JPS60191208A - 光回路素子とその製造方法 - Google Patents
光回路素子とその製造方法Info
- Publication number
- JPS60191208A JPS60191208A JP59047980A JP4798084A JPS60191208A JP S60191208 A JPS60191208 A JP S60191208A JP 59047980 A JP59047980 A JP 59047980A JP 4798084 A JP4798084 A JP 4798084A JP S60191208 A JPS60191208 A JP S60191208A
- Authority
- JP
- Japan
- Prior art keywords
- diffusion
- substrate
- potassium
- glass
- waveguide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 28
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 239000011521 glass Substances 0.000 claims abstract description 51
- 239000000758 substrate Substances 0.000 claims abstract description 50
- 238000010438 heat treatment Methods 0.000 claims abstract description 23
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 claims abstract description 20
- 235000010333 potassium nitrate Nutrition 0.000 claims abstract description 10
- 238000009792 diffusion process Methods 0.000 claims description 63
- 239000011248 coating agent Substances 0.000 claims description 19
- 238000000576 coating method Methods 0.000 claims description 19
- 229910001414 potassium ion Inorganic materials 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 7
- 238000004544 sputter deposition Methods 0.000 claims description 7
- 239000011734 sodium Substances 0.000 claims description 5
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims description 3
- 229910052708 sodium Inorganic materials 0.000 claims description 3
- NPYPAHLBTDXSSS-UHFFFAOYSA-N Potassium ion Chemical compound [K+] NPYPAHLBTDXSSS-UHFFFAOYSA-N 0.000 claims description 2
- 239000000155 melt Substances 0.000 claims 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 abstract description 37
- 229910052700 potassium Inorganic materials 0.000 abstract description 37
- 239000011591 potassium Substances 0.000 abstract description 37
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 abstract description 8
- 239000002019 doping agent Substances 0.000 abstract description 6
- 150000002500 ions Chemical class 0.000 abstract description 6
- 229910001415 sodium ion Inorganic materials 0.000 abstract description 6
- 238000001552 radio frequency sputter deposition Methods 0.000 abstract description 5
- 229910002092 carbon dioxide Inorganic materials 0.000 abstract description 4
- 239000001569 carbon dioxide Substances 0.000 abstract description 4
- 238000009826 distribution Methods 0.000 description 13
- 239000010408 film Substances 0.000 description 11
- 229910052709 silver Inorganic materials 0.000 description 10
- 239000004332 silver Substances 0.000 description 10
- -1 silver ions Chemical class 0.000 description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 8
- 229910052782 aluminium Inorganic materials 0.000 description 8
- 238000005342 ion exchange Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000004453 electron probe microanalysis Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- BITYAPCSNKJESK-UHFFFAOYSA-N potassiosodium Chemical compound [Na].[K] BITYAPCSNKJESK-UHFFFAOYSA-N 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- VWDWKYIASSYTQR-UHFFFAOYSA-N sodium nitrate Inorganic materials [Na+].[O-][N+]([O-])=O VWDWKYIASSYTQR-UHFFFAOYSA-N 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- KKCBUQHMOMHUOY-UHFFFAOYSA-N Na2O Inorganic materials [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- IOVCWXUNBOPUCH-UHFFFAOYSA-M Nitrite anion Chemical compound [O-]N=O IOVCWXUNBOPUCH-UHFFFAOYSA-M 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
- G02B6/1342—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using diffusion
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59047980A JPS60191208A (ja) | 1984-03-12 | 1984-03-12 | 光回路素子とその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59047980A JPS60191208A (ja) | 1984-03-12 | 1984-03-12 | 光回路素子とその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60191208A true JPS60191208A (ja) | 1985-09-28 |
| JPH0531123B2 JPH0531123B2 (enrdf_load_stackoverflow) | 1993-05-11 |
Family
ID=12790456
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59047980A Granted JPS60191208A (ja) | 1984-03-12 | 1984-03-12 | 光回路素子とその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60191208A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6449004A (en) * | 1987-07-28 | 1989-02-23 | Polaroid Corp | Manufacture of tapered waveguide |
| WO2000046618A1 (en) * | 1999-02-05 | 2000-08-10 | The University Court Of The University Of Glasgow | Waveguide for an optical circuit and method of fabrication thereof |
| WO2018135411A1 (ja) * | 2017-01-19 | 2018-07-26 | 住友電気工業株式会社 | 光導波路部材及び光結合構造 |
| WO2018139184A1 (ja) * | 2017-01-26 | 2018-08-02 | 住友電気工業株式会社 | 光接続部品及び光結合構造 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58134609A (ja) * | 1982-02-03 | 1983-08-10 | Nec Corp | 光導波路の製造方法 |
-
1984
- 1984-03-12 JP JP59047980A patent/JPS60191208A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58134609A (ja) * | 1982-02-03 | 1983-08-10 | Nec Corp | 光導波路の製造方法 |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6449004A (en) * | 1987-07-28 | 1989-02-23 | Polaroid Corp | Manufacture of tapered waveguide |
| WO2000046618A1 (en) * | 1999-02-05 | 2000-08-10 | The University Court Of The University Of Glasgow | Waveguide for an optical circuit and method of fabrication thereof |
| GB2362963A (en) * | 1999-02-05 | 2001-12-05 | Univ Glasgow | Waveguide for an optical circuit and method of fabrication thereof |
| GB2362963B (en) * | 1999-02-05 | 2003-03-12 | Univ Glasgow | Waveguide for an optical circuit and method of fabrication thereof |
| US6735370B1 (en) | 1999-02-05 | 2004-05-11 | The University Court Of The University Of Glasgow | Waveguide for an optical circuit and method of fabrication thereof |
| WO2018135411A1 (ja) * | 2017-01-19 | 2018-07-26 | 住友電気工業株式会社 | 光導波路部材及び光結合構造 |
| WO2018139184A1 (ja) * | 2017-01-26 | 2018-08-02 | 住友電気工業株式会社 | 光接続部品及び光結合構造 |
| JPWO2018139184A1 (ja) * | 2017-01-26 | 2019-11-14 | 住友電気工業株式会社 | 光接続部品及び光結合構造 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0531123B2 (enrdf_load_stackoverflow) | 1993-05-11 |
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