JPS60217683A - Laser output controller - Google Patents
Laser output controllerInfo
- Publication number
- JPS60217683A JPS60217683A JP7299384A JP7299384A JPS60217683A JP S60217683 A JPS60217683 A JP S60217683A JP 7299384 A JP7299384 A JP 7299384A JP 7299384 A JP7299384 A JP 7299384A JP S60217683 A JPS60217683 A JP S60217683A
- Authority
- JP
- Japan
- Prior art keywords
- laser
- light
- micro
- receiving surface
- diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/131—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
- H01S3/134—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the active medium, e.g. by controlling the processes or apparatus for excitation in gas lasers
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
この発明はレーザ出力を、８速ノＪｅでｉｌ＋１１１卸
するレーザ出力制御装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a laser output control device that controls the laser output by il+111 in an 8-speed Je.
第２図は例えば本ｊ頴出願人により出願された特願昭５
８−１６０６５６号に示された従来の炭酸ガスレーザ装
置におけるレーザ出力側（財）装ｍ’ｉ示す概略構成図
である。図において（１）は炭酸ガスをよむレーザ媒質
ガスを満たした容器、（２人）、（２Ｂ）は容器（１）
内に設けられた一対の１転（３）は電極（２Ａ）、 （
２Ｂ）に高電圧を印加するための屯源、（４）は電極（
２Ａ） 、 （２Ｂ）に高′区圧を印加することによっ
て生成する放電、（５）はレーザ光のほとんど全反射す
るが約１゛メら程度は透過する性質ケ有する全反射鏡、
（６）は部分透過鏡である。（７）は部分透過鏡（６）
から外部に出力するレーザ光、（８）は全反射鏡（５）
カ・ら出力する検出レーザ光であり、検出し〜ザ光（８
）の強度はレーザ光（７）の強度に比例する。、（９）
は内面を完全拡散面とした積分球、（’Ｕはｒ〈出Ｖ−
ザ光（８）ケ積分球（９）内に入射させる人力ボート、
α］Ｈｄ績分ｇ （９＋内で１広敢されたレーザ光分出
力する出プ１ポート、０４は出力ボートａυに設置した
１列えばサーモバイルからなる微小レーザ検出器、見ｊ
は不図示の出力設定器から出力する田方指令値、Ｑ４は
比咬器、０９は増幅器である。Figure 2 shows, for example, a patent application filed by the applicant in 1973.
8-160656 is a schematic configuration diagram showing the laser output side equipment m'i in the conventional carbon dioxide laser device. In the figure, (1) is a container filled with laser medium gas that reads carbon dioxide gas, (2 people), and (2B) is a container (1).
A pair of single turns (3) provided inside the electrode (2A), (
2B) is a source for applying high voltage, (4) is an electrode (
2A), (2B) a discharge generated by applying a high pressure, (5) a total reflection mirror that reflects almost all of the laser beam but transmits about 1.
(6) is a partially transmitting mirror. (7) is a partially transmitting mirror (6)
Laser light output from (8) is a total reflection mirror (5)
This is the detection laser beam that is output from the laser beam.
) is proportional to the intensity of the laser beam (7). , (9)
is an integrating sphere whose inner surface is a completely diffusing surface, ('U is r〈out V-
A human-powered boat that makes the light (8) enter the integrating sphere (9),
α] Hd performance g (output 1 port that outputs 1 wide laser beam in 9+, 04 is a minute laser detector consisting of 1 row of thermomobiles installed on the output boat aυ, see j
is a Tagata command value outputted from an output setting device (not shown), Q4 is a ratio adjuster, and 09 is an amplifier.
従来の炭酸ガスレーザ装置におけるレーザ出力側（２）
装置は上記のように溝成され、一対の電極ｒ２Ａ）、（
２Ｂ）に′＃ＩＬ源（３）より扁′亀圧を印加し放１Ｊ
ｉ、（４）を生成しでレーザ媒質ガスを励起し、波長１
０．６μ慣のレーザ光を放出する。この放出されたＶ−
ザ光が平行に設けられた全反射鏡（５）と部分透過鏡（
６）間で反射を繰返すことによりンーザ発振會起こし、
部分透過鏡（６）よりレーザ光（７）を外部に出力する
。Laser output side of conventional carbon dioxide laser equipment (2)
The device is configured as described above and has a pair of electrodes r2A), (
2B), apply a flat tortoise pressure from the IL source (3) and release 1J.
i, (4) and excites the laser medium gas with wavelength 1.
Emits a laser beam with a diameter of 0.6μ. This released V-
The total reflection mirror (5) and the partial transmission mirror (
6) Cause oscillation by repeating reflection between
A laser beam (7) is outputted from the partially transmitting mirror (6) to the outside.
一方、全反射鏡（５）からは部分透過鏡（６）から出力
するレーザ光（７）の強度に比例した約１０〜５０Ｗ程
度の検出レーザ光（８）が出力し、積分球（９）の人力
ボートα０から積分球（９）内部に入射する。積分球（
９）Ｋ入射した検出レーザ光（６）は積分球（９）内面
で多数の反射を繰り返し均一に拡赦、減光して、出力ボ
ート（１１）に設置した微小レーザ慣出器ａのに入射す
る、積分球（９）の微小レーザ検出器（２）に対する減
挾率は積分球（９）の直径會約１００１１１１１１とし
、微小レーザ検出器ａ諺の受光面の径を約１間とすると
約１／１００００であり、例えば積分球（９１に約５０
Ｗの検出レーザ光（８）の入力があると微小レーザ検出
ａ０２の入力は約５ｍＷとなる。微小レーザ検出器α２
に人力したレーザ光は電気１ぎ号に変換され、この′ｇ
気倍信号所定のレーザ光の出力指令値口とｔ比較ａ ａ
４で比較して、その偏差信号を増幅器α→により増幅し
て電源（３）の出力電圧又は出力′電流ケ制御すること
によリレーザ媒質ガスの励起強度を制御して、レーザ光
（７）の強度？はぼ一定に保持する。On the other hand, the total reflection mirror (5) outputs a detection laser beam (8) of about 10 to 50 W, which is proportional to the intensity of the laser beam (7) output from the partial transmission mirror (6), and the integrating sphere (9) enters the interior of the integrating sphere (9) from the human-powered boat α0. Integrating sphere (
9) The incident detection laser beam (6) undergoes numerous reflections on the inner surface of the integrating sphere (9) and is uniformly amplified and attenuated until it reaches the micro-laser acclimator a installed on the output boat (11). The reduction ratio of the incident integrating sphere (9) to the micro laser detector (2) is approximately 100111111 mm in diameter of the integrating sphere (9), and the diameter of the light receiving surface of the micro laser detector is approximately 1 mm. It is approximately 1/10000, for example, an integrating sphere (approximately 50
When the detection laser beam (8) of W is input, the input to the minute laser detection a02 becomes approximately 5 mW. Micro laser detector α2
The human-powered laser beam is converted into electric power, and this 'g
Compare t with the output command value of the predetermined laser beam signal
4, the deviation signal is amplified by the amplifier α→, and the output voltage or output current of the power source (3) is controlled to control the excitation intensity of the laser medium gas, and the laser beam (7) is The strength of? is held approximately constant.
上記した従来のレーザ出力制御装置において積分球（９
）の直径約１００ｗｎ、微小レーザ検出し亜の受光面の
径が約１咽の場合の微小レーザ検出器α２の応答速度は
約６０〜５Ｇ−ｓであるーこの応答速度ｔより高速にす
るためには微小レーザ検出器（イ）Ｉ１２）受光面の径
を小さくする必委がある、しかしながら微小し−ザ検ｆ
ｉｌ器（イ）の受光面の径を小さくすると積分球（９）
の減挾度がさらに高くなり、例えば微小レーザ検出器ａ
′４の受光面の径全０．３閣とすると減衰匿は１／１０
００００ となり微小レーザ検出器α２に入射するレー
ザ光蓋が不足し、このため出力電圧も小さくなる。微小
レーザ検出器（６）の出力１圧が小さくなると信号に対
するノイズの比すなわちＳＮ比が悪くなり、レーザ出力
？正確に検出することができず、レーザ出力側＠を正確
忙できないという問題点が生じた。In the conventional laser output control device described above, the integrating sphere (9
), the response speed of the micro laser detector α2 is approximately 60 to 5 G-s when the diameter of the micro laser detector α2 is approximately 100wn and the diameter of the light receiving surface is approximately 1 mm.In order to make the response speed faster than t. There is a requirement to reduce the diameter of the light-receiving surface of a micro laser detector (a) I12).
If the diameter of the light-receiving surface of the illumination device (A) is reduced, it becomes an integrating sphere (9)
For example, the degree of reduction of
If the total diameter of the light-receiving surface of '4 is 0.3 mm, the attenuation is 1/10.
0000, the laser light beam incident on the micro laser detector α2 is insufficient, and the output voltage also becomes small. When the output voltage of the micro laser detector (6) becomes smaller, the signal to noise ratio, that is, the S/N ratio becomes worse, and the laser output? A problem arose in that accurate detection could not be performed and the laser output side could not be accurately determined.
この発明はかかる問題魚倉改善する目的でなされたもの
であり、積分球と微小レーザ検出器とを有するレーザ出
力制御装置において、積分球の出力ボートに集光レンズ
管設置し、二の集光レンズの焦点位置近傍に受光面の径
全小さくした微小レーザ検出器の受光面を配置して、集
光レンズに入射したレーザ光を小さなスポット径に集光
するようにして微小レーザ検出器の受光面に入射するレ
ーザ光の光量音大としたレーザ出力制御装置を提案する
ものである。This invention was made for the purpose of improving this problem, and in a laser output control device having an integrating sphere and a minute laser detector, a condensing lens tube is installed on the output boat of the integrating sphere, and a second condensing lens tube is installed in the output boat of the integrating sphere. The light-receiving surface of a micro-laser detector with a completely reduced diameter light-receiving surface is placed near the focal point of the lens, and the laser light incident on the condenser lens is condensed into a small spot diameter to receive light from the micro-laser detector. This paper proposes a laser output control device that adjusts the volume of laser light incident on a surface.
第１図はこの発明の一実施例を示す概略溝成因であり、
図において（１）〜αυは上記従来装置と同一のもので
ある。αｅは積分球（９ンの出ロボートαＩＫ設置した
集光レンズである。集光レンズａ→は炭酸ガスレーザで
は波長１０．６μｍの赤外＃會透過するＺｎ８ｅ 、
ＧａＡａ、ＫＯ２等の材料からなるレンズを使用する。FIG. 1 is a schematic diagram of groove formation showing an embodiment of the present invention.
In the figure, (1) to αυ are the same as the conventional device described above. αe is a condensing lens installed on an integrating sphere (9-inch robot αIK). Condensing lens a → is Zn8e, which transmits infrared light with a wavelength of 10.6 μm in the case of a carbon dioxide laser.
A lens made of material such as GaAa or KO2 is used.
微小レーザ検出器（２）は応答速度を高速にするため受
光面の径？小さくＬ７？ものであり、この受光面が集光
レンズＱ６の焦点位置近傍に位ｉｔするように配置して
いる。このため微小レーザ検出器負会の受光面の径が小
さくなっても、この受光面に集光レンズ（１０の口径に
応じたレーザ光の光量が入射し、微小レーザ倹１ｂ器α
のに入射する光量不足を解消することができ、微小Ｖ−
ザ検出器ａ２の応答速ＶＬを１０〜２０ｍ５程度に高め
ることができる。また微小レーザ検出器α４に入射する
レーザ光の光量は集光レンズＣＬｆｅの有効口径を可変
することによって可変できるため、同一直径の積分球（
９）？使用して微小レーザ噴出器ＵＫ対するレーザ光の
戚挾率を調節することができる。Micro laser detector (2) has a diameter of the light receiving surface to increase the response speed. Small L7? The light-receiving surface is located near the focal point of the condenser lens Q6. Therefore, even if the diameter of the light-receiving surface of the micro laser detector becomes small, the amount of laser light corresponding to the aperture of the condenser lens (10) is incident on this light-receiving surface, and the micro laser detector α
It is possible to solve the problem of insufficient amount of light incident on the
The response speed VL of the detector a2 can be increased to about 10 to 20 m5. Furthermore, since the amount of laser light incident on the micro laser detector α4 can be varied by varying the effective aperture of the condensing lens CLfe, an integrating sphere of the same diameter (
9)? It can be used to adjust the relative ratio of laser light to the micro laser ejector UK.
この発明は以上説明したように、積分球の出口ボートに
設置した集光レンズによりレーザ晃ｆ果光して微小レー
ザ検出器に入射するようＫしたので、微小レーザ検出器
の受光面の径？小さくしても充分なレーザ光の光ｔｖ入
射することができるため、微小レーザ検出器の応答速度
が誦速となり、レーザ出力全高速度で正確に制御するこ
とができる。さらに微小レーザ検出２通に対するレーザ
光の＄Ｃ衰率ｔレンズ有効口径の可変することにより調
節できる効果も有する。As explained above, in this invention, the laser beam is focused by a condensing lens installed on the exit boat of the integrating sphere so that it enters the micro laser detector. Even if the size is small, a sufficient amount of laser light can be incident on the tv, so the response speed of the micro laser detector becomes the reading speed, and the laser output can be accurately controlled at the full speed. Furthermore, there is also an effect that can be adjusted by changing the effective aperture of the $C attenuation t lens of the laser beam for the two minute laser detections.
第１図はこの発明の実施例を示す概略＃Ｉｔ成図成因２
図は従来のレーザ出力制御装置の概略構成図である。
（１） ・−・容器、（２人） 、（２Ｂ）−” ｔ
＊ 、（３）−４ｍ 、（５）・・・全反射鏡、（６）
・・・部分透過鏡、（９（・・・積分球、ａ−・・微小
レーザ検出器、０・９・・・比較器、α９・・・増幅器
、（ＩＱ・・・集光レンズ。
代理人 弁理士 木 村 三 朗
第１図
第２図
Ａ
手続補正書（自発）
昭和６０年７月４日
特許庁長官殿
１、事件の表示 特願昭 ５９−７２９９３号２、発明
の名称
レーデ出力制御装置
３、補正をする者
４、代理人 志岐守哉
６、補正の内容
（１）明細書第４頁第９行及び同頁第１１行の［ｗｉ小
レーザ検出器（２０） Ｊを［ｗｉ小レしザ検出藷（１
２）Ｊと補正する。
（２）明細書第７頁第３行の「レンズ有効口径の」を「
レンズ有効口径を」と補正する。
（３）図面の第２図を別紙補正図面のとおり補正する。
以 上FIG. 1 is a schematic #It diagram showing an embodiment of the present invention.
The figure is a schematic configuration diagram of a conventional laser output control device. (1) ・-・Container, (2 people) , (2B)-” t
*, (3)-4m, (5)... Total reflection mirror, (6)
... Partially transmitting mirror, (9 (... Integrating sphere, a-... Microscopic laser detector, 0.9... Comparator, α9... Amplifier, (IQ... Condensing lens. Substitute Person Patent Attorney Sanro Kimura Figure 1 Figure 2 A Procedural amendment (voluntary) July 4, 1985 To the Commissioner of the Japan Patent Office 1, Indication of the case Patent application No. 1987-72993 2, Name of the invention Rede output Control device 3, Person making the correction 4, Agent Moriya Shiki 6, Contents of correction (1) [wi small laser detector (20) J] on page 4, line 9 and line 11 of the same page of the specification. wi small leather detection area (1
2) Correct with J. (2) In the third line of page 7 of the specification, “lens effective aperture” should be changed to “
Correct the effective aperture of the lens. (3) Figure 2 of the drawings shall be amended as shown in the attached amended drawings. that's all
Claims (1)
散されたレーザ光を検出する微小レーザ検出器と分有す
るレーザ出力側（財）装置において、上記積分球の出力
ボートに集光ンンズを設置し、この実元レンズの焦点位
置近傍ＶＣ受光面の径？小さくした微小レーザ検出器の
受光面を配置したことケ特舐とす６Ｖ−ザ出力制両装匝
。In a laser output side (incorporated) device that includes an integrating sphere that diffuses the incident laser beam and a micro laser detector that detects the laser beam diffused by this integrating sphere, a condensing lens is attached to the output boat of the integrating sphere. installed, and the diameter of the VC light receiving surface near the focal position of this real lens? The 6V output control box is particularly notable for the placement of the light-receiving surface of the miniaturized laser detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7299384A JPS60217683A (en) | 1984-04-13 | 1984-04-13 | Laser output controller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7299384A JPS60217683A (en) | 1984-04-13 | 1984-04-13 | Laser output controller |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60217683A true JPS60217683A (en) | 1985-10-31 |
Family
ID=13505438
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7299384A Pending JPS60217683A (en) | 1984-04-13 | 1984-04-13 | Laser output controller |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60217683A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6315485A (en) * | 1986-07-07 | 1988-01-22 | Koito Mfg Co Ltd | Hollow cathode type laser |
| JPS6362286A (en) * | 1986-09-02 | 1988-03-18 | Mitsubishi Electric Corp | Laser oscillator |
| JPS63117479A (en) * | 1986-11-06 | 1988-05-21 | Mitsubishi Electric Corp | Laser oscillator |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56126725A (en) * | 1980-03-10 | 1981-10-05 | Matsushita Electric Works Ltd | Integration sphere |
| JPS5713155A (en) * | 1980-06-26 | 1982-01-23 | Daido Steel Co Ltd | Free cutting alloy tool steel |
| JPS57202794A (en) * | 1981-06-09 | 1982-12-11 | Mitsubishi Electric Corp | Controlling device for laser output |
-
1984
- 1984-04-13 JP JP7299384A patent/JPS60217683A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56126725A (en) * | 1980-03-10 | 1981-10-05 | Matsushita Electric Works Ltd | Integration sphere |
| JPS5713155A (en) * | 1980-06-26 | 1982-01-23 | Daido Steel Co Ltd | Free cutting alloy tool steel |
| JPS57202794A (en) * | 1981-06-09 | 1982-12-11 | Mitsubishi Electric Corp | Controlling device for laser output |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6315485A (en) * | 1986-07-07 | 1988-01-22 | Koito Mfg Co Ltd | Hollow cathode type laser |
| JPS6362286A (en) * | 1986-09-02 | 1988-03-18 | Mitsubishi Electric Corp | Laser oscillator |
| JPS63117479A (en) * | 1986-11-06 | 1988-05-21 | Mitsubishi Electric Corp | Laser oscillator |
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