JPS60234790A - Machining head of laser beam machine - Google Patents

Machining head of laser beam machine

Info

Publication number
JPS60234790A
JPS60234790A JP59090105A JP9010584A JPS60234790A JP S60234790 A JPS60234790 A JP S60234790A JP 59090105 A JP59090105 A JP 59090105A JP 9010584 A JP9010584 A JP 9010584A JP S60234790 A JPS60234790 A JP S60234790A
Authority
JP
Japan
Prior art keywords
laser light
laser beam
mirror
laser
reflected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59090105A
Other languages
Japanese (ja)
Inventor
Ken Tanaka
憲 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP59090105A priority Critical patent/JPS60234790A/en
Publication of JPS60234790A publication Critical patent/JPS60234790A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/10Devices involving relative movement between laser beam and workpiece using a fixed support, i.e. involving moving the laser beam

Abstract

PURPOSE:To prevent the laser light reflected by a material to be machined from entering a laser light source in a backward course by disposing reflecting means in such a way that the laser light has the prescribed angle with the perpendicular axis of the material. CONSTITUTION:The laser light 8 past a condenser lens 14 is bent in a prescribed direction by the 1st and 2nd mirrors 16, 18. An actuator 22 is attached to the 2nd mirror 18 to rotate and oscillate said mirror in the direction of the arrow (b). The 2nd mirror 18 is disposed to have the prescribed angle theta with the perpendicular axis Y of the material 12 to be machined and the hole 24 of a nozzle 20 is provided so as to be offcentered. The laser light 8 reflected by the mirror 18 is diagonally irradiated on the material 12, by which the material 12 is heat- treated. Part of the laser light 8 is reflected to an endothermic plate 27 having a water-cooled construction. The entry of the reflected laser light in the backward course into the laser light source is obviated by such mechanism, by which the overheating of the light source and the deterioration and breakdown of the machine and apparatus are prevented.

Description

【発明の詳細な説明】[Detailed description of the invention]

〔発明の技術分野〕 この発明はレーザ光を用いて金属など乞加工するための
レーザ加工装置、特にその加工ヘッドに関するものであ
る。 〔従来技術〕 第3図は従来のレーザ加工装置の加工ヘッドの概略説明
図であり、この加工ヘッドは第2図に斜視図で示すレー
ザ加工装置の一部を構成するものである。第2図におい
て、(2)はレーザ加工装置の基台な゛成すペースであ
り、ベース(2)の−上には2次元又は6次元の方向に
移動できる工5に構成された加工テーブル(4)が設置
され一部に略コ字状のコラム(6)が加工テーブル(4
)を上から跨ぐように立設されている、コラム(61の
水平部の略山央部lこはレーザ光(8)を加工テーブル
(4)上の被加工物に照射する加工ヘッド(10)が設
置されている。加工ヘッド(10)は第6図に示すよう
にレーザ光(8)2被加工物(12)上で集束させる集
光手段である集光レンズ(14)と、集光レンズ(14
)Y通過し、たレーザ光(8)を所定方向に折曲させる
反射手段である第1と第2のミラー(16)、(18)
を有しており、加工ヘッド(10)の下部には第2のミ
ラー(18)Y反射したレーザ光(8)を通すためのノ
ズル(20)が設けられている。、第1のミラー(16
)は矢印aの方向に手動で回転調整可能に構成され、第
2のミラー(18)には軸Bを中心に矢印すの方向に回
転振動を与える振動手段であるアクチェータ(22)(
i 4図に斜視図で示す)が取付けられている。ノズル
(20)の先にはレーザ光(8)が通るための孔(24
)が設けられている。 (26)はレーザ光源であるレーザ光発振器であり、レ
ーザ光発振器(26)のレーザ光発振側(第2図の左側
)にはレーザ光(8)ヲ囲むよ5にして光路ダクト(2
8)が設置され、光路ダク) (28X7)左方先端部
にはペンドブロック(30)が取付けられており、ペン
ドブロック(30)にはレーザ光(8)を下方に折曲し
て加工ヘッド(10)にレーザ光(8)ヲ入力させるペ
ンドミラー(62)が設けられている。 従来のレーザ加工装置は上記のように構成され。 レーザ光発振器(26)で発振されたレーザ光(8)は
光路ダク) (28)の内部を通ってペンドロック(3
0)のペンドミラー(32)で下・方に折曲されて、加
工ヘッド(10)内に入る。加工ヘッド(10)内に入
ったレーザ光(8)は集光レンズ(14)Y通り、第1
のミラー(16)で反射され、次に第2のミラー(18
)で下方に反射され、ノズル(20)の孔(24)の中
心を通って加工テーブル(4)上の被加工物(12)に
集中照射される。レーザ光(8)は第2のミラー(18
)で紙面に垂直の方向にオツシレートされ、被加工物(
12)を極部的に加熱して熱処理する。 しかるに、このレーザ加工装置において、被加工物
[Technical Field of the Invention] The present invention relates to a laser processing device for processing metals and the like using laser light, and particularly to a processing head thereof. [Prior Art] FIG. 3 is a schematic explanatory diagram of a processing head of a conventional laser processing apparatus, and this processing head constitutes a part of the laser processing apparatus shown in a perspective view in FIG. 2. In Fig. 2, (2) is the pace formed by the base of the laser processing device, and above the base (2) is a processing table (5) configured to move in two or six dimensions. 4) is installed, and a part of the roughly U-shaped column (6) is attached to the processing table (4).
The processing head (10) that radiates the laser beam (8) onto the workpiece on the processing table (4) is located at the center of the horizontal part of the column (61), which is installed so as to straddle the column (61) from above. ) is installed.The processing head (10) has a condensing lens (14) which is a condensing means for converging the laser beam (8) 2 onto the workpiece (12), as shown in FIG. Optical lens (14
) Y passing through the first and second mirrors (16) and (18) which serve as reflecting means to bend the laser beam (8) in a predetermined direction.
A nozzle (20) is provided at the bottom of the processing head (10) for passing the laser beam (8) reflected by the second mirror (18). , the first mirror (16
) is configured to be rotatably adjustable manually in the direction of the arrow a, and the second mirror (18) is equipped with an actuator (22) (vibration means) that provides rotational vibration in the direction of the arrow A around the axis B (
i (shown in perspective in Figure 4) is installed. At the tip of the nozzle (20) is a hole (24) through which the laser beam (8) passes.
) is provided. (26) is a laser beam oscillator that is a laser light source, and on the laser beam oscillation side of the laser beam oscillator (26) (left side in Figure 2), there is an optical path duct (2) surrounding the laser beam (8).
8) is installed, and a pend block (30) is attached to the left tip of the optical path duct (28 x 7), and the pend block (30) bends the laser beam (8) downward and connects it to the processing head. (10) is provided with a pend mirror (62) into which the laser beam (8) is input. A conventional laser processing device is configured as described above. The laser beam (8) oscillated by the laser beam oscillator (26) passes through the inside of the optical path duct (28) and enters the pend lock (3).
It is bent downwardly by the pend mirror (32) of 0) and enters the processing head (10). The laser beam (8) that entered the processing head (10) is directed to the condenser lens (14) Y street, the first
mirror (16), and then reflected by the second mirror (18).
), and is focused on the workpiece (12) on the processing table (4) through the center of the hole (24) of the nozzle (20). The laser beam (8) passes through the second mirror (18
) in the direction perpendicular to the paper surface, and the workpiece (
12) is heat-treated by heating locally. However, in this laser processing device, the workpiece

【1
2】に照射されたレーザ光(8)は被加工物(12)の
材質によって一部が反射され、上記と逆のコースをたど
ってレーザ光発振器(26)に入り、レーザ光発振器(
26)を過熱させ1機器を劣化させ、破壊させることが
あるという欠点があった。 〔発明の概要〕 この発明は、かかる欠点乞改善する目的でなされたもの
で、レーザ光が被加工物の鉛直軸と所定角度構成す工う
に反射手段ケ装置することにエリ、被加工物で反射した
レーザ光が逆のコースをたどってレーザ光源に入らない
工5にしたレーザ加工 。 装置の加工ヘッドな提案するものである。 〔発明の実施例〕 第1図はこの発明の一実施例である加工ヘッドケ示す概
略説明図であり、この加工ヘッドは従来枝術において説
明したと同様に、第2図に斜視図で示すレーザ加工装置
の一部ケ構成するものである。(21〜(26)も従来
装置と全く同一である。、第2のミラー(18)はレー
ザ光+81が被加工物(12)の鉛直軸Yと所定角度θ
?成すように配置され、ノズル(20)の孔(22)は
第2のミラー(18)で反射さ才またレーザ光(8)が
通り5る工うに中心からずらして設けである。角度θと
しては10°程度が好ましいが、辺1?!、 0.1大
きさによりθに変化させてもLい。ノズル(20)の先
端部lこは被加工物(12)から反射したレーザ光(8
)の一部ケ吸収するための吸熱板(27)が設けられて
おり、吸熱板(27)は水冷構造になっている。 上記0)工5に構成されたレーザ加工装置において−レ
ーザ光(8)は第2のミラー(18)で被加工に1’2
Jの鉛1μ軸Yと所定角度θを成すように斜めに反射さ
ね、被加工物(12)に斜めに照射され、被加工物(1
2)Y加熱して熱処理するとともに、一部が反射されて
吸熱板(27)に当って吸熱板(27)で熱に変わる。 吸熱板(27)は水冷構造になっているのでたえず水冷
され、反射【、たレーザ光(8)に工って過熱するのが
防止さねている。 〔発明の効果〕 この発明は以上説明したとおり、レーザ光が被加工物の
鉛直軸と所定角度構成すよ5に反射手段を配置したので
、被加工物で反射したレーザ光が逆のコースをたどって
レーザ光源に入って、レーザ光源を過熱させて、機器な
劣化させたり、破壊させたりすることを防止することか
できるという効果がある。
[1
A portion of the laser beam (8) irradiated to point 2) is reflected by the material of the workpiece (12), follows the opposite course to the above, enters the laser beam oscillator (26), and enters the laser beam oscillator (26).
26), which could cause deterioration and destruction of the equipment. [Summary of the Invention] The present invention has been made for the purpose of improving the above-mentioned drawbacks. Laser processing with process 5 that prevents reflected laser light from following the opposite course and entering the laser light source. This is a proposal for the processing head of the device. [Embodiment of the Invention] FIG. 1 is a schematic explanatory diagram showing a processing head which is an embodiment of the present invention, and this processing head is equipped with a laser beam shown in a perspective view in FIG. It constitutes part of the processing equipment. (21 to (26) are also completely the same as the conventional device.) The second mirror (18) is arranged so that the laser beam +81 is set at a predetermined angle θ with respect to the vertical axis Y of the workpiece (12).
? The aperture (22) of the nozzle (20) is offset from the center to allow the laser beam (8) to pass through and be reflected by the second mirror (18). The angle θ is preferably about 10°, but side 1? ! , even if it is changed to θ by 0.1 magnitude. The tip of the nozzle (20) receives the laser beam (8) reflected from the workpiece (12).
) is provided with a heat absorbing plate (27) for absorbing a portion of the heat, and the heat absorbing plate (27) has a water-cooled structure. In the laser processing apparatus configured as above 0) Process 5, the laser beam (8) is applied to the workpiece by the second mirror (18) at 1'2.
It is reflected obliquely so as to form a predetermined angle θ with the lead 1μ axis Y of J, and the workpiece (12) is irradiated obliquely, and the workpiece (12) is irradiated obliquely.
2) At the same time as Y-heating and heat treatment, a part of it is reflected and hits the heat absorbing plate (27) and is converted into heat by the heat absorbing plate (27). Since the heat absorbing plate (27) has a water-cooled structure, it is constantly cooled with water to prevent it from overheating due to reflected laser light (8). [Effects of the Invention] As explained above, in this invention, the reflecting means is arranged at a position 5 such that the laser beam forms a predetermined angle with the vertical axis of the workpiece, so that the laser beam reflected from the workpiece follows the opposite course. This has the effect of preventing the laser light source from entering the laser light source and overheating the laser light source, causing equipment deterioration or destruction.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の一実施例な示す概略説明図。 第2図はレーザ加工装置の斜視図、第6図は従来の加工
ヘッドの概略説明図、第4図はアクチェータの斜視図で
ある。 図において、(10)は加工ヘッド−(14)は集光レ
ンズ、(16)は第1のミラー、(18)は第2のミラ
ー(20)はノズル、(22)はアクチェータ、(24
)は孔。 (26)はレーザ光源、(27)は吸熱板である。 なお各[ン1中同−符号+′i同一または相当部分乞示
d−ものとする。 代胛人 弁理士 木 利 三 朗 第4図 22
FIG. 1 is a schematic explanatory diagram showing one embodiment of the present invention. FIG. 2 is a perspective view of a laser processing device, FIG. 6 is a schematic explanatory diagram of a conventional processing head, and FIG. 4 is a perspective view of an actuator. In the figure, (10) is the processing head, (14) is the condenser lens, (16) is the first mirror, (18) is the second mirror, (20) is the nozzle, (22) is the actuator, and (24) is the second mirror.
) is a hole. (26) is a laser light source, and (27) is a heat absorption plate. It is assumed that the same symbols +'i in each unit 1 indicate the same or corresponding parts. Proxy Patent Attorney Sanro Ki Toshihiro Figure 4 22

Claims (1)

【特許請求の範囲】 支持台上に支持された被加工物に対してレーザ光源から
出力さ、1またレーザ光を集中照射【、て被加工物を加
工するレーザ加工装置の加工ヘッドにおいて、該加工ヘ
ッドはレーザ光な被加工物上で集束させる集光手段と、
肘集光手段?通ったレーザ光7所定方向に折曲させる1
又は2以上の反射手段と、該反ル1乎段の少なくとも1
つを振動させてレーザ光しオツシレートさせる振動手段
とY有し、上記反射手段は被加工物の鉛直軸と所定角度
を成すように1−てレーザ光な反射する工5に配置さね
でいることを特徴とするレーザ加圧装置の加工ヘッド。
[Claims] In a processing head of a laser processing device that processes a workpiece supported on a support stand, a laser beam outputted from a laser light source and irradiated with concentrated laser light is provided. The processing head includes a focusing means for focusing laser light on the workpiece,
Elbow concentrator? Passed laser beam 7 is bent in a predetermined direction 1
or two or more reflecting means and at least one of the one stage of said reflection means.
A vibrating means for vibrating the laser beam to oscillate the laser beam, and a Y for oscillating the laser beam. A processing head of a laser pressurizing device characterized by:
JP59090105A 1984-05-08 1984-05-08 Machining head of laser beam machine Pending JPS60234790A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59090105A JPS60234790A (en) 1984-05-08 1984-05-08 Machining head of laser beam machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59090105A JPS60234790A (en) 1984-05-08 1984-05-08 Machining head of laser beam machine

Publications (1)

Publication Number Publication Date
JPS60234790A true JPS60234790A (en) 1985-11-21

Family

ID=13989236

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59090105A Pending JPS60234790A (en) 1984-05-08 1984-05-08 Machining head of laser beam machine

Country Status (1)

Country Link
JP (1) JPS60234790A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6384788A (en) * 1986-09-29 1988-04-15 Nippon Steel Corp Method and device for controlling projection of laser beam
JPS63177992A (en) * 1987-01-19 1988-07-22 Mitsubishi Heavy Ind Ltd Laser welding equipment
JPS63177991A (en) * 1987-01-19 1988-07-22 Mitsubishi Electric Corp Laser beam machine
JPH04237589A (en) * 1991-01-21 1992-08-26 Nec Corp Laser beam machine
JPH05183216A (en) * 1992-01-07 1993-07-23 Ryoden Semiconductor Syst Eng Kk Laser emitting device
JPH0716768A (en) * 1993-06-30 1995-01-20 Miyachi Technos Kk Laser marking device and optical scanner mounting method
JPH0716780A (en) * 1993-06-30 1995-01-20 Miyachi Technos Kk Laser emission unit

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5410496A (en) * 1977-06-23 1979-01-26 Mitsubishi Electric Corp Laser working apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5410496A (en) * 1977-06-23 1979-01-26 Mitsubishi Electric Corp Laser working apparatus

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6384788A (en) * 1986-09-29 1988-04-15 Nippon Steel Corp Method and device for controlling projection of laser beam
JPS63177992A (en) * 1987-01-19 1988-07-22 Mitsubishi Heavy Ind Ltd Laser welding equipment
JPS63177991A (en) * 1987-01-19 1988-07-22 Mitsubishi Electric Corp Laser beam machine
JPH04237589A (en) * 1991-01-21 1992-08-26 Nec Corp Laser beam machine
JPH05183216A (en) * 1992-01-07 1993-07-23 Ryoden Semiconductor Syst Eng Kk Laser emitting device
JPH0716768A (en) * 1993-06-30 1995-01-20 Miyachi Technos Kk Laser marking device and optical scanner mounting method
JPH0716780A (en) * 1993-06-30 1995-01-20 Miyachi Technos Kk Laser emission unit

Similar Documents

Publication Publication Date Title
EP1271219B1 (en) Laser beam delivery system with trepanning module
US4675501A (en) Laser apparatus with novel beam aligning means and method of laser processing of workpieces using same
JP2007253203A (en) Optical apparatus for laser beam machining
JPS60234790A (en) Machining head of laser beam machine
JPS60240395A (en) Laser welding method
JP2001062577A (en) Laser processing device
WO1997006462A1 (en) Rotating optical system for laser machining apparatus
JPS60177983A (en) Spot welding method
JPS62216318A (en) Laser annealing apparatus
JPH0235638B2 (en)
JP2581574B2 (en) Laser processing method and apparatus
JPH07144291A (en) Method for reducing astigmatism of laser beam machine
JPS6037182Y2 (en) Laser processing equipment
JPH079891B2 (en) Laser annealing device
JPS63177991A (en) Laser beam machine
JP3226562B2 (en) Laser processing method and apparatus
JPH03184687A (en) Laser beam machining apparatus
JPS6116939Y2 (en)
JPS63154285A (en) Laser beam machine
JPS6123592A (en) Co2 laser processing
JP2716272B2 (en) Laser processing equipment
JPS5827003Y2 (en) Equipment for improving magnetic properties of electrical steel sheets
JPH08265931A (en) Laser beam machining system
JPS63105918A (en) Oscillating method by laser beam
JPH039905Y2 (en)