JPS60205178A - イメ−ジ炉 - Google Patents

イメ−ジ炉

Info

Publication number
JPS60205178A
JPS60205178A JP59059817A JP5981784A JPS60205178A JP S60205178 A JPS60205178 A JP S60205178A JP 59059817 A JP59059817 A JP 59059817A JP 5981784 A JP5981784 A JP 5981784A JP S60205178 A JPS60205178 A JP S60205178A
Authority
JP
Japan
Prior art keywords
sample
furnace
lamp
light
specific wavelength
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59059817A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0527029B2 (enExample
Inventor
文雄 山本
孝夫 横田
栄 北城
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP59059817A priority Critical patent/JPS60205178A/ja
Publication of JPS60205178A publication Critical patent/JPS60205178A/ja
Publication of JPH0527029B2 publication Critical patent/JPH0527029B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Furnace Details (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP59059817A 1984-03-28 1984-03-28 イメ−ジ炉 Granted JPS60205178A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59059817A JPS60205178A (ja) 1984-03-28 1984-03-28 イメ−ジ炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59059817A JPS60205178A (ja) 1984-03-28 1984-03-28 イメ−ジ炉

Publications (2)

Publication Number Publication Date
JPS60205178A true JPS60205178A (ja) 1985-10-16
JPH0527029B2 JPH0527029B2 (enExample) 1993-04-19

Family

ID=13124153

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59059817A Granted JPS60205178A (ja) 1984-03-28 1984-03-28 イメ−ジ炉

Country Status (1)

Country Link
JP (1) JPS60205178A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011037640A (ja) * 2009-08-06 2011-02-24 Canon Machinery Inc 単結晶育成装置及び単結晶育成方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011037640A (ja) * 2009-08-06 2011-02-24 Canon Machinery Inc 単結晶育成装置及び単結晶育成方法

Also Published As

Publication number Publication date
JPH0527029B2 (enExample) 1993-04-19

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