JPS60189853A - 試料交換装置 - Google Patents

試料交換装置

Info

Publication number
JPS60189853A
JPS60189853A JP59046172A JP4617284A JPS60189853A JP S60189853 A JPS60189853 A JP S60189853A JP 59046172 A JP59046172 A JP 59046172A JP 4617284 A JP4617284 A JP 4617284A JP S60189853 A JPS60189853 A JP S60189853A
Authority
JP
Japan
Prior art keywords
sample
analysis
bar
pipe
undergoing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59046172A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0574182B2 (enrdf_load_stackoverflow
Inventor
Teruji Hirai
平居　暉士
Takeshi Araki
武 荒木
Hideto Furumi
秀人 古味
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP59046172A priority Critical patent/JPS60189853A/ja
Publication of JPS60189853A publication Critical patent/JPS60189853A/ja
Publication of JPH0574182B2 publication Critical patent/JPH0574182B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Electron Tubes For Measurement (AREA)
JP59046172A 1984-03-10 1984-03-10 試料交換装置 Granted JPS60189853A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59046172A JPS60189853A (ja) 1984-03-10 1984-03-10 試料交換装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59046172A JPS60189853A (ja) 1984-03-10 1984-03-10 試料交換装置

Publications (2)

Publication Number Publication Date
JPS60189853A true JPS60189853A (ja) 1985-09-27
JPH0574182B2 JPH0574182B2 (enrdf_load_stackoverflow) 1993-10-15

Family

ID=12739603

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59046172A Granted JPS60189853A (ja) 1984-03-10 1984-03-10 試料交換装置

Country Status (1)

Country Link
JP (1) JPS60189853A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008071510A (ja) * 2006-09-12 2008-03-27 Mems Core Co Ltd 質量分析装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53161686U (enrdf_load_stackoverflow) * 1977-05-20 1978-12-18
JPS57138758A (en) * 1981-02-20 1982-08-27 Nippon Telegr & Teleph Corp <Ntt> Sample exchange device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53161686U (enrdf_load_stackoverflow) * 1977-05-20 1978-12-18
JPS57138758A (en) * 1981-02-20 1982-08-27 Nippon Telegr & Teleph Corp <Ntt> Sample exchange device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008071510A (ja) * 2006-09-12 2008-03-27 Mems Core Co Ltd 質量分析装置

Also Published As

Publication number Publication date
JPH0574182B2 (enrdf_load_stackoverflow) 1993-10-15

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