JPS60213834A - Heat flow sensor - Google Patents
Heat flow sensorInfo
- Publication number
- JPS60213834A JPS60213834A JP7026384A JP7026384A JPS60213834A JP S60213834 A JPS60213834 A JP S60213834A JP 7026384 A JP7026384 A JP 7026384A JP 7026384 A JP7026384 A JP 7026384A JP S60213834 A JPS60213834 A JP S60213834A
- Authority
- JP
- Japan
- Prior art keywords
- heat
- heat sensitive
- resistor
- flow sensor
- heat flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 films Substances 0.000 abstract 10
- 239000000758 substrates Substances 0.000 abstract 3
- 239000000919 ceramics Substances 0.000 abstract 1
- 239000011521 glasses Substances 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- AHKZTVQIVOEVFO-UHFFFAOYSA-N oxide(2-) Chemical compound data:image/svg+xml;base64,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 data:image/svg+xml;base64,PD94bWwgdmVyc2lvbj0nMS4wJyBlbmNvZGluZz0naXNvLTg4NTktMSc/Pgo8c3ZnIHZlcnNpb249JzEuMScgYmFzZVByb2ZpbGU9J2Z1bGwnCiAgICAgICAgICAgICAgeG1sbnM9J2h0dHA6Ly93d3cudzMub3JnLzIwMDAvc3ZnJwogICAgICAgICAgICAgICAgICAgICAgeG1sbnM6cmRraXQ9J2h0dHA6Ly93d3cucmRraXQub3JnL3htbCcKICAgICAgICAgICAgICAgICAgICAgIHhtbG5zOnhsaW5rPSdodHRwOi8vd3d3LnczLm9yZy8xOTk5L3hsaW5rJwogICAgICAgICAgICAgICAgICB4bWw6c3BhY2U9J3ByZXNlcnZlJwp3aWR0aD0nODVweCcgaGVpZ2h0PSc4NXB4JyB2aWV3Qm94PScwIDAgODUgODUnPgo8IS0tIEVORCBPRiBIRUFERVIgLS0+CjxyZWN0IHN0eWxlPSdvcGFjaXR5OjEuMDtmaWxsOiNGRkZGRkY7c3Ryb2tlOm5vbmUnIHdpZHRoPSc4NScgaGVpZ2h0PSc4NScgeD0nMCcgeT0nMCc+IDwvcmVjdD4KPHRleHQgZG9taW5hbnQtYmFzZWxpbmU9ImNlbnRyYWwiIHRleHQtYW5jaG9yPSJlbmQiIHg9JzY2LjEwMTEnIHk9JzQ4LjM3NScgc3R5bGU9J2ZvbnQtc2l6ZTozOHB4O2ZvbnQtc3R5bGU6bm9ybWFsO2ZvbnQtd2VpZ2h0Om5vcm1hbDtmaWxsLW9wYWNpdHk6MTtzdHJva2U6bm9uZTtmb250LWZhbWlseTpzYW5zLXNlcmlmO2ZpbGw6I0U4NDIzNScgPjx0c3Bhbj5PPC90c3Bhbj48dHNwYW4gc3R5bGU9J2Jhc2VsaW5lLXNoaWZ0OnN1cGVyO2ZvbnQtc2l6ZToyOC41cHg7Jz4tMjwvdHNwYW4+PHRzcGFuPjwvdHNwYW4+PC90ZXh0Pgo8L3N2Zz4K [O-2] AHKZTVQIVOEVFO-UHFFFAOYSA-N 0.000 abstract 1
- 230000035945 sensitivity Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K17/00—Measuring quantity of heat
- G01K17/06—Measuring quantity of heat conveyed by flowing media, e.g. in heating systems e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device
- G01K17/08—Measuring quantity of heat conveyed by flowing media, e.g. in heating systems e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device based upon measurement of temperature difference or of a temperature
- G01K17/20—Measuring quantity of heat conveyed by flowing media, e.g. in heating systems e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device based upon measurement of temperature difference or of a temperature across a radiating surface, combined with ascertainment of the heat transmission coefficient
Abstract
PURPOSE:To simplify the structure, to reduce the manufacturing costs and to improve detecting sensitivity, by forming a heat sensitive resistor film and a pair of electrode films on each of the front and back surfaces of a flat insulating substrate as a thermal resistor body, thereby constituting a heat flow sensor. CONSTITUTION:On one of the two parallel surfaces of a flat insulating substrate 5 (e.g., ceramics and glass) as a thermal resistor body, a heat sensitive resistor film 6 and a pair of electrode films 7 and 7' are formed. On the other surface thereof, a heat sensitive resistor film 8 and a pair of electrode films 9 and 9' are formed. Thus an intended heat flow sensor is constituted. The temperature difference between the front and back surfaces of the flat insulating substrate 5 as the thermal resistor body is detected highly sensitively as the difference in resistance values of the heat sensitive resistor films 6 and 8. Therefore the heat flow can be detected highly sensitively. As the heat sensitive resistor films 6 and 8, an oxide resistor film or a carbide resistor film, which has excellent heat resisting property and the like, is suitably used.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7026384A JPS60213834A (en) | 1984-04-09 | 1984-04-09 | Heat flow sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7026384A JPS60213834A (en) | 1984-04-09 | 1984-04-09 | Heat flow sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60213834A true JPS60213834A (en) | 1985-10-26 |
Family
ID=13426467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7026384A Pending JPS60213834A (en) | 1984-04-09 | 1984-04-09 | Heat flow sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60213834A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4939473B1 (en) * | 1966-09-29 | 1974-10-25 | Offshore Co | |
| JPS5913932A (en) * | 1982-07-15 | 1984-01-24 | Keiji Nishimoto | Method for measuring heat current amount |
| JPS60201224A (en) * | 1984-03-27 | 1985-10-11 | Kyushu Daigaku | Multilayered thin-film heat conduction gauge |
-
1984
- 1984-04-09 JP JP7026384A patent/JPS60213834A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4939473B1 (en) * | 1966-09-29 | 1974-10-25 | Offshore Co | |
| JPS5913932A (en) * | 1982-07-15 | 1984-01-24 | Keiji Nishimoto | Method for measuring heat current amount |
| JPS60201224A (en) * | 1984-03-27 | 1985-10-11 | Kyushu Daigaku | Multilayered thin-film heat conduction gauge |
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