JPS60193877A - 輸送用半導体ウエーハケース - Google Patents
輸送用半導体ウエーハケースInfo
- Publication number
- JPS60193877A JPS60193877A JP4779684A JP4779684A JPS60193877A JP S60193877 A JPS60193877 A JP S60193877A JP 4779684 A JP4779684 A JP 4779684A JP 4779684 A JP4779684 A JP 4779684A JP S60193877 A JPS60193877 A JP S60193877A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafers
- basket
- center
- cage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims description 75
- 238000011109 contamination Methods 0.000 claims description 8
- 230000003014 reinforcing effect Effects 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 4
- 125000006850 spacer group Chemical group 0.000 claims 1
- 239000000463 material Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- -1 polypropylene Polymers 0.000 description 2
- 230000002787 reinforcement Effects 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 235000021395 porridge Nutrition 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229920006300 shrink film Polymers 0.000 description 1
- 235000011888 snacks Nutrition 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Landscapes
- Packages (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4779684A JPS60193877A (ja) | 1984-03-13 | 1984-03-13 | 輸送用半導体ウエーハケース |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4779684A JPS60193877A (ja) | 1984-03-13 | 1984-03-13 | 輸送用半導体ウエーハケース |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60193877A true JPS60193877A (ja) | 1985-10-02 |
| JPH0239867B2 JPH0239867B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-09-07 |
Family
ID=12785329
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4779684A Granted JPS60193877A (ja) | 1984-03-13 | 1984-03-13 | 輸送用半導体ウエーハケース |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60193877A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6436043A (en) * | 1987-07-07 | 1989-02-07 | Empak Inc | Package |
| JPH0220042A (ja) * | 1988-05-24 | 1990-01-23 | Empak Inc | 半導体用ウエハー若しくは基板用パッケージ |
| JPH0256444U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1988-10-17 | 1990-04-24 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6190726B2 (ja) * | 2014-01-17 | 2017-08-30 | 信越ポリマー株式会社 | 基板収納容器 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52113881A (en) * | 1976-03-18 | 1977-09-24 | Fluoroware Inc | Siliconeewafer transporting container |
-
1984
- 1984-03-13 JP JP4779684A patent/JPS60193877A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52113881A (en) * | 1976-03-18 | 1977-09-24 | Fluoroware Inc | Siliconeewafer transporting container |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6436043A (en) * | 1987-07-07 | 1989-02-07 | Empak Inc | Package |
| JPH0220042A (ja) * | 1988-05-24 | 1990-01-23 | Empak Inc | 半導体用ウエハー若しくは基板用パッケージ |
| JPH0256444U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1988-10-17 | 1990-04-24 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0239867B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-09-07 |
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