JPS60210243A - 半導体複合センサ - Google Patents
半導体複合センサInfo
- Publication number
- JPS60210243A JPS60210243A JP59066493A JP6649384A JPS60210243A JP S60210243 A JPS60210243 A JP S60210243A JP 59066493 A JP59066493 A JP 59066493A JP 6649384 A JP6649384 A JP 6649384A JP S60210243 A JPS60210243 A JP S60210243A
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- semiconductor
- pressure
- diaphragm
- field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 41
- 239000002131 composite material Substances 0.000 title claims description 15
- 230000005669 field effect Effects 0.000 claims description 24
- 239000000126 substance Substances 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 15
- 239000004020 conductor Substances 0.000 claims description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 2
- 239000002689 soil Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 35
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- 238000009792 diffusion process Methods 0.000 description 10
- 229910052751 metal Inorganic materials 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 239000013078 crystal Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 239000012298 atmosphere Substances 0.000 description 4
- 239000008280 blood Substances 0.000 description 4
- 210000004369 blood Anatomy 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- -1 Ag+ ions Chemical class 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 2
- OIPILFWXSMYKGL-UHFFFAOYSA-N acetylcholine Chemical compound CC(=O)OCC[N+](C)(C)C OIPILFWXSMYKGL-UHFFFAOYSA-N 0.000 description 2
- 229960004373 acetylcholine Drugs 0.000 description 2
- 230000036772 blood pressure Effects 0.000 description 2
- 239000004202 carbamide Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229940049954 penicillin Drugs 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 102000012440 Acetylcholinesterase Human genes 0.000 description 1
- 108010022752 Acetylcholinesterase Proteins 0.000 description 1
- 102000009027 Albumins Human genes 0.000 description 1
- 108010088751 Albumins Proteins 0.000 description 1
- 238000012935 Averaging Methods 0.000 description 1
- 241000533950 Leucojum Species 0.000 description 1
- 229930182555 Penicillin Natural products 0.000 description 1
- JGSARLDLIJGVTE-MBNYWOFBSA-N Penicillin G Chemical compound N([C@H]1[C@H]2SC([C@@H](N2C1=O)C(O)=O)(C)C)C(=O)CC1=CC=CC=C1 JGSARLDLIJGVTE-MBNYWOFBSA-N 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 101150108455 Sil1 gene Proteins 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 229940022698 acetylcholinesterase Drugs 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910001413 alkali metal ion Inorganic materials 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 210000004204 blood vessel Anatomy 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 150000003983 crown ethers Chemical class 0.000 description 1
- 230000005685 electric field effect Effects 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229920005597 polymer membrane Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229910001414 potassium ion Inorganic materials 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 230000009291 secondary effect Effects 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910001415 sodium ion Inorganic materials 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
- 229940045136 urea Drugs 0.000 description 1
Landscapes
- Measuring And Recording Apparatus For Diagnosis (AREA)
- Measuring Fluid Pressure (AREA)
- Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
- Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59066493A JPS60210243A (ja) | 1984-04-02 | 1984-04-02 | 半導体複合センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59066493A JPS60210243A (ja) | 1984-04-02 | 1984-04-02 | 半導体複合センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60210243A true JPS60210243A (ja) | 1985-10-22 |
| JPH0479650B2 JPH0479650B2 (enrdf_load_stackoverflow) | 1992-12-16 |
Family
ID=13317383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59066493A Granted JPS60210243A (ja) | 1984-04-02 | 1984-04-02 | 半導体複合センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60210243A (enrdf_load_stackoverflow) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8840553B2 (en) | 1998-04-30 | 2014-09-23 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US8915850B2 (en) | 2005-11-01 | 2014-12-23 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US8920319B2 (en) | 2005-11-01 | 2014-12-30 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US8933664B2 (en) | 2006-03-31 | 2015-01-13 | Abbott Diabetes Care Inc. | Method and system for powering an electronic device |
| US8974386B2 (en) | 1998-04-30 | 2015-03-10 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US9011332B2 (en) | 2001-01-02 | 2015-04-21 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US9039975B2 (en) | 2006-03-31 | 2015-05-26 | Abbott Diabetes Care Inc. | Analyte monitoring devices and methods therefor |
| US9066695B2 (en) | 1998-04-30 | 2015-06-30 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US9078607B2 (en) | 2005-11-01 | 2015-07-14 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US9095290B2 (en) | 2007-03-01 | 2015-08-04 | Abbott Diabetes Care Inc. | Method and apparatus for providing rolling data in communication systems |
| US9323898B2 (en) | 2005-11-04 | 2016-04-26 | Abbott Diabetes Care Inc. | Method and system for providing basal profile modification in analyte monitoring and management systems |
| US9962091B2 (en) | 2002-12-31 | 2018-05-08 | Abbott Diabetes Care Inc. | Continuous glucose monitoring system and methods of use |
| US10039881B2 (en) | 2002-12-31 | 2018-08-07 | Abbott Diabetes Care Inc. | Method and system for providing data communication in continuous glucose monitoring and management system |
| US10478108B2 (en) | 1998-04-30 | 2019-11-19 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
-
1984
- 1984-04-02 JP JP59066493A patent/JPS60210243A/ja active Granted
Cited By (40)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9066695B2 (en) | 1998-04-30 | 2015-06-30 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US8880137B2 (en) | 1998-04-30 | 2014-11-04 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US10478108B2 (en) | 1998-04-30 | 2019-11-19 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US9066697B2 (en) | 1998-04-30 | 2015-06-30 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US9326714B2 (en) | 1998-04-30 | 2016-05-03 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US8974386B2 (en) | 1998-04-30 | 2015-03-10 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US9014773B2 (en) | 1998-04-30 | 2015-04-21 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US9011331B2 (en) | 1998-04-30 | 2015-04-21 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US9072477B2 (en) | 1998-04-30 | 2015-07-07 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US9042953B2 (en) | 1998-04-30 | 2015-05-26 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US8840553B2 (en) | 1998-04-30 | 2014-09-23 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US9066694B2 (en) | 1998-04-30 | 2015-06-30 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US9498159B2 (en) | 2001-01-02 | 2016-11-22 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US9610034B2 (en) | 2001-01-02 | 2017-04-04 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US9011332B2 (en) | 2001-01-02 | 2015-04-21 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US10039881B2 (en) | 2002-12-31 | 2018-08-07 | Abbott Diabetes Care Inc. | Method and system for providing data communication in continuous glucose monitoring and management system |
| US10750952B2 (en) | 2002-12-31 | 2020-08-25 | Abbott Diabetes Care Inc. | Continuous glucose monitoring system and methods of use |
| US9962091B2 (en) | 2002-12-31 | 2018-05-08 | Abbott Diabetes Care Inc. | Continuous glucose monitoring system and methods of use |
| US8920319B2 (en) | 2005-11-01 | 2014-12-30 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US9326716B2 (en) | 2005-11-01 | 2016-05-03 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US11399748B2 (en) | 2005-11-01 | 2022-08-02 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US10231654B2 (en) | 2005-11-01 | 2019-03-19 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US11911151B1 (en) | 2005-11-01 | 2024-02-27 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US11363975B2 (en) | 2005-11-01 | 2022-06-21 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US8915850B2 (en) | 2005-11-01 | 2014-12-23 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US11272867B2 (en) | 2005-11-01 | 2022-03-15 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US11103165B2 (en) | 2005-11-01 | 2021-08-31 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US10952652B2 (en) | 2005-11-01 | 2021-03-23 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US9078607B2 (en) | 2005-11-01 | 2015-07-14 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US10201301B2 (en) | 2005-11-01 | 2019-02-12 | Abbott Diabetes Care Inc. | Analyte monitoring device and methods of use |
| US11538580B2 (en) | 2005-11-04 | 2022-12-27 | Abbott Diabetes Care Inc. | Method and system for providing basal profile modification in analyte monitoring and management systems |
| US9669162B2 (en) | 2005-11-04 | 2017-06-06 | Abbott Diabetes Care Inc. | Method and system for providing basal profile modification in analyte monitoring and management systems |
| US9323898B2 (en) | 2005-11-04 | 2016-04-26 | Abbott Diabetes Care Inc. | Method and system for providing basal profile modification in analyte monitoring and management systems |
| US9039975B2 (en) | 2006-03-31 | 2015-05-26 | Abbott Diabetes Care Inc. | Analyte monitoring devices and methods therefor |
| US9743863B2 (en) | 2006-03-31 | 2017-08-29 | Abbott Diabetes Care Inc. | Method and system for powering an electronic device |
| US9625413B2 (en) | 2006-03-31 | 2017-04-18 | Abbott Diabetes Care Inc. | Analyte monitoring devices and methods therefor |
| US9380971B2 (en) | 2006-03-31 | 2016-07-05 | Abbott Diabetes Care Inc. | Method and system for powering an electronic device |
| US8933664B2 (en) | 2006-03-31 | 2015-01-13 | Abbott Diabetes Care Inc. | Method and system for powering an electronic device |
| US9801545B2 (en) | 2007-03-01 | 2017-10-31 | Abbott Diabetes Care Inc. | Method and apparatus for providing rolling data in communication systems |
| US9095290B2 (en) | 2007-03-01 | 2015-08-04 | Abbott Diabetes Care Inc. | Method and apparatus for providing rolling data in communication systems |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0479650B2 (enrdf_load_stackoverflow) | 1992-12-16 |
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