JPH0434879B2 - - Google Patents
Info
- Publication number
- JPH0434879B2 JPH0434879B2 JP57081430A JP8143082A JPH0434879B2 JP H0434879 B2 JPH0434879 B2 JP H0434879B2 JP 57081430 A JP57081430 A JP 57081430A JP 8143082 A JP8143082 A JP 8143082A JP H0434879 B2 JPH0434879 B2 JP H0434879B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- matching layer
- acoustic matching
- ultrasonic probe
- vibrator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000523 sample Substances 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 5
- 238000007650 screen-printing Methods 0.000 claims description 4
- 238000007639 printing Methods 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000002604 ultrasonography Methods 0.000 description 4
- 239000003822 epoxy resin Substances 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229920001875 Ebonite Polymers 0.000 description 1
- 210000001015 abdomen Anatomy 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 210000001685 thyroid gland Anatomy 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/02—Mechanical acoustic impedances; Impedance matching, e.g. by horns; Acoustic resonators
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Multimedia (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
Description
【発明の詳細な説明】
本発明は超音波診断装置や探傷装置に用いる超
音波探触子に関するものである。超音波探触子に
は、ジルコン・チタン酸鉛（PZT）系磁器など
の圧電磁器板の両面に電極を形成した圧電振動子
が超音波の発生および検出に用いられている。し
かし例えば人体の超音波診断に用いる場合、圧電
磁器と人体の音響インピーダンスが著しく異なる
ため、振動子を人体に直接接触させても有効に超
音波を内部に送り込むことはできない。そこで通
常、音響インピーダンスが人体と圧電磁器の中間
にある材料を音響整合層として振動子の上に設け
て用いる。この音響整合層材には無機物を適量充
填したエポキシ系樹脂が良く用いられており、整
合層の厚みが超音波の波長λの1/4になるように
形成される。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an ultrasonic probe used in an ultrasonic diagnostic device or a flaw detection device. Ultrasonic probes use piezoelectric vibrators, which have electrodes formed on both sides of a piezoelectric ceramic plate such as zircon-lead titanate (PZT)-based porcelain, to generate and detect ultrasonic waves. However, when used for ultrasonic diagnosis of the human body, for example, the acoustic impedance of the piezoelectric ceramic and the human body is significantly different, so even if the transducer is brought into direct contact with the human body, ultrasound cannot be effectively sent into the human body. Therefore, a material whose acoustic impedance is between that of the human body and that of piezoelectric ceramics is usually used as an acoustic matching layer provided on the vibrator. Epoxy resin filled with an appropriate amount of inorganic material is often used for this acoustic matching layer material, and the thickness of the matching layer is formed to be 1/4 of the wavelength λ of the ultrasonic wave.
このような整合層の例は、特開昭55−127799号
に記載されている。 An example of such a matching layer is described in JP-A-55-127799.
これを例えば、電子走査型のアレイ探触子の構
造をもつて以下に説明する。圧電振動子としては
第１図に示したような電極１２および１３で分極
処理をした圧電磁器板１１が用いられている。す
なわち、両面の電極が互いに対向している部分
（図で２本の点線にはさまれた部分）１４だけが
圧電的に活性になつている。このような振動子を
背面負荷材に接着し、短冊状に切断してリード線
を取り付けた後、第２図に示したように振動子１
１全面に亘り音響整合層１５が形成される。通
常、この音響整合層は樹脂を振動子上に流し込み
固化した後、研磨で所定の厚みにするなどの工程
で作られている。なお、１６は背面負荷材であ
る。 This will be explained below using, for example, the structure of an electronic scanning array probe. As the piezoelectric vibrator, a piezoelectric ceramic plate 11 polarized with electrodes 12 and 13 as shown in FIG. 1 is used. That is, only the portion 14 where the electrodes on both sides face each other (the portion sandwiched between the two dotted lines in the figure) is piezoelectrically active. After gluing such a vibrator to the back load material, cutting it into strips, and attaching lead wires, the vibrator 1 is assembled as shown in Figure 2.
An acoustic matching layer 15 is formed over the entire surface. Usually, this acoustic matching layer is made by a process such as pouring resin onto the vibrator, solidifying it, and then polishing it to a predetermined thickness. In addition, 16 is a back load material.
しかし、従来の超音波探触子では、音響整合層
が振動子全面に形成されているため、リード線２
４が取り付けられている圧電的に不活性な両端部
の振動までが音波として有効に被検体に送り込ま
れる。この両端部の振動は圧電的に活性な中央部
の厚み方向振動に引きづられる複雑なもので、被
検体内での超音波ビームの形成に悪影響を与え
る。そこで本発明の目的は、振動子両端の複雑な
振動の影響を取り除いた超音波探触子を提供する
ことにある。 However, in conventional ultrasound probes, the acoustic matching layer is formed on the entire surface of the transducer, so the lead wire 2
Even the vibrations of the piezoelectrically inactive ends to which the holder 4 is attached are effectively sent into the subject as sound waves. The vibrations at both ends are complex and are caused by the vibrations in the thickness direction of the piezoelectrically active center, which adversely affects the formation of the ultrasound beam within the subject. SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide an ultrasonic probe that is free from the effects of complex vibrations at both ends of a vibrator.
本発明の超音波探触子は、圧電振動子の圧電的
に活性な部分すなわち両面の電極が対向した中央
部にのみ選択的に音響整合層を設けることを特徴
としている。このようにすると、振動子の両端部
は音響インピーダンスの整合がとれていないた
め、端部の振動は被検体内に音波として有効には
伝わらない。すなわち、厚み方向の振動をしてい
る圧電的に活性な中央部分のみから超音波が発生
するのでほぼ設計通りにビームを形成することが
できる。このような音響整合層は例えばスクリー
ン印刷法などにより容易に形成することができ
る。 The ultrasonic probe of the present invention is characterized in that an acoustic matching layer is selectively provided only in the piezoelectrically active part of the piezoelectric vibrator, that is, in the central part where the electrodes on both sides face each other. In this case, since the acoustic impedances of both ends of the vibrator are not matched, vibrations at the ends are not effectively transmitted as sound waves into the subject. That is, since ultrasonic waves are generated only from the piezoelectrically active central portion that vibrates in the thickness direction, a beam can be formed almost as designed. Such an acoustic matching layer can be easily formed by, for example, a screen printing method.
以下、本発明の実施例を第３図を用いて説明す
る。圧電板として厚み0.28mm、巾12mm、長さ74mm
のチタン酸鉛系の圧電磁器板を用いた。両面の電
極が対向している部分の巾は９mmである。この圧
電板をフエライト粉末を含む硬質ゴム（背面負荷
材１６）の上にエポキシ系樹脂を用いて接着後、
0.5mmピツチで短冊状に切断した。なお、切断に
より生じた溝は有機物で充填した。次に、９mm×
74mmの矩形パターンを形成した＃250メツシユの
スクリーンを用い、第３図に示すように電極が対
向している中央部のみに音響整合材を印刷した。
音響整合材にはエポキシ系樹脂にタングステン粉
末を適量混合したものを用いた。印刷した整合層
１７が固化した後、膜厚を測定したところ約
50μmであつた。また膜厚の一様性は±3μmに入
つていた。振動子の中心周波数が7.5MHz、用い
た整合層の音速が〜1400m／ｓであるから、膜厚
は音波の波長の約1/4になつている。最後に、整
合材の塗布されていない両端の部分にリード線２
４を取り付けた。 Embodiments of the present invention will be described below with reference to FIG. As a piezoelectric plate, the thickness is 0.28mm, the width is 12mm, and the length is 74mm.
A lead titanate-based piezoelectric ceramic plate was used. The width of the portion where the electrodes on both sides face each other is 9 mm. After bonding this piezoelectric plate onto hard rubber containing ferrite powder (back load material 16) using epoxy resin,
It was cut into strips with a pitch of 0.5 mm. Note that the grooves created by cutting were filled with organic matter. Next, 9mm×
Using a #250 mesh screen with a 74 mm rectangular pattern, acoustic matching material was printed only in the center where the electrodes were facing each other, as shown in Figure 3.
The acoustic matching material used was an epoxy resin mixed with an appropriate amount of tungsten powder. After the printed matching layer 17 had solidified, the film thickness was measured and was approximately
It was 50 μm. Furthermore, the uniformity of the film thickness was within ±3 μm. Since the center frequency of the vibrator is 7.5 MHz and the sound speed of the matching layer used is ~1400 m/s, the film thickness is approximately 1/4 of the wavelength of the sound wave. Finally, connect the lead wires 2 to the ends where the matching material is not applied.
I installed 4.
このようにして作成した、超音波探触子の性能
を、従来方法で振動子全面に整合層を設けた超音
波探触子と水中実験で比較してみたところ、超音
波ビームのプロフアイルが理論値により近くなつ
ていることが明らかとなつた。さらに両者の探触
子に同一の音響レンズを装着し、人体の腹部およ
び甲状腺部の断層像を撮影したところ、分解能に
関し本発明の超音波探触子に優位性が認められ
た。 When we compared the performance of the ultrasonic probe created in this way with an ultrasonic probe in which a matching layer was provided on the entire surface of the transducer using a conventional method, we found that the profile of the ultrasonic beam was It became clear that the value was closer to the theoretical value. Furthermore, when both probes were equipped with the same acoustic lens and tomographic images of the abdomen and thyroid of a human body were taken, the ultrasound probe of the present invention was found to be superior in terms of resolution.
本実施例では、音響整合層が１層の場合につい
て述べたが、何も１層に限る必要はなく多層の場
合でも同一の効果が得られることは明らかであ
る。特に、スクリーン印刷法などで本発明の超音
波探触子の整合層を形成する場合には、マスク合
せをすることにより多層の整合層を容易に形成す
ることができる。 In this embodiment, the case where the acoustic matching layer is one layer has been described, but it is clear that the number of acoustic matching layers is not limited to one layer and the same effect can be obtained even in the case of multiple layers. In particular, when forming the matching layer of the ultrasonic probe of the present invention by screen printing or the like, a multilayer matching layer can be easily formed by matching masks.
第４図はスクリーン印刷による音響整合層の形
成法を説明する図である。圧電板４１を背面負荷
材４２に接着し圧電板を切断し複数の振動子を形
成した状態のものを、高さを合わせた固定治具４
３の中に挿入する。次に所定のパターン４４を切
つたスクリーン４５を、パターン４４が圧電板を
切断し複数の振動子を形成した状態のものの中央
部（分極されている部分）の直上にくるように設
置する。パターン４４は、適当なサイズのメツシ
ユになつており、このメツシユを通して整合材が
圧電板を切断し複数の振動子を形成した状態のも
のの上に供給される。第５図に示すように、スク
リーン４５を設置後、スクリーン上に整合材を供
給し、ゴム状物質からなるヘツド４６を用い適当
な圧力でスクリーン４５を圧電板を切断し複数の
振動子を形成した状態のものに押し付け、ヘツド
４６をパターンに沿つて一定の速度で移動させる
ことにより印刷を行なう。 FIG. 4 is a diagram illustrating a method of forming an acoustic matching layer by screen printing. A fixing jig 4 is used in which a piezoelectric plate 41 is glued to a back load material 42 and the piezoelectric plate is cut to form a plurality of vibrators, the height of which is adjusted.
Insert into 3. Next, a screen 45 with a predetermined pattern 44 cut thereon is installed so that the pattern 44 is directly above the center portion (polarized portion) of the piezoelectric plate cut to form a plurality of vibrators. The pattern 44 is a mesh of an appropriate size, and through this mesh the matching material is supplied onto the piezoelectric plate cut to form a plurality of vibrators. As shown in FIG. 5, after installing the screen 45, a matching material is supplied onto the screen, and a head 46 made of a rubber-like material is used to cut the piezoelectric plate of the screen 45 with appropriate pressure to form a plurality of vibrators. Printing is carried out by pressing the head 46 against a patterned object and moving the head 46 at a constant speed along the pattern.
第１図は、アレイ型超音波探触子に用いられる
圧電板を説明する図、第２図はアレイ型超音波探
触子の断面図、第３図は本発明による超音波探触
子の一実施例を示す図、第４図及び第５図はその
製造法を説明する図である。
１１…圧電磁器板、１２，１３…電極、１５…
整合層、１６…背面負荷。
FIG. 1 is a diagram illustrating a piezoelectric plate used in an array-type ultrasonic probe, FIG. 2 is a cross-sectional view of the array-type ultrasonic probe, and FIG. 3 is a diagram of an ultrasonic probe according to the present invention. FIGS. 4 and 5, which show one embodiment, are diagrams explaining the manufacturing method thereof. 11... Piezoelectric ceramic plate, 12, 13... Electrode, 15...
Matching layer, 16...back load.
Claims (1)
の圧電振動子を有し、前記各圧電振動子の厚さ方
向の上面と下面にはそれぞれ電極が設けられ、前
記各圧電振動子の前面には音響整合層を備えた超
音波探触子において、上記音響整合層が上記各圧
電振動子の長手方向の上記電極が互いに対向する
中央部にのみ選択的にスクリーン印刷法により形
成されたことを特徴とする超音波探触子。 ２ 上記音響整合層が上記各圧電振動子の配列す
る方向に連続して複数の上記各圧電振動子にまた
がつて形成されていることを特徴とする特許請求
の範囲第１項記載の超音波探触子。 ３ 圧電板を背面負荷材に接着し、この圧電板を
切断し複数個の短冊状の圧電振動子が形成され、
音響整合層がスクリーン印刷法により形成された
ことを特徴とする特許請求の範囲第１項または第
２項に記載の超音波探触子。[Scope of Claims] 1. A piezoelectric vibrator having a plurality of strip-shaped piezoelectric vibrators arranged on a back load material, and electrodes are provided on the upper and lower surfaces of each piezoelectric vibrator in the thickness direction, respectively, In an ultrasonic probe including an acoustic matching layer on the front surface of each piezoelectric vibrator, the acoustic matching layer selectively screens only a central portion of each piezoelectric vibrator where the electrodes face each other in the longitudinal direction. An ultrasonic probe characterized in that it is formed by a printing method. 2. The ultrasonic wave according to claim 1, wherein the acoustic matching layer is formed continuously across a plurality of piezoelectric vibrators in the direction in which the piezoelectric vibrators are arranged. probe. 3 A piezoelectric plate is glued to the back load material, and this piezoelectric plate is cut to form a plurality of strip-shaped piezoelectric vibrators.
3. The ultrasonic probe according to claim 1, wherein the acoustic matching layer is formed by a screen printing method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8143082A JPS58198998A (en) | 1982-05-17 | 1982-05-17 | Ultrasonic wave probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8143082A JPS58198998A (en) | 1982-05-17 | 1982-05-17 | Ultrasonic wave probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58198998A JPS58198998A (en) | 1983-11-19 |
| JPH0434879B2 true JPH0434879B2 (en) | 1992-06-09 |
Family
ID=13746155
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8143082A Granted JPS58198998A (en) | 1982-05-17 | 1982-05-17 | Ultrasonic wave probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58198998A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60191600A (en) * | 1983-11-08 | 1985-09-30 | Tokyo Keiki Co Ltd | Method and apparatus for forming sound matching layer |
| JPS60100950A (en) * | 1983-11-09 | 1985-06-04 | 松下電器産業株式会社 | Ultrasonic probe |
| JPS60194700A (en) * | 1984-03-16 | 1985-10-03 | Toshiba Corp | Ultrasonic probe |
| US5410208A (en) * | 1993-04-12 | 1995-04-25 | Acuson Corporation | Ultrasound transducers with reduced sidelobes and method for manufacture thereof |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56161799A (en) * | 1980-05-15 | 1981-12-12 | Matsushita Electric Ind Co Ltd | Ultrasonic wave probe |
-
1982
- 1982-05-17 JP JP8143082A patent/JPS58198998A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56161799A (en) * | 1980-05-15 | 1981-12-12 | Matsushita Electric Ind Co Ltd | Ultrasonic wave probe |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58198998A (en) | 1983-11-19 |
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