JPS61125272U - - Google Patents

Info

Publication number
JPS61125272U
JPS61125272U JP827185U JP827185U JPS61125272U JP S61125272 U JPS61125272 U JP S61125272U JP 827185 U JP827185 U JP 827185U JP 827185 U JP827185 U JP 827185U JP S61125272 U JPS61125272 U JP S61125272U
Authority
JP
Japan
Prior art keywords
chamber
diaphragm
vacuum
atmosphere
communicates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP827185U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6327569Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP827185U priority Critical patent/JPS6327569Y2/ja
Publication of JPS61125272U publication Critical patent/JPS61125272U/ja
Application granted granted Critical
Publication of JPS6327569Y2 publication Critical patent/JPS6327569Y2/ja
Expired legal-status Critical Current

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JP827185U 1985-01-24 1985-01-24 Expired JPS6327569Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP827185U JPS6327569Y2 (enExample) 1985-01-24 1985-01-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP827185U JPS6327569Y2 (enExample) 1985-01-24 1985-01-24

Publications (2)

Publication Number Publication Date
JPS61125272U true JPS61125272U (enExample) 1986-08-06
JPS6327569Y2 JPS6327569Y2 (enExample) 1988-07-26

Family

ID=30487395

Family Applications (1)

Application Number Title Priority Date Filing Date
JP827185U Expired JPS6327569Y2 (enExample) 1985-01-24 1985-01-24

Country Status (1)

Country Link
JP (1) JPS6327569Y2 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004508022A (ja) * 2000-09-06 2004-03-18 デラヴァール ホルディング アクチボラゲット ほぼ一定の真空を真空系内に維持する真空調圧器
KR100985763B1 (ko) 2009-11-11 2010-10-06 한국기계연구원 파일럿 타입 안전밸브 및 그 개폐방법
JP2012055214A (ja) * 2010-09-08 2012-03-22 Orion Machinery Co Ltd 真空調整器

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004508022A (ja) * 2000-09-06 2004-03-18 デラヴァール ホルディング アクチボラゲット ほぼ一定の真空を真空系内に維持する真空調圧器
KR100985763B1 (ko) 2009-11-11 2010-10-06 한국기계연구원 파일럿 타입 안전밸브 및 그 개폐방법
JP2012055214A (ja) * 2010-09-08 2012-03-22 Orion Machinery Co Ltd 真空調整器

Also Published As

Publication number Publication date
JPS6327569Y2 (enExample) 1988-07-26

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