JPS60185338A - イオン源 - Google Patents

イオン源

Info

Publication number
JPS60185338A
JPS60185338A JP59231414A JP23141484A JPS60185338A JP S60185338 A JPS60185338 A JP S60185338A JP 59231414 A JP59231414 A JP 59231414A JP 23141484 A JP23141484 A JP 23141484A JP S60185338 A JPS60185338 A JP S60185338A
Authority
JP
Japan
Prior art keywords
ion source
anode
bottle
control electrode
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59231414A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6364027B2 (enrdf_load_stackoverflow
Inventor
Susumu Ishitani
石谷　享
Hifumi Tamura
田村　一二三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59231414A priority Critical patent/JPS60185338A/ja
Publication of JPS60185338A publication Critical patent/JPS60185338A/ja
Publication of JPS6364027B2 publication Critical patent/JPS6364027B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0802—Field ionization sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0802—Field ionization sources
    • H01J2237/0805—Liquid metal sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H01J2237/0802—Field ionization sources
    • H01J2237/0807—Gas field ion sources [GFIS]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
JP59231414A 1984-11-05 1984-11-05 イオン源 Granted JPS60185338A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59231414A JPS60185338A (ja) 1984-11-05 1984-11-05 イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59231414A JPS60185338A (ja) 1984-11-05 1984-11-05 イオン源

Publications (2)

Publication Number Publication Date
JPS60185338A true JPS60185338A (ja) 1985-09-20
JPS6364027B2 JPS6364027B2 (enrdf_load_stackoverflow) 1988-12-09

Family

ID=16923219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59231414A Granted JPS60185338A (ja) 1984-11-05 1984-11-05 イオン源

Country Status (1)

Country Link
JP (1) JPS60185338A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6364027B2 (enrdf_load_stackoverflow) 1988-12-09

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