A (en) | 1984-05-17 | 1984-05-17 | Electrode structure of piezoelectric transducer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60242713A true JPS60242713A (en) | 1985-12-02 |
| JPH0538483B2 JPH0538483B2 (en) | 1993-06-10 |
Family
ID=14250903
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9957584A Granted JPS60242713A (en) | 1984-05-17 | 1984-05-17 | Electrode structure of piezoelectric transducer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60242713A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002118441A (en) * | 2000-10-10 | 2002-04-19 | Citizen Watch Co Ltd | Torsional vibrator |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5760720A (en) * | 1980-09-26 | 1982-04-12 | Seiko Instr & Electronics Ltd | Tuning fork type quartz vibrator |
| JPS58111515A (en) * | 1981-12-25 | 1983-07-02 | Citizen Watch Co Ltd | Crystal oscillator |
| JPS58205318A (en) * | 1982-05-25 | 1983-11-30 | Citizen Watch Co Ltd | Electrode construction of piezoelectric crystal oscillator |
-
1984
- 1984-05-17 JP JP9957584A patent/JPS60242713A/en active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5760720A (en) * | 1980-09-26 | 1982-04-12 | Seiko Instr & Electronics Ltd | Tuning fork type quartz vibrator |
| JPS58111515A (en) * | 1981-12-25 | 1983-07-02 | Citizen Watch Co Ltd | Crystal oscillator |
| JPS58205318A (en) * | 1982-05-25 | 1983-11-30 | Citizen Watch Co Ltd | Electrode construction of piezoelectric crystal oscillator |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0538483B2 (en) | 1993-06-10 |
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