JPS60205881A - Production of magnetic head slider - Google Patents

Abstract

PURPOSE:To prevent the bending deformation of a small block substrate and to produce a slider with high accuracy by forming grooves to the counter surface of a recording medium of the small substrate of a parent body for slider to separate unit sliders with the same thickness as a mask material. CONSTITUTION:Grooves 31-3n are formed to a counter surface B of a recording medium of a small substrate 2 where plural magnetic heads consisting of N and S poles are arranged. Thus unit sliders are obtained by those grooves that have the depth equal to or larger than the thickness of a mask material 5 used in the next process. The surface is lapped and a mask material of chrome, titanium, etc. is formed on the surface B with 10-20mum thickness. Then the material 5 is divided by grooves 31-3n and therefore the tension of the material 5 is reduced. Thus the stress is released when the mask film is formed. In such a way, the bending deformation of the substrate 2 and produces a slider of high accuracy is prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION Technical Field of the Invention The present invention relates to a method of forming a magnetic head slider used in a magnetic disk drive.

O1+) Prior Art and Problems A negative pressure slider used in a magnetic disk device is equipped with a magnetic head that performs magnetic recording, and is floated by airflow generated as the recording medium rotates to maintain a predetermined gap with the recording medium. Magnetic recording is performed on the medium surface. Such a negative pressure slider is required to have extremely low flying height and flying stability in order to improve recording efficiency and recording accuracy. Therefore, in order to meet this requirement, it is necessary to form a negative pressure slider with a highly accurate shape, and conventionally
A negative pressure slider forming method as shown in a perspective view for explaining the process of forming a + negative pressure slider has been used.

In other words, the process of forming the negative pressure slider is first shown in Fig. 1.
As shown in FIG. 1A, a plurality of thin film magnetic heads each having a pair of magnetic poles N and S are arranged in a matrix in the longitudinal and lateral directions of the surface of the block substrate 1. Next, this block substrate 1 is cut at the position indicated by X-Y in FIG. Note that in order to distinguish this block substrate 2 from the block substrate 1, it will be referred to as a block small substrate. Next, as shown in FIG. 1 (C1), a mask material such as chrome or titanium for ion etching is applied to the surface B of the block small substrate 2 facing the magnetic medium with a thickness of 10 μm.
m~20. A film is formed to a thickness of crm. Next, Figure 1 (d
As shown in FIG. 1, the mask formed in FIG. 1(C) is patterned. This patterned block small substrate 2 is microfabricated by dry milling to form a plurality of highly accurate negative pressure sliders as shown in FIG. 1+e). Next, the plurality of negative pressure sliders are separated one by one to form a negative pressure slider as shown in FIG. 1(f).

In the mask forming process shown in Figure 1 (c+) of the negative pressure slider described above, the film thickness of the mask material, such as chrome or titanium, must be deposited to a thickness of about 10 μm to 20 μm. The internal stress of the mask material is large, and therefore, during the mask forming process, the block small substrate 2 is deformed into a curve as shown in Fig. 2.Therefore, there is a drawback that the shape accuracy of the negative pressure slider cannot be obtained.

(C1 Purpose of the Invention The present invention was devised in view of the drawbacks of the conventional negative pressure slider forming method described above. It prevents deformation of the block small substrate during the mask forming process, and creates a negative pressure slider with a highly accurate shape. It is an object of the present invention to provide a method for forming a magnetic head slider that provides the following.

(d) Structure and object of the invention According to the present invention, a plurality of thin film magnetic heads are formed in parallel on the surface of the substrate in the longitudinal direction, and a block substrate, which is the base of a plurality of sliders, is formed on the surface facing the recording medium. When performing microfabrication using the dry etching method, before forming a mask material for microfabrication on the surface facing the medium, grooves for separating each unit slider are formed with a thickness equal to or greater than the thickness of the mask material. This is achieved by a method of forming a magnetic head slider characterized in that the magnetic head slider is formed to a depth of .

(el Embodiment of the Invention An embodiment of the present invention will be described below in detail with reference to the accompanying drawings. FIGS. 3(a) to 3(C) are perspective views for explaining the process of forming a negative pressure slider according to this embodiment. 1, the same reference numerals as in FIG. 1 indicate the same parts.

That is, FIG. 3(a) shows a perspective view of a block small substrate 2 on which a plurality of magnetic heads each having N and S magnetic poles are provided in parallel. Next, as shown in Part 3), grooves 31 to 3n for separating each unit slider are provided on the recording medium facing surface B of the block small substrate 2. This groove 31-3
n is formed to a depth equal to or greater than the thickness of the mask material used for film formation in the next step.

Next, the medium facing surface B having the grooves 31 to 3n is lapped and then a masking material such as chromium or titanium is deposited on the entire surface to a thickness of about 10 μm to 20 μm, as shown in FIG. 3 (C1). Ru.

The film formation state of the mask material is as shown in the side view of the block small substrate in FIG. That is, the mask material 5 formed into a film
is divided at the grooves 31 to 3n, or in the worst case, the film thickness becomes thinner and the tension becomes weaker between the grooves and the edge portions 41 to 4n above the surface facing the recording medium. As a result, the stress generated by the film formation of the mask material 5 is released, and the film-formed block small substrate 2 can maintain a flat state, and distortions such as curvature caused by conventional methods can be prevented.

The formation process after the film formation process of the mask material is almost the same as the conventional process, including patterning of the formed recording medium facing surface B and fine processing by dry milling, and A negative pressure slider unit is separated by cutting the block small substrate 2, and a desired negative pressure slider is formed.

(fl Effects of the Invention As is clear from the above explanation, the present invention has a structure in which a mask material is formed after forming a predetermined groove on the recording medium facing surface of a block substrate, which is the base of a plurality of negative pressure sliders. As a result, stress caused by film formation of the mask material is released, distortion such as curvature of the block substrate can be prevented, and a highly accurate negative pressure slider can be obtained.

[Brief explanation of drawings]

1(a) to 1(f) are perspective views for explaining the process of forming a conventional negative pressure slider, FIG. Figures 3 Ta) to 3 are perspective views for explaining the process of forming a negative pressure slider according to an embodiment of the present invention;
FIG. 4 is a side view of the block substrate for explaining the state of film formation of the mask material in the embodiment of the present invention. In the figure, 1 is a block substrate, 2 is a block small substrate on which magnetic heads are provided in parallel, 3 is a mask material, 31 to 3
n is a groove, 41 to 4n are edge portions, and 5 is a mask material (Fig. 1, Fig. 2).

Claims (1)

[Claims] Multiple 1! on the substrate surface in the longitudinal direction! When carrying out microfabrication by dry etching on the recording medium facing surface of a block substrate, which is the base of a plurality of sliders on which film magnetic heads are formed in parallel, a mask material for microfabrication is formed on the medium facing surface. 1. A method for forming a magnetic head slider, comprising: forming grooves for separating each unit slider to a depth equal to or greater than the thickness of the mask material.