JPS60186620A - ガス流量制御装置 - Google Patents

ガス流量制御装置

Info

Publication number
JPS60186620A
JPS60186620A JP59043439A JP4343984A JPS60186620A JP S60186620 A JPS60186620 A JP S60186620A JP 59043439 A JP59043439 A JP 59043439A JP 4343984 A JP4343984 A JP 4343984A JP S60186620 A JPS60186620 A JP S60186620A
Authority
JP
Japan
Prior art keywords
controller
gas
convex part
plate
pin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59043439A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0463967B2 (enrdf_load_stackoverflow
Inventor
Itsuo Igarashi
逸夫 五十嵐
Masao Hara
政雄 原
Tatsuo Asagami
浅上　達夫
Yukinobu Hinaga
日永　幸信
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59043439A priority Critical patent/JPS60186620A/ja
Publication of JPS60186620A publication Critical patent/JPS60186620A/ja
Publication of JPH0463967B2 publication Critical patent/JPH0463967B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Taps Or Cocks (AREA)
  • Feeding And Controlling Fuel (AREA)
JP59043439A 1984-03-07 1984-03-07 ガス流量制御装置 Granted JPS60186620A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59043439A JPS60186620A (ja) 1984-03-07 1984-03-07 ガス流量制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59043439A JPS60186620A (ja) 1984-03-07 1984-03-07 ガス流量制御装置

Publications (2)

Publication Number Publication Date
JPS60186620A true JPS60186620A (ja) 1985-09-24
JPH0463967B2 JPH0463967B2 (enrdf_load_stackoverflow) 1992-10-13

Family

ID=12663727

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59043439A Granted JPS60186620A (ja) 1984-03-07 1984-03-07 ガス流量制御装置

Country Status (1)

Country Link
JP (1) JPS60186620A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0463967B2 (enrdf_load_stackoverflow) 1992-10-13

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