JPH03273513A - Thin-film type magnetic head - Google Patents

Abstract

PURPOSE:To obtain the thin-film type magnetic head which has high quality and is low in cost by providing a thin-film magnetic head element on the sliding surface of a slider facing the surface of a magnetic disk and forming the sliding surface of the slider of the protective film of the thin-film magnetic head element. CONSTITUTION:The thin-film magnetic head element 2 is provided on the sliding surface 3 of the slider 1 facing the surface of the magnetic disk to form the slider 1 to a smaller size. Further, the sliding surface of the slider 1 is formed of the protective film 5 of the thin-film magnetic head element 2. The mechanical interface characteristics of the thin-film magnetic head element 2 and the magnetic disk are, therefore, improved and the floating height of the thin-film magnetic head element 2 is increased. The improved recording and reproducing characteristics of the thin-film magnetic head element 2 is attained. Since the size of the slider is reduced, the number of the elements taken by cutting from one sheet of wafer is increased and the productivity is improved. The thin-film type magnetic head which is good in productivity and low in cost is obtd. in this way.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a magnetic head used in a magnetic disk device,
In particular, it relates to a thin film type 81 air head.

[Previous Technology] FIG. 2 is a perspective view showing the structure of a conventional thin film magnetic head, viewed from the front. In the figure, 1 is a slider,
The slider 1 is usually made by cutting a wafer made of A 1203 TIC material.

2 is a thin film head element of the tiM magnetic head formed on the slider 1; 3 is the sliding surface (ABS surface) of the slider 1; 4
5 is a lead wire connection terminal portion, 5 is a protective film formed on the thin film head element 2, and this protection M5 is usually A1203.
made of materials.

The conventional thin-film magnetic head is formed as described above, and the size of the slider 1 is 3.2 x 4.0 mm.
is more than 60 times larger in area than the size of the thin film head element 2 (0°4xO, 5mm). Further, the thin film head element 2 is formed perpendicularly to the sliding surface 3 of the slider 1. Furthermore, the shape of the slider 1 is processed using Al
The 203TC material is diced to create complex shapes with high precision.

A conventional thin film magnetic head having such a configuration is used by being positioned in a floating state with a minute gap, that is, a submicron gap, relative to a rotating magnetic disk (not shown).

Furthermore, as a conventional thin film magnetic head of this type, as disclosed in Japanese Patent Application Laid-open No. 148622/1982,
A thin film head in which the angle between the slider surface of the substrate and the surface on which the magnetic pole part is formed is an acute angle, thereby increasing the area in which the magnetic pole part and the conductor part are formed, is also disclosed in Japanese Patent Laid-Open No. 63-42013. As shown in JP-A-59-185014, there are thin-film magnetic heads in which a protective film is formed on the sliding surface of the slider to improve the dust resistance. Thin-film heads, etc., in which a protective film is applied to a negative pressure slider, have been proposed.

[Problems to be Solved by the Invention] The conventional thin film magnetic head described above is manufactured and used in a configuration having the above shape, but the thin film magnetic head is attached to a rotating magnetic disk. On the other hand, when used in a floating state with a small gap formed, the relatively large dimensions of the thin film magnetic head make it difficult to follow the surface waviness and flatness of the magnetic disk.
Since contact between the thin-film magnetic head and the magnetic disc sometimes occurs, there is a problem in that there is a natural limit to the flying height of the thin-film magnetic head. However, the manufacturing process is difficult and requires many artificial processes, and the yield of the product is low, resulting in high costs.

This invention was made to eliminate the above-mentioned problems, and provides a thin-film magnetic head that forms a gap with respect to the magnetic disk to lower the flying height, and is highly productive and inexpensive. The purpose is to obtain.

[Means for Solving the Problems] The thin film magnetic J\t according to the present invention is provided with a thin film head element on the sliding surface of the slider facing the surface of the magnetic disk to reduce the size of the slider. Furthermore, the sliding surface of the slider is formed of a protective film of a thin film head element.

[Function] In the thin film magnetic head of the present invention, since the thin film head element is provided on the sliding surface of the slider facing the surface of the magnetic disk, the size of the slider can be reduced, so that the thin film head element and the magnetic The mechanical interface characteristics with the disk are improved, the flying height of the thin film head element can be lowered, and the recording and reproducing characteristics of the thin film head element are further improved. Furthermore, since the dimensions of the slider are reduced, the number of elements that can be cut from one wafer increases, improving productivity.

[Example] Hereinafter, an example of the present invention will be described with reference to the drawings. 1st
Figures (a) and (b) are a perspective view as seen from the front and a perspective view as seen from the back, showing the structure of a thin film magnetic head that is an embodiment of the present invention. In the figure, 1 is a slider,
The slider 1 is usually made by cutting a wafer made of A1203TIC material. 3 is the sliding surface (ABS surface) of the slider 1; 2 is the thin film head element of the thin film magnetic head formed on the sliding surface 3 of the slider 1; 5
is a protective film for the thin film head element 2, and this protective film 5 is also the sliding surface 3 of the slider l. 4 is a lead wire connection terminal portion formed on the surface opposite to the sliding surface 3 of the slider 1; 6 is a through conductor that penetrates the slider 1;
One end is connected to the thin film/isolated element 2, and the other end is connected to the lead wire connection terminal section 4. 7 is slider 1
This is a concave portion formed in the sliding surface 3 of the slider, which becomes a negative pressure type slider.

Since the thin-film magnetic head according to the embodiment of the present invention is formed as described above, for example, when using a 3-inch wafer, the conventional example shown in FIG. 2 has a size of 3. 2X0. Approximately 400 elements were obtained from a single wafer with a diameter of 86 mm, as shown in Figure 1 (a) above.
In this invention shown in , the dimensions per piece are 0.5XO, 7m.
m, which means that about 8 times as many elements can be obtained.

In addition, in the conventional example described above, high-precision machining was required for processing the sliding surface 3 of the slider 1, but in the present invention, the processing of the sliding surface 3 of the slider 1 involves a process on the evaporation surface.
In other words, since it can be performed in the process of forming the protective film 5 of the thin film head element 2, the processing of the sliding surface 3 of the slider 1 does not require such high precision and can be easily performed. .

In addition, in the conventional example described above, due to the limitations of the processing method for forming a thin film magnetic head, it was difficult to process recesses in the sliding surface 3 of the slider 1, making it impossible to easily form a negative pressure slider. However, in the present invention, the sliding surface 3 of the negative pressure slider including the recess 7 can be easily formed at the same time as the protective film 5 is formed in the wafer process.

Further, the slider 1 of the thin film magnetic head according to the present invention
compared to the slider 1 of the conventional example, the volume is 10
The impact energy when the thin-film magnetic head contacts the magnetic disk is reduced, and the mechanical interface characteristics between the thin-film head element 2 and the magnetic disk are improved accordingly.

[Effects of the Invention] As described above, the thin film magnetic head of the present invention has the following advantages.
The thin-film head element is provided on the sliding surface of the slider facing the surface of the magnetic disk to reduce the size of the slider, and the sliding surface of the slider is further formed with a protective film of the thin-film head element. , it is possible to improve the productivity of thin-film magnetic heads, improve the mechanical interface characteristics between the thin-film head element and the magnetic disk, and produce high-quality, low-cost thin-film magnetic heads. be effective.

[Brief explanation of drawings]

FIGS. 1(a) and (b) are a perspective view of the structure of a thin-film magnetic head according to an embodiment of the present invention as seen from the front surface and a perspective view of the back surface thereof, and FIG. 2 is a perspective view of a conventional thin-film magnetic head. FIG. In the figure, 1...Slider, 2...Thin film head element, 3...Sliding surface (ABS surface), 4...Lee F'
&I connection terminal portion, 5...-protective film, 6... through conductor,
7... Concave portion. In addition, the same symbols in the figures indicate the same or equivalent parts. Figure 2: Male slider to thin R#, Do dirt 5 (ABS working) Lee): Line loading vessel j cup moat -

Claims (1)

[Claims] A thin-film head element formed on a slider made by cutting a wafer as a substrate is placed in a floating state with a small gap formed in front of a rotating magnetic disk, and records and plays data on the magnetic disk. In a thin film magnetic head for carrying out the above, the thin film head element is formed on the sliding surface of the slider facing the surface of the magnetic disk, and the sliding surface of the slider is further formed with a protective film of the thin film head element. A thin film magnetic head characterized by: