JPS60189934A - Applying method of viscous liquid - Google Patents

Abstract

PURPOSE:To form a viscous-liquid applying film with a flat surface with no irregularities on the surface of a substrate to be treated, a surface section thereof has irregularities, by action to a viscous liquid of centrifugal force by rotating on its own axis and revolving the substrate to be treated on which the viscous liquid adheres. CONSTITUTION:A substrate to be treated 50 is sucked under a vacuum so that the central section of the surface of the substrate coincides with the central section of the surface of a base plate 1. The substrate to be treated 50 is turned at low speed by operating a motor 3 while a rotating disk 8 is rotated at low speed by operating a motor 10. A required quantity of a viscous liquid is injected and attached to the central section of the surface of the substrate 50 to be treated from a viscous-liquid injection pipe 7. The substrate 50 to be treated is turned at high speed, and the viscous liquid adhering to the central section of the surface is spread to the peripheray of the surface of the substrate 50 to be treated by the centrifugal force of the revolution. The number of revolution of the motor 10 is increased and the rotating disk 8 is turned at high speed at the same time as the viscous liquid is spread, and large centrifugal force in the direction vertical to the surface of the substrate 50 to be treated is worked to the viscous liquid by the revolution.

Description

[Detailed Description of the Invention] [Technical Field of the Invention] Jin's invention is a semiconductor integrated circuit device (I) having an uneven surface.
C) It relates to a method of applying a viscous liquid onto the surface of a substrate to be processed, such as a substrate.

[Prior art]

Conventionally, a spin coater has been used to apply a viscous liquid such as a photoresist agent or a silica solution onto the surface of a substrate to be processed such as an IC substrate that has an uneven surface.

FIG. 1 is a cross-sectional view of the main components of an example of a spin coater. In FIG.
The mounting table (2) is placed on the upper surface and is vacuum-adsorbed, and the mounting table (2) has one end fixed to the center of the lower surface of the mounting table (1).
A rotating shaft (3) that rotates 1) at high speed in the direction of the arrow shown in the figure.
(4) is a motor that is installed at the other end of the rotating shaft (2) and rotates the rotating shaft (2) at high speed in the direction of the arrow in the figure;
Along the axis of 2), one end opened on the top surface of the mounting table (1) and the other end opened on the side surface of the rotating shaft (2), and was placed on the top surface of the mounting table (1). The vacuum hole (5) for vacuum suctioning the substrate to be processed has a U-shaped cross-sectional shape that surrounds the rotation shaft (2) and opens on the rotation shaft (2) side, and the opening of the vacuum hole (4). This is a connecting ring that is provided to cover the vacuum hole (4) and connects a vacuum hose (described later) to the vacuum hole (4). The opening end surface of the connecting ring (5) is in airtight contact with the side surface of the rotating shaft (2) via a relatively flexible QIJ ring (not shown), etc., so that the rotation of the rotating shaft (2) is not hindered. Composed of
ing. (6) is a vacuum hose with one end penetrating the side wall of the connecting ring (5) and opening into the connecting ring (5), and the other end connected to a vacuum bridge (not shown); (7) is installed above the center of the top surface of the mounting table (11) and injects a required amount of viscous liquid onto the center of the surface of the substrate to be processed, which is vacuum-adsorbed onto the top surface of the mounting table (11). This is a viscous liquid injection tube.

Next, we will explain the operation of this spin coater at the table (1).
It is placed on the top surface of the mounting table (1) so that it coincides with the center of the top surface, and vacuum suction is applied. Next, viscous liquid injection tube (7)
After injecting and depositing the required amount of viscous liquid onto the center of the surface of the substrate to be processed, the rotating shaft (2) is rotated in the direction of the arrow in the figure to rotate the substrate to be processed. The viscous liquid injected onto the center of the surface of the processing substrate spreads toward the periphery of the surface between the processing substrates due to the centrifugal force caused by the rotation of the processing substrate, and the unnecessary portion of the viscous liquid is removed from the paper periphery. It scatters to the outside and forms a viscous liquid coating film (51) on the surface of the substrate to be processed.
) is deposited.

By the way, in the conventional method of applying a viscous liquid using this spin coater, the viscous liquid on the surface of the substrate to be processed is coated along the surface of the substrate from the center to the periphery by rotation of the substrate to be processed. However, since the only force acting in the direction perpendicular to the surface of the substrate to be processed is gravity, the surface of the substrate to be processed is The unevenness on the surface of this viscous liquid coating IIIK51), which creates unevenness corresponding to the unevenness, has been a serious drawback in the manufacture of ICs and the like that require microfabrication.

[Summary of the invention]

The present invention has been made with the aim of eliminating such drawbacks, and involves depositing a required amount of viscous liquid onto the center of the surface of a substrate to be processed, which has an uneven surface, and is rotated about its axis about a normal line passing through the center of its surface, and also revolved along a circumference of a predetermined radius whose center is on an extension of the central axis of the substrate to be processed on the side of the viscous liquid adhering surface of the substrate to be processed. Due to the action of centrifugal force on the viscous liquid due to these rotations and revolutions of the substrate to be processed,
The present invention provides a method capable of forming a viscous liquid coating film having a flat surface with no unevenness on the surface of a substrate to be processed whose surface portion is uneven.

[Embodiments of the invention]

FIG. 2 is a front view, partially in cross section, of the main components of a viscous liquid coating device used in a viscous liquid coating method according to an embodiment of the present invention.

In the figures, the same reference numerals as those shown in FIG. 1 indicate equivalent parts. (8) is a rotating disk that rotates in the direction of the illustrated arrow;
(9) is a rotating shaft whose one end is fixed to the center of the lower surface of the rotating disc (8) and rotates the rotating disc (8) in the direction of the arrow shown in the figure, and QI is the other end of the rotating shaft (9) The rotating shaft (
9), (11a) and (llb)
are fixed at symmetrical positions with respect to the axis of the rotating shaft (9) on the peripheral edge of the upper surface of the rotating disk (8).
The motor (3) of the spin coater shown in the figure is placed on the mounting table (1).
motor support plates Dza) and (12b) that support the surfaces of
) have one end fixed to a part of the upper surface of the rotating disk (8) at a required distance from the part where it is attached to the motor support plate (11a) and (111)) toward the center, and the viscous liquid is injected. The viscous liquid injection tube support plates, 0 and Q4) that support the tube (7) so that its tip faces the center of the surface of the mounting table (1) are located diagonally above and diagonally below the mounting table (11), respectively. The infrared lamps 06 and M radiate infrared rays to heat the space between the substrates to be processed that are vacuum-adsorbed on the surface of the mounting table (1); This is a condensing mirror that focuses infrared rays onto the surface of the substrate to be processed.Next, we will explain the operation of the viscous liquid coating device configured in this way.First, place the substrate to be processed at the center of its surface.・Gas mounting table (1
) and vacuum suction onto the surface of the mounting table (1). Next, the motor (3) is operated to rotate the substrate to be processed at a low speed, and the motor (3) is rotated at a low speed.
0 to rotate the rotating disk (8) at a low speed.

Next, a required amount of viscous liquid is injected from the viscous liquid injection pipe (7) onto the center of the surface of the substrate to be processed (2) and is deposited thereon. Next, the rotation speed of the motor (3) is increased to rotate the substrate wheel at high speed, and the centrifugal force caused by the rotation of the substrate causes the viscous liquid attached to the center of the surface of the substrate to be coated. At the same time, the motor θ
1 and rotate the rotating disk (8) at high speed, and the rotation of the rotating disk (8) causes the viscous liquid on the surface of the substrate to be processed to be perpendicular to the surface of the substrate to be processed. Apply a large centrifugal force in the direction. Then, due to the centrifugal force caused by the rotation of the substrate to be processed and the centrifugal force caused by the rotation of the rotating disk (8), a viscous liquid coating film having a flat surface with no unevenness is formed on the surface of the substrate to be processed. Filmed. Thereafter, while the substrate to be processed and the rotating disk (8) are being rotated, the infrared lamp 0→.

0 → is turned on and the viscous liquid coating film formed on the surface of the substrate to be processed (■) is forcibly heated, dried and solidified. A viscous liquid coating film (52) having a flat surface with no unevenness is formed on the surface of the substrate to be processed which has unevenness.

In addition, in the viscous liquid coating device used in the method of this example,
Although the viscous liquid coating film formed on the surface of the substrate to be processed was forcibly heated, dried, and solidified, it is not necessarily necessary to forcibly heat, dry, and solidify the viscous liquid coating film. The membrane may be dried and solidified naturally.

〔Effect of the invention〕

As described above, in the viscous liquid application method of the present invention, a required amount of viscous liquid is applied to the center of the surface of the substrate to be processed which has an uneven surface, and the viscous liquid is applied to the substrate. The substrate to be treated is rotated around the normal line passing through the center of its surface as an axis, and rotated along the circumference of a predetermined radius whose center is on an extension of the central axis of the substrate to be treated on the viscous liquid adhering surface side of the substrate to be treated. Since the substrate to be processed revolves around its axis, centrifugal force due to these rotations and revolutions of the substrate to be processed acts on the viscous liquid. It is possible to form a film.

[Brief explanation of drawings]

FIG. 1 is a cross-sectional view of the main components of an example of a spin coater, and FIG. 2 is a partial cross-sectional view of the main components of a viscous liquid coating device used in a viscous liquid coating method according to an embodiment of the present invention. The front view and FIG. 3 are cross-sectional views showing the state of the viscous liquid coating film formed on the surface of the substrate to be processed by the viscous liquid coating apparatus of FIG. 2. In the figure, (11, (2) and (3) are respectively the rotating shaft and motor of the mounting table 1 that rotates the substrate to be processed about the normal line passing through the center of its surface, and (8) and (9).
) and 0[ are the rotating shaft and motor of the disk 9 that rotates the substrate to be processed along a circumference of a predetermined radius, and 0[
] and 0 → forcefully heat, dry, and dry the viscous liquid coating film.
The solidifying infrared lamp is the substrate to be processed, and (52) is the viscous liquid coating film. Note that the same reference numerals in the figures indicate corresponding parts. Agent Masuo Oiwa Figure 1 Figure 2 Figure 3, f2

Claims (2)

[Claims] (1) A required amount of viscous liquid is applied to the center of the surface of a substrate to be processed which has an uneven surface, and the axis of the substrate to be processed with this viscous liquid attached is set to the normal line passing through the center of the surface. The substrate to be processed is rotated on its own axis and revolved along a circumference of a predetermined radius whose center is on an extension of the central axis of the substrate to be processed on the viscous liquid adhering surface side of the substrate to be processed, and the substrate to be processed is rotated and revolved. A method for applying a viscous liquid, comprising forming a viscous liquid coating film on the surface of the substrate to be processed by applying centrifugal force to the viscous liquid. (2) A method for applying a viscous liquid according to claim 1, wherein the viscous liquid coating film is forcibly heated, dried and solidified while the substrate to be processed is being rotated.