JPS60191165U - 真空調整器 - Google Patents

真空調整器

Info

Publication number
JPS60191165U
JPS60191165U JP7830384U JP7830384U JPS60191165U JP S60191165 U JPS60191165 U JP S60191165U JP 7830384 U JP7830384 U JP 7830384U JP 7830384 U JP7830384 U JP 7830384U JP S60191165 U JPS60191165 U JP S60191165U
Authority
JP
Japan
Prior art keywords
chamber
diaphragm
communicates
hole
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7830384U
Other languages
English (en)
Japanese (ja)
Other versions
JPS638202Y2 (enExample
Inventor
松沢　実
上田　斉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Orion Machinery Co Ltd
Original Assignee
Orion Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orion Machinery Co Ltd filed Critical Orion Machinery Co Ltd
Priority to JP7830384U priority Critical patent/JPS60191165U/ja
Publication of JPS60191165U publication Critical patent/JPS60191165U/ja
Application granted granted Critical
Publication of JPS638202Y2 publication Critical patent/JPS638202Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Safety Valves (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Supply Devices, Intensifiers, Converters, And Telemotors (AREA)
JP7830384U 1984-05-28 1984-05-28 真空調整器 Granted JPS60191165U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7830384U JPS60191165U (ja) 1984-05-28 1984-05-28 真空調整器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7830384U JPS60191165U (ja) 1984-05-28 1984-05-28 真空調整器

Publications (2)

Publication Number Publication Date
JPS60191165U true JPS60191165U (ja) 1985-12-18
JPS638202Y2 JPS638202Y2 (enExample) 1988-03-11

Family

ID=30622160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7830384U Granted JPS60191165U (ja) 1984-05-28 1984-05-28 真空調整器

Country Status (1)

Country Link
JP (1) JPS60191165U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6470806A (en) * 1987-09-11 1989-03-16 Konan Electric Co Pilot type pressure reducing valve

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6470806A (en) * 1987-09-11 1989-03-16 Konan Electric Co Pilot type pressure reducing valve

Also Published As

Publication number Publication date
JPS638202Y2 (enExample) 1988-03-11

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