JPS60176947A - 酸化珪素被膜の製造方法 - Google Patents
酸化珪素被膜の製造方法Info
- Publication number
- JPS60176947A JPS60176947A JP59031139A JP3113984A JPS60176947A JP S60176947 A JPS60176947 A JP S60176947A JP 59031139 A JP59031139 A JP 59031139A JP 3113984 A JP3113984 A JP 3113984A JP S60176947 A JPS60176947 A JP S60176947A
- Authority
- JP
- Japan
- Prior art keywords
- silicon oxide
- oxide film
- substrate
- solution
- aqueous solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 68
- 229910052814 silicon oxide Inorganic materials 0.000 title claims abstract description 68
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 239000000243 solution Substances 0.000 claims abstract description 20
- 239000002253 acid Substances 0.000 claims abstract description 15
- 239000007864 aqueous solution Substances 0.000 claims abstract description 14
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 claims abstract description 14
- 239000004327 boric acid Substances 0.000 claims abstract description 14
- 229920006395 saturated elastomer Polymers 0.000 claims abstract description 5
- 239000007788 liquid Substances 0.000 claims description 33
- 238000000034 method Methods 0.000 claims description 18
- 238000012545 processing Methods 0.000 claims description 10
- 239000011248 coating agent Substances 0.000 claims description 9
- 238000000576 coating method Methods 0.000 claims description 9
- 239000000463 material Substances 0.000 abstract description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 6
- 238000007598 dipping method Methods 0.000 abstract 1
- 239000002985 plastic film Substances 0.000 abstract 1
- 239000012047 saturated solution Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 description 17
- 239000002585 base Substances 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000007654 immersion Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical class [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical group [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000000635 electron micrograph Methods 0.000 description 2
- 238000010828 elution Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000009738 saturating Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000005361 soda-lime glass Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 239000002313 adhesive film Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- LRCFXGAMWKDGLA-UHFFFAOYSA-N dioxosilane;hydrate Chemical compound O.O=[Si]=O LRCFXGAMWKDGLA-UHFFFAOYSA-N 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000001493 electron microscopy Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000000113 methacrylic resin Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/548—Amorphous silicon PV cells
Landscapes
- Other Surface Treatments For Metallic Materials (AREA)
- Photovoltaic Devices (AREA)
- Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
- Glass Melting And Manufacturing (AREA)
- Surface Treatment Of Glass (AREA)
- Chemically Coating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59031139A JPS60176947A (ja) | 1984-02-21 | 1984-02-21 | 酸化珪素被膜の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59031139A JPS60176947A (ja) | 1984-02-21 | 1984-02-21 | 酸化珪素被膜の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60176947A true JPS60176947A (ja) | 1985-09-11 |
| JPH0413301B2 JPH0413301B2 (enrdf_load_stackoverflow) | 1992-03-09 |
Family
ID=12323103
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59031139A Granted JPS60176947A (ja) | 1984-02-21 | 1984-02-21 | 酸化珪素被膜の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60176947A (enrdf_load_stackoverflow) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5114760A (en) * | 1989-04-01 | 1992-05-19 | Nippon Sheet Glass Co., Ltd. | Method for manufacturing layer-built material with silicon dioxide film containing organic colorant and the layer-built material manufactured thereby |
| US5232781A (en) * | 1989-04-01 | 1993-08-03 | Nippon Sheet Glass Co., Ltd. | Method for manufacturing layer-built material with silicon dioxide film containing organic colorant and the layer-built material manufactured thereby |
| US5326720A (en) * | 1990-10-25 | 1994-07-05 | Nippon Sheet Glass Co., Ltd. | Method for producing silicon dioxide film which prevents escape of Si component to the environment |
| JP2005500702A (ja) * | 2001-08-23 | 2005-01-06 | パシフィック ソーラー ピー ティ ワイ リミテッド | ガラスビーズのコーティング方法 |
| JP2009515328A (ja) * | 2005-11-04 | 2009-04-09 | インターナショナル・ビジネス・マシーンズ・コーポレーション | ゲートに近接したコンタクト・ホールを有する半導体トランジスタ |
| JP2016528149A (ja) * | 2013-07-29 | 2016-09-15 | エージェンシー フォー サイエンス，テクノロジー アンド リサーチ | 超親水性コーティング |
-
1984
- 1984-02-21 JP JP59031139A patent/JPS60176947A/ja active Granted
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5114760A (en) * | 1989-04-01 | 1992-05-19 | Nippon Sheet Glass Co., Ltd. | Method for manufacturing layer-built material with silicon dioxide film containing organic colorant and the layer-built material manufactured thereby |
| US5232781A (en) * | 1989-04-01 | 1993-08-03 | Nippon Sheet Glass Co., Ltd. | Method for manufacturing layer-built material with silicon dioxide film containing organic colorant and the layer-built material manufactured thereby |
| US5326720A (en) * | 1990-10-25 | 1994-07-05 | Nippon Sheet Glass Co., Ltd. | Method for producing silicon dioxide film which prevents escape of Si component to the environment |
| JP2005500702A (ja) * | 2001-08-23 | 2005-01-06 | パシフィック ソーラー ピー ティ ワイ リミテッド | ガラスビーズのコーティング方法 |
| JP2009515328A (ja) * | 2005-11-04 | 2009-04-09 | インターナショナル・ビジネス・マシーンズ・コーポレーション | ゲートに近接したコンタクト・ホールを有する半導体トランジスタ |
| US7985643B2 (en) | 2005-11-04 | 2011-07-26 | International Business Machines Corporation | Semiconductor transistors with contact holes close to gates |
| JP2016528149A (ja) * | 2013-07-29 | 2016-09-15 | エージェンシー フォー サイエンス，テクノロジー アンド リサーチ | 超親水性コーティング |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0413301B2 (enrdf_load_stackoverflow) | 1992-03-09 |
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