JPS60230027A - Thermal flow sensor - Google Patents

Thermal flow sensor

Info

Publication number
JPS60230027A
JPS60230027A JP8644184A JP8644184A JPS60230027A JP S60230027 A JPS60230027 A JP S60230027A JP 8644184 A JP8644184 A JP 8644184A JP 8644184 A JP8644184 A JP 8644184A JP S60230027 A JPS60230027 A JP S60230027A
Authority
JP
Japan
Prior art keywords
resisting
pair
temp
constitute
flow sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8644184A
Other languages
Japanese (ja)
Inventor
Takeshi Nagai
Hideo Shinoda
Masayuki Terakado
Original Assignee
Matsushita Electric Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Ind Co Ltd filed Critical Matsushita Electric Ind Co Ltd
Priority to JP8644184A priority Critical patent/JPS60230027A/en
Publication of JPS60230027A publication Critical patent/JPS60230027A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K17/00—Measuring quantity of heat
    • G01K17/06—Measuring quantity of heat conveyed by flowing media, e.g. in heating systems e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device
    • G01K17/08—Measuring quantity of heat conveyed by flowing media, e.g. in heating systems e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device based upon measurement of temperature difference or of a temperature
    • G01K17/20—Measuring quantity of heat conveyed by flowing media, e.g. in heating systems e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device based upon measurement of temperature difference or of a temperature across a radiating surface, combined with ascertainment of the heat transmission coefficient

Abstract

PURPOSE:To elevate a detection sensibility with a simple constitution by providing respectively a temp. sensing resisting body film and each one pair of electrode films on each face of a pair of plane sheet shaped insulating substrate to constitute a pair of thin film thermistor elements and by laminating both elements on both surfaces of the thermal resisting body. CONSTITUTION:A temp. sensing resisting body film 6, 6' and a pair of electrode film 7, 7' are formed in the surface of each one side of a pair of plane sheet shaped insulating substrate 5, 5' to constitute thin film thermistor element A, B. The element A, thermal resisting body 8 and element B are in order laminated to constitute a thermal flow sensor. The plate 5 of a temp. resisting body and thermoelectric couple 3 for temp. measurement of the resisting body 8 can thus be made unnecessary.
JP8644184A 1984-04-27 1984-04-27 Thermal flow sensor Pending JPS60230027A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8644184A JPS60230027A (en) 1984-04-27 1984-04-27 Thermal flow sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8644184A JPS60230027A (en) 1984-04-27 1984-04-27 Thermal flow sensor

Publications (1)

Publication Number Publication Date
JPS60230027A true JPS60230027A (en) 1985-11-15

Family

ID=13887000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8644184A Pending JPS60230027A (en) 1984-04-27 1984-04-27 Thermal flow sensor

Country Status (1)

Country Link
JP (1) JPS60230027A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101990062B1 (en) * 2018-12-07 2019-06-17 광운대학교 산학협력단 Resistance change metal oxide based temperature sensor

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4939473B1 (en) * 1966-09-29 1974-10-25 Offshore Co
JPS60201224A (en) * 1984-03-27 1985-10-11 Kyushu Daigaku Multilayered thin-film heat conduction gauge

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4939473B1 (en) * 1966-09-29 1974-10-25 Offshore Co
JPS60201224A (en) * 1984-03-27 1985-10-11 Kyushu Daigaku Multilayered thin-film heat conduction gauge

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101990062B1 (en) * 2018-12-07 2019-06-17 광운대학교 산학협력단 Resistance change metal oxide based temperature sensor

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