JPS60180909A - 水素化ケイ素の製造方法 - Google Patents

水素化ケイ素の製造方法

Info

Publication number
JPS60180909A
JPS60180909A JP3482984A JP3482984A JPS60180909A JP S60180909 A JPS60180909 A JP S60180909A JP 3482984 A JP3482984 A JP 3482984A JP 3482984 A JP3482984 A JP 3482984A JP S60180909 A JPS60180909 A JP S60180909A
Authority
JP
Japan
Prior art keywords
silicon
silicon hydride
acid
magnesium
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3482984A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0328367B2 (enrdf_load_stackoverflow
Inventor
Masayoshi Ito
正義 伊藤
Hiroji Miyagawa
博治 宮川
Toshihiro Abe
智弘 安部
Kenji Iwata
健二 岩田
Kiyougo Koizumi
鏡悟 小泉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP3482984A priority Critical patent/JPS60180909A/ja
Publication of JPS60180909A publication Critical patent/JPS60180909A/ja
Publication of JPH0328367B2 publication Critical patent/JPH0328367B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP3482984A 1984-02-25 1984-02-25 水素化ケイ素の製造方法 Granted JPS60180909A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3482984A JPS60180909A (ja) 1984-02-25 1984-02-25 水素化ケイ素の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3482984A JPS60180909A (ja) 1984-02-25 1984-02-25 水素化ケイ素の製造方法

Publications (2)

Publication Number Publication Date
JPS60180909A true JPS60180909A (ja) 1985-09-14
JPH0328367B2 JPH0328367B2 (enrdf_load_stackoverflow) 1991-04-18

Family

ID=12425082

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3482984A Granted JPS60180909A (ja) 1984-02-25 1984-02-25 水素化ケイ素の製造方法

Country Status (1)

Country Link
JP (1) JPS60180909A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2927620A1 (fr) * 2008-02-14 2009-08-21 Guillonnet Didier Procede et systeme pour produire du gaz silane de haute purete
JP2016047781A (ja) * 2014-08-27 2016-04-07 株式会社豊田自動織機 シリコン材料の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2927620A1 (fr) * 2008-02-14 2009-08-21 Guillonnet Didier Procede et systeme pour produire du gaz silane de haute purete
JP2016047781A (ja) * 2014-08-27 2016-04-07 株式会社豊田自動織機 シリコン材料の製造方法

Also Published As

Publication number Publication date
JPH0328367B2 (enrdf_load_stackoverflow) 1991-04-18

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