JPS60199435A - Ultrasonic probe - Google Patents

Ultrasonic probe

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Publication number
JPS60199435A
JPS60199435A JP5526884A JP5526884A JPS60199435A JP S60199435 A JPS60199435 A JP S60199435A JP 5526884 A JP5526884 A JP 5526884A JP 5526884 A JP5526884 A JP 5526884A JP S60199435 A JPS60199435 A JP S60199435A
Authority
JP
Japan
Prior art keywords
ultrasonic probe
ultrasonic
present
probe
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5526884A
Other languages
Japanese (ja)
Inventor
村中 勇一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP5526884A priority Critical patent/JPS60199435A/en
Publication of JPS60199435A publication Critical patent/JPS60199435A/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 [発明の技術分野1 本発明は超音波診断装置に装備される超音波プローブに
関する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention 1] The present invention relates to an ultrasonic probe installed in an ultrasonic diagnostic apparatus.

[発明の技術的背景とその聞題点] 近年、超音波プローブから発射される超音波の特性を高
帯域に広げ且つ被検体との音響的な整合を良くするため
に、超音波振動子の送受波面前面に多層の整合層が形成
されるようにな−) T キタ。
[Technical background of the invention and its issues] In recent years, in order to expand the characteristics of ultrasound emitted from an ultrasound probe to a high frequency band and improve the acoustic matching with the subject, the use of ultrasound transducers has been developed. A multilayer matching layer is now formed in front of the transmitting and receiving wave surface.

ところで、例えばセクタ走査型の超音波プ【]−ブやリ
ュヤ走査型の超音波プローブは、第1図に示すように、
超音波振動子を短冊状に裁断した複数の素子18間が空
気2で満たされている。これは−素子あたりの指向特性
の劣化を防止するためである。そして、超音波振動子の
各素子18間における空気ギャップによって各素子相互
間の補強関係が小さくなるために生じる素子倒れの現象
を防止するため、各素子1a上に最適の厚さの整合層3
を積層固着した後に、更にその上に転写14を付着して
各素子相互間の補強関係を強くしていた。
By the way, for example, a sector scanning type ultrasonic probe or a Luya scanning type ultrasonic probe, as shown in Fig. 1,
Air 2 is filled between a plurality of elements 18 obtained by cutting an ultrasonic transducer into strips. This is to prevent deterioration of directivity characteristics per element. In order to prevent the phenomenon of element collapse caused by the air gap between each element 18 of the ultrasonic transducer that reduces the reinforcing relationship between the elements, a matching layer 3 of an optimal thickness is placed on each element 1a.
After laminating and fixing the elements, a transfer 14 was further attached thereon to strengthen the reinforcing relationship between the elements.

ところが、前記したように超音波振動子の各素子1a上
に多層の整合層3を積層するため、−素子1aの幅に対
して高さの方が高くなり、素子倒れが起き易い状態にな
っている。然も、補強用の転写膜4は、超音波振動子の
送受波面前面にあるため、音響的劣化を最小限にJ3さ
える必要上から、その厚さを薄くすることが要請される
。従って、転写膜4の厚みを管理づることが非常に困ガ
である。
However, as described above, since the multilayer matching layer 3 is laminated on each element 1a of the ultrasonic transducer, the height of the element 1a becomes higher than the width of the element 1a, and the element tends to fall down. ing. However, since the reinforcing transfer film 4 is located in front of the wave transmitting/receiving surface of the ultrasonic transducer, it is required to reduce its thickness in order to minimize acoustic deterioration J3. Therefore, it is very difficult to control the thickness of the transfer film 4.

そこで、以上の不都合を解消する見地から、超音波振動
子の各素子間の空気ギャップを別異の物質で充填づるこ
とが考えられる。これによると、素子倒れが起こること
がなく、然も超音波振動子の送受波面前面に音響的に悪
影響をもえる転写膜を付着づる必要がないので、音響的
劣化も生じない。
Therefore, from the standpoint of eliminating the above-mentioned disadvantages, it is conceivable to fill the air gap between each element of the ultrasonic transducer with a different substance. According to this, element collapse does not occur, and since there is no need to attach a transfer film that has an adverse acoustic effect to the front surface of the wave transmitting/receiving surface of the ultrasonic transducer, acoustic deterioration does not occur.

しかしながら、空気ギャップに充填する物質の特性にに
つては、超音波の指向特性を却って劣化さ「ることにな
る。例えば、音響インピーダンスZ=3 (x 105
 dyn −5ec /cm3)程度(7)エポキシ系
樹脂で充填J−ると、その指向特性は、空気ギャップを
設【プて転写膜を付着したもの(第1図参照)よりも鋭
くなる。第4図は両者の指向特性を示すもので、11で
示すのが、音響インピーダンスZ=3 (x 10S 
dyn −5ec /cm’ )程度のエポキシ系樹脂
で充填した超音波プローブの指向特性であり、10で示
すのが空気ギャップを設けて転写膜を付着した従来の超
音波ブ11−ブの指向特性である。一方、超音波振動子
の各素子18に位相制御をして超音波ビームを偏向した
揚台、その音圧は偏向しなかった場合に比較して低下(
る。
However, the characteristics of the substance filling the air gap will actually deteriorate the directional characteristics of the ultrasonic waves.For example, the acoustic impedance Z = 3 (x 105
dyn -5ec/cm3) (7) When filled with epoxy resin, its directional characteristics become sharper than when a transfer film is attached with an air gap (see Fig. 1). Figure 4 shows the directivity characteristics of both, and 11 indicates the acoustic impedance Z = 3 (x 10S
dyn -5ec/cm') is the directional characteristic of an ultrasonic probe filled with epoxy resin, and 10 shows the directional characteristic of a conventional ultrasonic probe 11-b with an air gap and a transfer film attached. It is. On the other hand, on the platform where the ultrasonic beam is deflected by controlling the phase of each element 18 of the ultrasonic transducer, the sound pressure is lower than when the ultrasonic beam is not deflected (
Ru.

この傾向は、−素子の指向特性が鋭いほど著しい。This tendency is more pronounced as the directional characteristics of the element become sharper.

従って、前記したように、指向特性が鋭くなっている前
記エポキシ系樹脂を充填した超B波ブ【1−ブは、例え
ばセクタ走査した場合において画像を構成できる視野角
度が狭<<Eる。それは指向特性が鋭いために偏向した
場合の音圧の劣化が、偏向しなかった場合に比べて箸し
いからである。
Therefore, as described above, the ultra-B wave beam filled with the epoxy resin, which has sharp directivity characteristics, has a narrow viewing angle at which an image can be formed when, for example, sector scanning is performed. This is because the directivity characteristics are sharp, so when the beam is deflected, the sound pressure deteriorates significantly compared to when it is not deflected.

[発明の目的] 本発明は前記事情に基づいてなされたものであり、指向
特性が良好で音響的劣化もなく、然も素子倒れのない信
頼性の高い超音波ブ[1−ブを提供することを目的とす
る。
[Object of the Invention] The present invention has been made based on the above-mentioned circumstances, and provides a highly reliable ultrasonic beam with good directivity characteristics, no acoustic deterioration, and no element collapse. The purpose is to

[発明の概要] 」−開目的を達成でるだめの本発明の軟弱は、超音波振
動子における複数の各素子を間隔を設(Jで配列配置し
た超音波プローブにおいて、前記名水=3− 子の相互間に音響インピーダンスZ=2(xloS d
yn −Sec /Cm” )以下の物質を充填シタコ
トを特徴とする。
[Summary of the Invention] The advantage of the present invention, which achieves the objective of the invention, is that a plurality of elements in an ultrasonic transducer are spaced apart (in an ultrasonic probe arranged in a J-shaped arrangement, the above-mentioned famous water = 3-elements). acoustic impedance Z=2 (xloS d
yn-Sec/Cm") is characterized by filling with the following substances:

し発明の実施例] 以下、本発明における実施例を図面を参照しながら説明
する。
Embodiments of the Invention] Examples of the present invention will be described below with reference to the drawings.

第2図は本発明に係る超音波プローブの一実施例を示す
断面図である。第2図において21aは方形状の圧電セ
ラミックを短冊状に裁断した各圧電セラミック素子であ
り、各圧電セラミック素子21aは相互に所定間隔を保
ってバッキング材20上に並列配置されている。23は
前記各圧電セラミック素子21a上にfi層固肴された
整合層である。22は各圧電セラミック素子218及び
その上に積層された整合層23の相互間における空隙に
充填されたシリコーン系樹脂(シリコーンRT V 3
87 ) J:りなる充填物質であり、該充填物質22
は音響インピーダンスZ−約1(×105d111n 
−SeC/Cm’ )を有している。
FIG. 2 is a sectional view showing an embodiment of the ultrasonic probe according to the present invention. In FIG. 2, reference numeral 21a denotes piezoelectric ceramic elements obtained by cutting rectangular piezoelectric ceramic into strips, and the piezoelectric ceramic elements 21a are arranged in parallel on the backing material 20 with a predetermined distance from each other. Reference numeral 23 denotes a matching layer which is fixed as an FI layer on each of the piezoelectric ceramic elements 21a. 22 is a silicone resin (Silicone RT V 3) filled in the gaps between each piezoelectric ceramic element 218 and the matching layer 23 laminated thereon.
87) J: another filling substance, the filling substance 22
is the acoustic impedance Z - approximately 1 (×105d111n
-SeC/Cm').

以上構成される超音波プローブは、第5図に示4− すような指向特性を得た。すなわち、第5図は間口幅0
.2111111で周波数5 M l−I Zの圧電セ
ラミック素子を駆動させた時の実験結果を示づものであ
る。
The ultrasonic probe constructed as described above obtained the directivity characteristics shown in FIG. In other words, in Figure 5, the frontage width is 0.
.. 2111111 and a piezoelectric ceramic element having a frequency of 5 M l-I Z is shown.

前記した従来の超音波プローブ等と比較するために、第
5図において従来の超音波プローブ等が前記と同一条件
下で得た指向特性を点線にて示す。
In order to compare with the conventional ultrasonic probe, etc. described above, the directional characteristics obtained by the conventional ultrasonic probe, etc. under the same conditions as described above are shown in FIG. 5 by dotted lines.

従って、10で示寸のが従来のブ[1−ブ構造における
指向特性を示し、11で示すのが充填物質としてエポキ
シ系樹脂(音響インピーダンス7;約3 (x 10S
 dyn −5ec /cm3) )を用イタモのの指
向特性を示し、12で示(実線が本発明における一実施
例のプローブ構造の指向特性を示す。
Therefore, the dimension indicated by 10 indicates the directivity in the conventional bubble structure, and the dimension indicated by 11 indicates the epoxy resin as the filling material (acoustic impedance 7; approximately 3 (x 10S).
dyn-5ec/cm3)) is shown by 12 (the solid line shows the directivity of the probe structure of one embodiment of the present invention).

これによると、指向特性は、本発明のもの12の方が従
来タイプよりも若干ではあるが良くなっていることが判
る。また、充填物質をエポキシ系樹脂にしたもの11は
、本発明のもの12及び従来タイプ10のいずれよりも
指向特性が悪くなっていることが判る。
According to this, it can be seen that the directivity characteristics of the device 12 of the present invention are slightly better than those of the conventional type. Further, it can be seen that the type 11 in which the filling material is an epoxy resin has worse directivity characteristics than both the type 12 of the present invention and the conventional type 10.

以上の実験結果より、前記実施例のように各圧電セラミ
ック素子間の空隙ギャップに、音響インビーダンスが約
1 (x 105dyn ・sec /cm’ )付近
の物質を充填ツることによって、指向特性が良好に4【
ることが判った。然し、各ff市セラミック素子21a
間の空隙ギャップに充填物質22が埋っているため、素
子倒れがおこることもない。
From the above experimental results, it was found that by filling the air gap between each piezoelectric ceramic element with a material having an acoustic impedance of around 1 (x 105 dyn sec/cm') as in the above example, the directivity characteristics can be improved. is good 4 [
It turns out that However, each ff city ceramic element 21a
Since the filling material 22 is filled in the void gap between the two, the element does not fall down.

また、超音波送受面前面に従来のような転写膜がないた
め、音響劣化を招くこともない。
Furthermore, since there is no transfer film in front of the ultrasonic wave transmitting/receiving surface, there is no possibility of acoustic deterioration.

本発明は前記実施例に限定されるものではなく、本弁明
の要旨の範囲内において神々の変形例を包含しているこ
とは言うでもない。
It goes without saying that the present invention is not limited to the above-mentioned embodiments, and includes modifications of the gods within the scope of the gist of the present invention.

例えば、各圧電セラミック素子間の空隙ギャップに埋込
む充填物質は、音響インピーダンス2=1 (x 10
S dyn −5ec /aII13) ニm定8レル
モのではなく、指向特性が従来タイプのプローブよりも
良好になる範囲であれば庁りる。実験を重ねた結果、そ
の範囲は音響インピーダンス7−2(x 10 S d
yn −sec /am3)以下であればよいことが判
った。
For example, the filler material embedded in the air gap between each piezoelectric ceramic element has an acoustic impedance of 2=1 (x 10
S dyn -5ec /aII13) It is acceptable as long as the directional characteristics are better than the conventional type probe, rather than the constant 8 real probe. As a result of repeated experiments, the range is acoustic impedance 7-2 (x 10 S d
It was found that it is sufficient if it is less than yn-sec/am3).

また、音響的劣化の少ない転写l!24や、音響的に無
視できるような厚みの転写膜24を用いれば、第3図に
示すように、前記実施例の71−1−プにおける超音波
送受波面の最前面に前記転写膜24を付着する構造であ
ってもよい。これにJ、っても、より信頼性の^い超音
波ブ[]−ブを得ることができる。
In addition, transcription l with less acoustic deterioration! 24 or a transfer film 24 with a thickness that is acoustically negligible, as shown in FIG. It may also be an attached structure. Even if J is added to this, a more reliable ultrasonic probe can be obtained.

[発明の効果1 以上説明したように本発明は、超音波揚動子における各
素子間の空隙ギャップに特定の音響インピーダンスを有
する充填物質を埋込んだ構成なので、指向特性が良好で
音響的劣化を沼くこともなく、然も素子倒れのおそれの
ないイ六頼竹の^い超音波プローブを提供することがで
きる。
[Effect of the invention 1 As explained above, the present invention has a structure in which a filling material having a specific acoustic impedance is embedded in the air gap between each element in an ultrasonic lifter, so that the directivity is good and acoustic deterioration is prevented. It is possible to provide a highly reliable ultrasonic probe that does not cause leakage and is free from the risk of element collapse.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の超音波ブロースの一例を示1j断面図、
第2図は本発明に係る超音波プローブの一実施例を示(
断面図、第3図は本発明にお(プる他の実施例を示す断
面図、第4図は従来の超音波プローブにおける指向特性
の実験結果を示づグラフ、第5図は本発明にd3りる超
合波ブ1コープど従来のものとの指向特性の実験結果を
比較して示1グラ7− ]である。 21a・・・・・・バ電セラミック素子(超音波振動子
の素子)、22・・・・・・充填物質〈物質〉。 代理人 弁理士 則 近 憲 佑(ほか1名)8−
Fig. 1 shows an example of a conventional ultrasonic blower;
FIG. 2 shows an embodiment of the ultrasonic probe according to the present invention (
3 is a sectional view showing another embodiment according to the present invention, FIG. 4 is a graph showing experimental results of directivity characteristics of a conventional ultrasonic probe, and FIG. 5 is a cross-sectional view showing another embodiment according to the present invention. The experimental results of the directional characteristics of the d3 ultra-combined wave probe and the conventional ones are compared and shown in Figure 7-7. element), 22...Filling substance (substance). Agent: Patent attorney Noriyuki Chika (and 1 other person) 8-

Claims (1)

【特許請求の範囲】[Claims] (1)超音波振動子における複数の各素子を間隔を設け
て配列配置した超音波プローブにおいて、前記各素子の
相互間に音響インピーダンスZ=2(x i QS d
yn −sea /am’ )以下の物質を充填したこ
とを特徴とする超音波プローブ。 (a 前記物質がシリコーン系樹脂であることを特徴と
する特許請求の範囲第1項記載の超音波プローブ。
(1) In an ultrasonic probe in which a plurality of elements in an ultrasonic transducer are arranged at intervals, the acoustic impedance between the elements is Z = 2 (x i QS d
An ultrasonic probe characterized in that it is filled with the following substance: yn-sea/am'). (a) The ultrasonic probe according to claim 1, wherein the substance is a silicone resin.
JP5526884A 1984-03-24 1984-03-24 Ultrasonic probe Pending JPS60199435A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5526884A JPS60199435A (en) 1984-03-24 1984-03-24 Ultrasonic probe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5526884A JPS60199435A (en) 1984-03-24 1984-03-24 Ultrasonic probe

Publications (1)

Publication Number Publication Date
JPS60199435A true JPS60199435A (en) 1985-10-08

Family

ID=12993854

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5526884A Pending JPS60199435A (en) 1984-03-24 1984-03-24 Ultrasonic probe

Country Status (1)

Country Link
JP (1) JPS60199435A (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4991390A (en) * 1972-12-29 1974-08-31
JPS55147100A (en) * 1979-12-24 1980-11-15 Toshiba Corp Ultrasonic wave probe
JPS5822046A (en) * 1981-08-03 1983-02-09 株式会社日立メディコ Ultrasonic probe
JPS59161998A (en) * 1983-03-07 1984-09-12 Yokogawa Medical Syst Ltd Production of array probe
JPS59209336A (en) * 1984-04-11 1984-11-27 松下電器産業株式会社 Ultrasonic probe
JPS59212763A (en) * 1983-05-19 1984-12-01 Ishikawajima Harima Heavy Ind Co Ltd Ultrasonic probe

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4991390A (en) * 1972-12-29 1974-08-31
JPS55147100A (en) * 1979-12-24 1980-11-15 Toshiba Corp Ultrasonic wave probe
JPS5822046A (en) * 1981-08-03 1983-02-09 株式会社日立メディコ Ultrasonic probe
JPS59161998A (en) * 1983-03-07 1984-09-12 Yokogawa Medical Syst Ltd Production of array probe
JPS59212763A (en) * 1983-05-19 1984-12-01 Ishikawajima Harima Heavy Ind Co Ltd Ultrasonic probe
JPS59209336A (en) * 1984-04-11 1984-11-27 松下電器産業株式会社 Ultrasonic probe

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