JPS60201315A - 反射光学系 - Google Patents

反射光学系

Info

Publication number
JPS60201315A
JPS60201315A JP59057582A JP5758284A JPS60201315A JP S60201315 A JPS60201315 A JP S60201315A JP 59057582 A JP59057582 A JP 59057582A JP 5758284 A JP5758284 A JP 5758284A JP S60201315 A JPS60201315 A JP S60201315A
Authority
JP
Japan
Prior art keywords
optical system
concave mirror
mirror
optical axis
reflective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59057582A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0533371B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Takamasa Hirose
広瀬　隆昌
Akiyoshi Suzuki
章義 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP59057582A priority Critical patent/JPS60201315A/ja
Publication of JPS60201315A publication Critical patent/JPS60201315A/ja
Publication of JPH0533371B2 publication Critical patent/JPH0533371B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G02B17/0605—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using two curved mirrors
    • G02B17/0615—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using two curved mirrors off-axis or unobscured systems in wich all of the mirrors share a common axis of rotational symmetry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP59057582A 1984-03-26 1984-03-26 反射光学系 Granted JPS60201315A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59057582A JPS60201315A (ja) 1984-03-26 1984-03-26 反射光学系

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59057582A JPS60201315A (ja) 1984-03-26 1984-03-26 反射光学系

Publications (2)

Publication Number Publication Date
JPS60201315A true JPS60201315A (ja) 1985-10-11
JPH0533371B2 JPH0533371B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-05-19

Family

ID=13059844

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59057582A Granted JPS60201315A (ja) 1984-03-26 1984-03-26 反射光学系

Country Status (1)

Country Link
JP (1) JPS60201315A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6318626A (ja) * 1986-07-11 1988-01-26 Canon Inc 投影露光装置
JPS63312639A (ja) * 1987-06-15 1988-12-21 Canon Inc 露光装置
JPS63312640A (ja) * 1987-06-15 1988-12-21 Canon Inc 露光装置
JPH03180810A (ja) * 1989-11-30 1991-08-06 Hughes Aircraft Co 自動車計器群用の二重ミラー虚像表示装置
JPH07147230A (ja) * 1994-08-04 1995-06-06 Canon Inc 縮小投影露光装置および半導体製造方法
JPH07147229A (ja) * 1994-08-04 1995-06-06 Canon Inc Ｘ線投影露光装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6318626A (ja) * 1986-07-11 1988-01-26 Canon Inc 投影露光装置
JPS63312639A (ja) * 1987-06-15 1988-12-21 Canon Inc 露光装置
JPS63312640A (ja) * 1987-06-15 1988-12-21 Canon Inc 露光装置
JPH03180810A (ja) * 1989-11-30 1991-08-06 Hughes Aircraft Co 自動車計器群用の二重ミラー虚像表示装置
JPH07147230A (ja) * 1994-08-04 1995-06-06 Canon Inc 縮小投影露光装置および半導体製造方法
JPH07147229A (ja) * 1994-08-04 1995-06-06 Canon Inc Ｘ線投影露光装置

Also Published As

Publication number Publication date
JPH0533371B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-05-19

Similar Documents

Publication Publication Date Title
JPH0533368B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP3747958B2 (ja) 反射屈折光学系
US5071240A (en) Reflecting optical imaging apparatus using spherical reflectors and producing an intermediate image
US6665126B2 (en) Projection exposure lens with aspheric elements
KR20020089204A (ko) 반사굴절 축소 렌즈
JPS63163319A (ja) 光学系
EP0869383A2 (en) Catadioptric optical system
JPH08304705A (ja) 反射屈折光学系
CN112363299B (zh) 超短焦投影光学镜头和超短焦投影光学系统
EP1980890B1 (en) Cata-dioptric imaging system, exposure device, and device manufacturing method
JP2015108797A (ja) 広角投影光学システム
US5257139A (en) Reflection reduction projection optical system
JPH1195095A (ja) 投影光学系
JPH07253532A (ja) 映像光学系
JPS6185921A (ja) 眼底観察撮影装置
JPS60201315A (ja) 反射光学系
JP2005114922A (ja) 照明光学系及びそれを用いた露光装置
JPH0533370B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH1010429A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP2005107362A (ja) 投影光学系及び露光装置、デバイスの製造方法
JP2005301054A (ja) 照明光学系及びそれを用いた露光装置
JPH0533369B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH1010430A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH1010430A (ja) ２回結像光学系
JP3781044B2 (ja) 反射屈折光学系および投影露光装置

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term