JPS60185500A - Manufacture of ultrasonic wave probe - Google Patents
Manufacture of ultrasonic wave probeInfo
- Publication number
- JPS60185500A JPS60185500A JP4097684A JP4097684A JPS60185500A JP S60185500 A JPS60185500 A JP S60185500A JP 4097684 A JP4097684 A JP 4097684A JP 4097684 A JP4097684 A JP 4097684A JP S60185500 A JPS60185500 A JP S60185500A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- vibrator
- film
- master
- vibrators
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/08—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with magnetostriction
- B06B1/085—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with magnetostriction using multiple elements, e.g. arrays
Abstract
Description
【発明の詳細な説明】
（イ）産業上の利用分野
本発明は主として円弧状に湾曲して配列された複数の圧
電振動子を備える超音波探触子の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION (A) Field of Industrial Application The present invention mainly relates to a method of manufacturing an ultrasonic probe comprising a plurality of piezoelectric vibrators arranged in a curved arc.
（ロ）従来技術
従来の超音波探触子１には、第１図に示すように、複数
の圧電振動子２を円弧状に湾曲して配列したいわゆる凹
面配列振動子を備え、これによって、超音波ビームＢを
セクタ走査できるように１−だものがある。なお、同図
において符号４は伝音媒質、６は圧電振動子２の背面に
設けられた吸音材、８は圧電振動子２の補強部材、１０
は圧電振動子２の支持部材、１２は収容ケース、１４は
超音波を吸音する吸音体である。ところで、このような
超音波探触子１を製造する場合、従来は、平板状の圧電
親振動子を準備し、この圧電親振動子に所定の深さの切
溝を一定間隔で形成する。次いで、吸音材に予じめ形成
した円弧状の湾曲面へ上配圧電親振動子を接着する。そ
の際、圧電親振動子は曲げられるので、切溝か一種の切
欠となって各圧電振動子に分断される。ところが、この
ような製造方法では、切溝を形成した後の圧電親基板の
取扱いが難かしく吸音材へ接着する前に自重で割れてし
まったり、また、分断時に各圧電振動子のピッチが不揃
になりやすい。このため、平板状の圧電親振動子を予じ
め吸音材に接着し、次いで圧電親振動子を複数の圧電振
動子に切断した後、吸音利を円弧状に湾曲固定する方法
も試みられている。しかしながら、この方法も、吸音利
の材質や厚さに影響され、吸音材が硬いときや厚さか太
きいときには曲げにくく圧電振動子かピッチ不揃いを起
したり、吸音材自体に内部歪か残るなどの問題がある。(B) Prior art As shown in FIG. 1, a conventional ultrasonic probe 1 includes a so-called concave array transducer in which a plurality of piezoelectric transducers 2 are arranged in a curved arc shape. There is one that is 1- so that the ultrasonic beam B can be scanned in sectors. In addition, in the figure, reference numeral 4 is a sound conducting medium, 6 is a sound absorbing material provided on the back surface of the piezoelectric vibrator 2, 8 is a reinforcing member of the piezoelectric vibrator 2, and 10 is a sound absorbing material.
1 is a support member for the piezoelectric vibrator 2, 12 is a housing case, and 14 is a sound absorber that absorbs ultrasonic waves. By the way, when manufacturing such an ultrasonic probe 1, conventionally, a flat piezoelectric master vibrator is prepared, and grooves of a predetermined depth are formed in the piezoelectric master vibrator at regular intervals. Next, the upper piezoelectric main vibrator is bonded to the arcuate curved surface formed in advance on the sound absorbing material. At this time, since the piezoelectric master vibrator is bent, it becomes a cut groove or a kind of notch and is divided into each piezoelectric vibrator. However, with this manufacturing method, it is difficult to handle the piezoelectric parent substrate after the grooves have been formed, and it may break under its own weight before being bonded to the sound absorbing material, and the pitch of each piezoelectric vibrator may be incorrect when it is separated. Easy to match. For this reason, attempts have been made to bond a flat piezoelectric master vibrator to a sound absorbing material in advance, then cut the piezoelectric master vibrator into multiple piezoelectric vibrators, and then curve and fix the sound absorbing material in an arc shape. There is. However, this method is also affected by the material and thickness of the sound absorbing material, and if the sound absorbing material is hard or thick, it may be difficult to bend, causing pitch irregularities in the piezoelectric vibrator, or internal distortion may remain in the sound absorbing material itself. There is a problem.
（ハ） 目的
本発明は従来のかかる問題点に鑑みてなされたものであ
って、複数の圧電振動子をピッチを揃えて精度よく、か
つ、簡単に円弧状に湾曲して配列できるようにして超音
波探触子を一層容易に製造できるようにすることを目的
とする。(C) Purpose The present invention has been made in view of the above-mentioned problems in the prior art, and provides a method for arranging a plurality of piezoelectric vibrators with equal pitch, with high precision, and easily curved into an arc shape. The purpose is to make it easier to manufacture ultrasonic probes.
に）構成
本発明はこのような目的を達成するため、平板状の圧電
親振動子を可撓性のフィルムに接着し、続いて圧電親振
動子からフィルムに達する深さの切溝を所定間隔ごとに
形成して前記圧電親振動子をフィルムを介［−て連接さ
れる複数の圧電振動子に切断し、次いで、各圧電振動子
をフィルムを数句けた状態で円弧状に湾曲固定するよう
にしている。In order to achieve the above object, the present invention adheres a flat piezoelectric master vibrator to a flexible film, and then cuts deep grooves from the piezoelectric master vibrator to the film at predetermined intervals. The piezoelectric master vibrator is then cut into a plurality of piezoelectric vibrators connected via a film, and then each piezoelectric vibrator is bent and fixed in an arc shape with several layers of film. I have to.
（ホ）実施例
以下、本発明を図面に示す一実施例に基づいて詳細に説
明する。(E) Example Hereinafter, the present invention will be explained in detail based on an example shown in the drawings.
第２図は圧電振動子、外部引出電極およびフィルムを示
す斜視図、第３図は超音波探触子の一部を示す縦断側面
図であり、第１図と対応する部分には同一の符号を付す
。この実施例の超音波探触子１の製造は次のようにｌ〜
で行なう。捷ず、所定の大きさを有する平板状の圧電親
振動子２０を準備する。この圧電親振動子２０はＰＺＴ
等の圧電基板上に対向電極を形成して構成される。次い
で、この圧電親振動子２０に親竹部引出電極２２を設け
た後、これを柔軟な可撓性のフィルム２４に接着する。Fig. 2 is a perspective view showing a piezoelectric vibrator, an external extraction electrode, and a film, and Fig. 3 is a longitudinal cross-sectional side view showing a part of the ultrasonic probe. Attach. The manufacturing of the ultrasonic probe 1 of this embodiment is as follows.
Let's do it. A flat piezoelectric master vibrator 20 having a predetermined size is prepared without being separated. This piezoelectric master vibrator 20 is made of PZT.
It is constructed by forming a counter electrode on a piezoelectric substrate such as. Next, a parent bamboo part extraction electrode 22 is provided on this piezoelectric parent vibrator 20, and then this is bonded to a soft flexible film 24.
続いて、圧電親振動子２０から親竹部引出電極２２を通
ってフィルム２４に達する深さの切溝２６を所定の間隔
ごとに形成し、これによって、圧電親振動子２０と親竹
部引出電極２２とをフィルム２４を介して互いに連接す
る複数の圧電振動子２ならびにこれに対応した外部引出
電極３２に切断する。続いて、形成された圧電振動子２
を、フィルム２４を取付けた状態のｉｔで所定の内径を
有する治具に載置１〜、補強部材８を圧電振動子２０両
側面に接着する。これにより、各圧電振動子２はピッチ
を揃えて円弧状に湾曲固定される。従って、次に、フィ
ルム２４を圧電振動子２から剥離し、前記治具と同じ内
径を有する吸音材６を圧電振動子２の一方面側へ設ける
。さらに、各外部引出電極３２を吸音材６側へ折り曲げ
、折り曲げた部分にリードａ３４を導電性接着剤等で固
着する。続いて、補強部材８の各１側部に支持部材１０
を取付ける。そして、吸音材６と支持部材１０との間に
リード線３４を固定するためにシリコンやエポキシ等の
樹脂３６を注入し硬化させる。次いで、一体化された各
圧電振動子２．吸音材６．補強部材８．支持部材１０等
を内壁に吸音体１４が固着されたケース１２内に収納し
、ケース１２開口部１２ａから伝音媒質４を封入するこ
とにより所要の超音波探触子１が得られる。Subsequently, grooves 26 having a depth reaching the film 24 from the piezoelectric main vibrator 20 through the main bamboo part extraction electrode 22 are formed at predetermined intervals, thereby making the piezoelectric main vibrator 20 and the main bamboo part extraction The electrode 22 is cut into a plurality of piezoelectric vibrators 2 connected to each other via a film 24 and corresponding external extraction electrodes 32. Subsequently, the formed piezoelectric vibrator 2
is placed on a jig having a predetermined inner diameter with the film 24 attached, and reinforcing members 8 are adhered to both sides of the piezoelectric vibrator 20. As a result, each piezoelectric vibrator 2 is curved and fixed in an arc shape with the same pitch. Therefore, next, the film 24 is peeled off from the piezoelectric vibrator 2, and a sound absorbing material 6 having the same inner diameter as the jig is provided on one side of the piezoelectric vibrator 2. Further, each externally drawn electrode 32 is bent toward the sound absorbing material 6 side, and a lead a34 is fixed to the bent portion using a conductive adhesive or the like. Subsequently, support members 10 are attached to each side of the reinforcing member 8.
Install. Then, in order to fix the lead wire 34 between the sound absorbing material 6 and the support member 10, a resin 36 such as silicone or epoxy is injected and hardened. Next, each integrated piezoelectric vibrator 2. Sound absorbing material6. Reinforcement member 8. The required ultrasonic probe 1 is obtained by housing the support member 10 and the like in a case 12 having a sound absorber 14 fixed to the inner wall, and enclosing the sound transmission medium 4 through the opening 12a of the case 12.
（へ）効果
以上のように本発明によれば、平板状の圧電親振動子を
可撓性のフィルムに接着Ｌ、続いて圧電親振動子からフ
ィルムに達する深さの切溝を所定間隔ごとに形成して前
記圧電親振動子をフィルムを介して連接される複数の圧
電振動子に切断し、次いで、各圧電振動子をフィルムを
取付けた状態で円弧状に湾曲固定するので、従来に比べ
て、各圧電振動子をピッチを揃えて精度よく、かつ、簡
単に円弧状に配列できるようになる。従って、超音波探
触子を一層容易に製造できるようになるという実用−に
優れた効果が発揮される。(F) Effect As described above, according to the present invention, a flat piezoelectric master vibrator is bonded to a flexible film L, and then grooves with a depth reaching from the piezoelectric master vibrator to the film are cut at predetermined intervals. The piezoelectric master vibrator is then cut into a plurality of piezoelectric vibrators connected via a film, and then each piezoelectric vibrator is curved and fixed in an arc shape with the film attached. Therefore, each piezoelectric vibrator can be easily arranged in an arc shape with the same pitch and with high accuracy. Therefore, an excellent practical effect is exhibited in that the ultrasonic probe can be manufactured more easily.
第１図は本発明に係る超音波探触子のケースの一部を省
略して示す正面図、第２図および第３図は本発明の実施
例を示し、第２図は圧電振動子、外部電極、フィルムを
含む斜視図、第３図＋ｄ超音波探触子の一部を示す縦断
側面図である。
代 理 人 弁理士岡田和秀
１ 第１図
〜″２
２−＝ ：ｆ−溺パ“畜〜・くン一
・ａ ′（、、・、へ６
４
１２ａ ２６ （’
２
２１
１ 第３図
＼
４３４
９
！０第２図FIG. 1 is a front view with a part of the case of an ultrasonic probe according to the present invention omitted, and FIGS. 2 and 3 show embodiments of the present invention. FIG. 2 shows a piezoelectric vibrator, FIG. 3 is a perspective view including an external electrode and a film, and a vertical cross-sectional side view showing a part of the ultrasonic probe in FIG. Agent Kazuhide Okada, Patent Attorney 1 Fig. 1~''2 2-= :f-drowning party~・Kunichi・a'(,,,,he6 4 12a 26 ('2 21 1 3rd Figure\434 9 !0Figure 2
Claims (1)
着ｌ〜、続いて、圧電親振動子からフィルムに達する深
さの切溝を所定間隔ごとに形成して前記圧電親振動子を
フィルムを介して連接される複数の圧電振動子に切断し
、次いで、各圧電振動子をフィルムを取付けた状態で円
弧状に湾曲固定することを特徴とする超音波探触子の製
造方法。+1+ A flat piezoelectric master vibrator is bonded to a flexible film. Next, grooves with a depth reaching from the piezoelectric master vibrator to the film are formed at predetermined intervals, and the piezoelectric master vibrator is attached to the film. 1. A method of manufacturing an ultrasonic probe, which comprises: cutting the piezoelectric transducer into a plurality of piezoelectric transducers connected via the transducer, and then bending and fixing each piezoelectric transducer in an arc shape with a film attached thereto.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4097684A JPS60185500A (en) | 1984-03-02 | 1984-03-02 | Manufacture of ultrasonic wave probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4097684A JPS60185500A (en) | 1984-03-02 | 1984-03-02 | Manufacture of ultrasonic wave probe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60185500A true JPS60185500A (en) | 1985-09-20 |
Family
ID=12595469
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4097684A Pending JPS60185500A (en) | 1984-03-02 | 1984-03-02 | Manufacture of ultrasonic wave probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60185500A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2607631A1 (en) * | 1986-11-28 | 1988-06-03 | Thomson Cgr | PROBE FOR AN ULTRASONIC APPARATUS HAVING A CONCEIVED ARRANGEMENT OF PIEZOELECTRIC ELEMENTS |
-
1984
- 1984-03-02 JP JP4097684A patent/JPS60185500A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2607631A1 (en) * | 1986-11-28 | 1988-06-03 | Thomson Cgr | PROBE FOR AN ULTRASONIC APPARATUS HAVING A CONCEIVED ARRANGEMENT OF PIEZOELECTRIC ELEMENTS |
| EP0272960A1 (en) * | 1986-11-28 | 1988-06-29 | Thomson-Cgr | Probe for an ultrasonic apparatus with an concave arrangement of piezoelectric elements |
| US5042492A (en) * | 1986-11-28 | 1991-08-27 | General Electric Cgr Sa | Probe provided with a concave arrangement of piezoelectric elements for ultrasound apparatus |
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