JPS60237638A - Production of thin film type magnetic recording medium - Google Patents

Abstract

PURPOSE:To enable formation of a thin magnetic metallic film having the magnetic characteristic uniform on each part by providing a specifically constituted means for introducing gas near a vapor deposition region and supplying uniformly the gas during vapor deposition. CONSTITUTION:The means for introducing gas provided near the vapor deposition region is constituted of a tubular body 7 provided with plural gas releasing ports 6 and a tubular member 8 provided with a slit 9 having a prescribed width on the side opposite from the ports 6. Vapor deposition is executed while the gas such as oxygen is uniformly ejected in the transverse direction of a non-magnetic substrate. The thin magnetic metallic film having the magnetic characteristic uniform in each part is formed on the non-magnetic substrate.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method for manufacturing a magnetic recording medium having an S film content, which is formed by depositing a metal magnetic thin film on a non-magnetic support.

BACKGROUND TECHNOLOGY AND PROBLEMS In recent years, for the purpose of increasing the density of magnetic recording, thin-film type magnetic thin films have been developed, in which a metal magnetic thin film with a thickness of several hundred to about 1μ is formed on a non-magnetic support by a method such as vacuum evaporation. Research on magnetic recording media is active. As a method for obtaining a metal magnetic thin film having a high coercive force Hc in such a thin film magnetic recording medium, a method has been proposed in which oxygen gas is sprayed onto the deposition region during deposition.

Conventionally, such oxygen gas was supplied by arranging a gas inlet pipe (2) with gas discharge ports (1) provided at predetermined intervals on the side wall of the pipe corresponding to the inside of a non-magnetic support as shown in FIG. , the oxygen gas introduced into this gas inlet pipe (2) is transferred to the gas outlet +1)
The gas is blown out and supplied to the vapor deposition area. However, as shown in the figure, from one side of the gas introduction pipe (2) @
When elementary gas (3) is introduced, it is inevitable that there will be a curve in the middle direction of the non-magnetic support! As shown in (1), there is a distribution in the ratio of gases blown out, and when viewed from the very vicinity, the amount of oxygen gas gradually decreases from the gas introduction side. For this reason, a metal magnetic vtllN! is deposited on a non-magnetic support. used to have large variations in coercive force He in the i1 direction of the nonmagnetic support.

Purpose of the Invention In view of the above-mentioned points, the present invention provides a thin-film magnetic recording device which enables the formation of a metal magnetic thin film having uniform magnetic properties in each part by uniformly blowing out gas in the direction of the non-magnetic support layer during vapor deposition. The present invention provides a method for producing a medium.

Summary of the Invention The present invention includes a first pipe for introducing gas having a plurality of gas discharge ports at predetermined intervals, a gas reservoir formed to surround the gas discharge port side, and a gas reservoir formed at a predetermined interval from the first pipe. A gas introducing means comprising a member forming a slit is disposed near the vapor deposition region to introduce gas into the vapor deposition region during vapor deposition.

According to this manufacturing method, gas is blown out uniformly in the direction of the non-magnetic support, forming a metal magnetic thin film having uniform magnetic properties in all parts.

Example Hereinafter, the present invention will be described in detail with reference to the drawings.

In this example, the gas introduction means (4
) is provided. The gas introducing means (4) includes a gas introducing pipe body (7) having a plurality of gas discharge ports (6);
The pipe member (8) hermetically surrounds the pipe body (7) over the area where the gas discharge port (6) is formed. In this case, the tube body (7) has a circular cross section, and the tube member (8) has an elliptical cross section. The plurality of gas discharge ports (6) of the tube body (7) are formed, for example, at equal intervals along the tube axis direction. In the pipe member (8), a slit-shaped opening (9) for releasing gas to the outside is provided on the opposite side from the plurality of gas discharge ports (6), and this opening (9)
The medium is said to be larger than the medium of the non-magnetic support described later. In the pipe member (8), a first gas reservoir a is formed to sandwich the pipe body (7) and surround it on the gas discharge port (6) side, and a first gas reservoir a is formed on the opposite opening (9) side. 2 gas reservoirs (11
) is formed. And, in the middle part of both gas reservoirs 0ω and (11), a sulin (12) is formed at a predetermined interval between the tube body (7) and the tube member (8).

In this gas introduction means (4), as shown in FIG. From the discharge port (6) to the first
is released into the gas reservoir αψ. The gas pressure distribution at the time of discharge becomes a non-uniform distribution in the middle direction with a peak near the position of the gas discharge port (6), as described in FIG. 1.

After being ejected into the first gas reservoir aΦ, the gas (3) passes through the slit (12) between the tube body (7) and the tube member (8) and reaches the second gas reservoir (11). In this process, the interval between the slits (12) is extremely narrow, and the slits (12)
Since it becomes difficult for the gas flow to pass through, the gas flow starts to move in the middle direction (in the tube axis direction of the tube body (7)) within the first gas reservoir aω. As a result, the gas distribution in the first gas reservoir α becomes uniform, and the gas ejected from the second gas reservoir (11) through the slit-shaped opening (9) becomes completely uniform in the middle direction.

In addition, in the configuration of the above example, the gas (3) from the slit (12) is ejected in the middle direction with uniform pressure, so in principle, the second gas reservoir (il) and the opening (9) can be omitted. It is also possible to have a configuration in which the slit (12) faces the outside.

In addition, although the above example has a so-called double pipe structure, it is not necessary to have a double pipe structure, and even if the pipe member (8) is a double pipe, there is no need for the pipe member (8) to have an elliptical cross section. can be changed as appropriate.

In this example, the above-mentioned gas introduction means (4) is replaced by a vapor deposition apparatus (2) used for manufacturing a lI cylindrical magnetic recording medium as shown in FIG.
0). This vapor deposition apparatus (20) has a metal can (22) provided in a vacuum chamber (21), and a non-magnetic support (23) is attached to a supply reel (24) by striping the metal can (22).
from there to the take-up reel (25). On the other hand, a vapor deposition source (26) of a metal magnetic material such as Co, Fe, Ni, or an alloy thereof is arranged below the metal can (22). A shutter (27) is provided between the vapor deposition source (26) and the non-magnetic support (23) to block metal vapor flow.
) is arranged, and the vapor deposition source (
The metal magnetic particles evaporated from the non-magnetic support (23)
) at a predetermined angle of incidence. At a position close to the vapor deposition area of this non-magnetic support (23), a gas introduction means (4) is arranged so that the length direction of its slit-shaped opening (9) coincides with the 111 direction of the non-magnetic support (23). Oxygen gas is uniformly supplied to the deposition region through the gas introducing means (4). (28) is an oxygen gas supply valve;
(29) is the exhaust valve of the vacuum chamber.

According to this configuration, a predetermined amount of oxygen gas is supplied to the vapor deposition region through the gas introducing means (4) during vapor deposition of the metal magnetic material, and this #l elementary gas is supplied to the non-magnetic support (23) in the middle direction. Evenly distributed. Therefore, since the metal magnetic n is formed in the atmosphere under the conditions between each part, the coercive force He of the magnetic 11 film is uniform in each part, and a commercial quality W# pear-shaped magnetic recording medium with no variation in coercive force Hc can be obtained. It will be done. Further, in the gas release means (4) of the above example, the slit-shaped opening (9)
By adjusting the medium d and the wall thickness t, the distribution of gas in the longitudinal direction (release direction) can also be freely controlled.

Although the above example describes the case where oxygen gas is supplied, the present invention can also be applied to the case where other required gases are supplied.

Effects of the Invention According to the present invention, a first pipe into which gas is introduced has a number of gas discharge ports at predetermined intervals, and a first pipe having a gas reservoir formed so as to surround the gas discharge port side. By using a gas introduction means made of a member that forms slits at predetermined intervals between the two, gas can be uniformly blown out in the middle direction.

Therefore, by introducing a predetermined gas into the evaporation region during the ζ vapor deposition using this gas introduction means, a metal magnetic thin film having uniform magnetic properties in each part is formed, and a thin film magnetic recording medium with uniform magnetic properties can be manufactured. can do.

[Brief explanation of the drawing]

Fig. 1 is an explanatory diagram excluding an example of a conventional gas emitting means, Fig. 2 is a cross-sectional view of an example of the gas emitting means applied to the present invention, Fig. 3 is an exploded view thereof, and Fig. 4 is an explanatory diagram showing an example of the gas emitting means applied to the present invention. Partially cutaway perspective view, No. 5
The figure shows a vapor deposition apparatus applied to the present invention. (4) is a gas discharge means, (6) is a gas discharge port, (7) is a tube body, (8) is a tube member, (9) is an opening, (II is a first gas reservoir, (11) is a first 2 gas reservoir, (12) slit, (20) vapor deposition device, (23) non-magnetic support,
(26) is a metal magnetic material vapor deposited plate. Figure 2 Figure 3 Figure 4

Claims (1)

[Claims] A first pipe for introducing gas having a plurality of gas discharge ports at predetermined intervals, and a member that forms a gas reservoir so as to surround the gas discharge port side and forms slits at predetermined intervals with the first pipe. A method for producing a thin film magnetic recording medium, characterized in that a gas introducing means consisting of the following is arranged near a vapor deposition region, and a predetermined gas is introduced into the vapor deposition region during vapor deposition.