JPS60203012A - Surface acoustic wave device - Google Patents
Surface acoustic wave deviceInfo
- Publication number
- JPS60203012A JPS60203012A JP5996184A JP5996184A JPS60203012A JP S60203012 A JPS60203012 A JP S60203012A JP 5996184 A JP5996184 A JP 5996184A JP 5996184 A JP5996184 A JP 5996184A JP S60203012 A JPS60203012 A JP S60203012A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electrodes
- acoustic wave
- surface acoustic
- wave device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 7
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000010409 thin film Substances 0.000 claims abstract description 10
- 239000011787 zinc oxide Substances 0.000 claims abstract description 8
- 238000000605 extraction Methods 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 4
- 239000002689 soil Substances 0.000 claims 1
- 239000003990 capacitor Substances 0.000 abstract description 8
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/0296—Surface acoustic wave [SAW] devices having both acoustic and non-acoustic properties
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
- H03H9/14597—Matching SAW transducers to external electrical circuits
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明はテレビジョン受像機やＶＴＲ等に用いられる弾
性表面波装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a surface acoustic wave device used in television receivers, VTRs, and the like.
従来例の構成とその問題点
近年、テレビジョン受像機やＶＴＲ等の高品質化９回路
の簡略化のだめに表面波フィルタの導入がさかんになっ
てきているが、さらにコストダウンをするために、表面
波フィルタの周辺回路を簡略化する必要が生じて来てい
る。Conventional configurations and their problems In recent years, surface wave filters have been increasingly introduced in order to simplify the quality of 9 circuits in television receivers, VTRs, etc., but in order to further reduce costs, There is a growing need to simplify the peripheral circuitry of surface wave filters.
以下、図面を参照しながら、従来の表面波フィルタにつ
いて説明を行なう。Hereinafter, a conventional surface wave filter will be explained with reference to the drawings.
第１図は従来の表面波フィルタの上面図、第２図はその
断面図である。第１図、第２図において、１はガラス基
板、２は櫛形電極、３け酸化亜鉛薄膜、４は対向電極、
５は引き出し電極である。FIG. 1 is a top view of a conventional surface wave filter, and FIG. 2 is a cross-sectional view thereof. In FIGS. 1 and 2, 1 is a glass substrate, 2 is a comb-shaped electrode, 3 is a zinc oxide thin film, 4 is a counter electrode,
5 is an extraction electrode.
このような従来の表面波フィルタを用いた実装回路では
、直流分カットやインピーダンスマツチングのだめにコ
ンデンサを用いる必要があり、これが回路部品削減のさ
またげとなっていた。In such a conventional mounted circuit using a surface wave filter, it is necessary to use a capacitor to cut the DC component and perform impedance matching, which hinders the reduction of circuit components.
発明の目的
本発明はこのような従来の欠点を除去するだめのもので
、表面波フィルタの内部に、直流分カットやインピーダ
ンスマツチングのだめの容量をもたせることによって、
外付部品の少なく、調整のより少ない表面弾性波装置を
得ることを目的とするものである。Purpose of the Invention The present invention is intended to eliminate such conventional drawbacks by providing a capacity for direct current cutting and impedance matching inside the surface wave filter.
The purpose of this invention is to obtain a surface acoustic wave device that requires fewer external parts and requires fewer adjustments.
発明の構成
この目的を達成するだめに本発明は、櫛形電極を設けた
基板に圧電薄膜を形成し、圧電薄膜をはさんで櫛形電極
の上に対向電極を設けると同時に引き出し電極の上にも
対向電極を設け、引き出し’に極の上の対向電極をワイ
ヤーボンティング等の方法で入出力端子あるいけアース
端子と電気的に接続する構成としている。Structure of the Invention In order to achieve this object, the present invention forms a piezoelectric thin film on a substrate provided with a comb-shaped electrode, and provides a counter electrode on the comb-shaped electrode with the piezoelectric thin film in between, and at the same time provides a counter electrode on the comb-shaped electrode. A counter electrode is provided, and the counter electrode on the lead-out pole is electrically connected to an input/output terminal or a ground terminal by a method such as wire bonding.
実施例の説明 以下、本発明の一実施例を図面を用いて説明する。Description of examples An embodiment of the present invention will be described below with reference to the drawings.
第３図は本発明の一実施例の上面図である。図において
、櫛形電極６を設けたガラス基板上に酸化亜鉛薄膜７が
形成され、酸化亜鉛薄膜７をはさんで櫛形電極６．．６
２の上に対向電極８１・ ８２か、引き出し電極９１＋
９２の上にそれとの対向′山、極１０．，１０２がそ
ｔしぞれ設けられている。FIG. 3 is a top view of one embodiment of the present invention. In the figure, a zinc oxide thin film 7 is formed on a glass substrate provided with a comb-shaped electrode 6, and the comb-shaped electrode 6. ．． 6
On top of 2, counter electrodes 81 and 82 or extraction electrode 91+
On top of 92 and opposite 'mountain, pole 10. , 102 are provided respectively.
７＝Ｊ向′１１１極１０．は入出力端子１２１に、引き
出し′「ＩＬ極９２はボンディング窓１１１を通して入
出力＆ｆｌｉ−’ｒ−１２２１１Ｃ１引キ出Ｌ％、極９
ｓ 、９ ａ Ｉｄホンｆイノグ窓１１２．１１３を通
してそれぞれ端子１３１．１３２にワイヤーボンティン
グで電気的に接続さＩしている。7=J direction'111 pole 10. is connected to the input/output terminal 121, and the IL pole 92 is input/output through the bonding window 111.
s, 9a are electrically connected to terminals 131 and 132 through wire bonding windows 112 and 113, respectively, by wire bonding.
以上のように構成された表面波フィルタについて、以下
その動作について説明する。まず引き出し電極の対向電
極を設けるこ吉によって、引き出し電極との間に静電容
量が発生し、引き出し電極の対向電極と入出力端子とを
電気的に接続することによって、コンデンサを直列につ
ないだことと等価になる。また引き出し電極と入出力端
子を、引き出し電極の対向電極とアース端子を電気的に
接続することにより、コンデンサが並列につないだこと
と等価になる。The operation of the surface wave filter configured as described above will be explained below. First, by providing a counter electrode to the extraction electrode, capacitance is generated between the extraction electrode and the input/output terminal, and the capacitors are connected in series. It becomes equivalent to that. Further, by electrically connecting the extraction electrode and the input/output terminal, and the counter electrode of the extraction electrode and the ground terminal, it becomes equivalent to connecting capacitors in parallel.
発明の効果
以上のように本発明は、酸化亜鉛薄膜をはさんで引き出
し電極の上に対向電極を、設け、その対向電極と入出力
端子、あるいはアース端子とを電気的に接続することに
より、弾性表面波装置の中にコンデンサを内蔵すること
ができ、実装回路の部品点数を削減することができる。Effects of the Invention As described above, the present invention provides a counter electrode on the extraction electrode with a zinc oxide thin film in between, and electrically connects the counter electrode to the input/output terminal or the ground terminal. A capacitor can be built into the surface acoustic wave device, and the number of components in the mounted circuit can be reduced.
まだこの引き出し電極の対向電極は、重ね合わせの面積
により自由に容量を変えることができ、フォトエツチン
グにより櫛形電極の対向電極き同時に作るので、バラツ
キの少ない容量を得ることができ、その実用的効果は大
きい。However, the capacitance of the counter electrode of this lead-out electrode can be freely changed depending on the overlapping area, and since the counter electrode of the comb-shaped electrode is made at the same time by photo-etching, a capacitance with little variation can be obtained, and its practical effect is is big.
第１図は従来の表面波フィルタの上面図、第２６１＋６
２・・・・・・櫛形電極、７・・・・・・酸化亜鉛薄膜
、８１１８２・・・・・・対向電極、９１ ＋ ９２
＋ ９ｓ ＋ ９ａ・・・・・・引き出し電極、１０４
，１０２・・・・・引き出し電極９１＋ ９２の対向電
極、１１１ ＋ １１２＋１１３・・・・・・ボンディ
ング窓、１２１ ＋ １２２・・・・・・入出力端子。Figure 1 is a top view of a conventional surface wave filter, number 261+6
2...Comb-shaped electrode, 7...Zinc oxide thin film, 81182...Counter electrode, 91 + 92
+ 9s + 9a... Extraction electrode, 104
, 102... Opposite electrode of extraction electrodes 91+92, 111 + 112+113... Bonding window, 121 + 122... Input/output terminal.
Claims (1)
記酸化亜鉛薄膜をはさんで櫛形電極の土に所定の特性を
得るように対向電極を設けると同時に、引き出し電極の
上にも電極を設け、入出力端子あるいはアース端子と電
気的に接続したことを特徴とする弾性表面波装置。A zinc oxide thin film is formed on the substrate on which the comb-shaped electrode is provided, and a counter electrode is provided on the soil of the comb-shaped electrode with the zinc oxide thin film sandwiched therebetween so as to obtain predetermined characteristics.At the same time, an electrode is also placed on the extraction electrode. A surface acoustic wave device characterized in that it is provided with an input/output terminal or a ground terminal and is electrically connected to an input/output terminal or a ground terminal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5996184A JPS60203012A (en) | 1984-03-27 | 1984-03-27 | Surface acoustic wave device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5996184A JPS60203012A (en) | 1984-03-27 | 1984-03-27 | Surface acoustic wave device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60203012A true JPS60203012A (en) | 1985-10-14 |
Family
ID=13128263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5996184A Pending JPS60203012A (en) | 1984-03-27 | 1984-03-27 | Surface acoustic wave device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60203012A (en) |
-
1984
- 1984-03-27 JP JP5996184A patent/JPS60203012A/en active Pending
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