JPS60198720A - 液相エピタキシヤル結晶成長装置 - Google Patents

液相エピタキシヤル結晶成長装置

Info

Publication number
JPS60198720A
JPS60198720A JP59056709A JP5670984A JPS60198720A JP S60198720 A JPS60198720 A JP S60198720A JP 59056709 A JP59056709 A JP 59056709A JP 5670984 A JP5670984 A JP 5670984A JP S60198720 A JPS60198720 A JP S60198720A
Authority
JP
Japan
Prior art keywords
slider
chamber
opening
epitaxial growth
boat body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59056709A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0260052B2 (Direct
Inventor
Takao Oda
織田　隆雄
Mari Kato
加藤　眞理
Kotaro Mitsui
三井　興太郎
Susumu Yoshida
進 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP59056709A priority Critical patent/JPS60198720A/ja
Publication of JPS60198720A publication Critical patent/JPS60198720A/ja
Publication of JPH0260052B2 publication Critical patent/JPH0260052B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/263—

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP59056709A 1984-03-22 1984-03-22 液相エピタキシヤル結晶成長装置 Granted JPS60198720A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59056709A JPS60198720A (ja) 1984-03-22 1984-03-22 液相エピタキシヤル結晶成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59056709A JPS60198720A (ja) 1984-03-22 1984-03-22 液相エピタキシヤル結晶成長装置

Publications (2)

Publication Number Publication Date
JPS60198720A true JPS60198720A (ja) 1985-10-08
JPH0260052B2 JPH0260052B2 (Direct) 1990-12-14

Family

ID=13035002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59056709A Granted JPS60198720A (ja) 1984-03-22 1984-03-22 液相エピタキシヤル結晶成長装置

Country Status (1)

Country Link
JP (1) JPS60198720A (Direct)

Also Published As

Publication number Publication date
JPH0260052B2 (Direct) 1990-12-14

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