JPS60175465A - 太陽電池基板 - Google Patents

太陽電池基板

Info

Publication number
JPS60175465A
JPS60175465A JP59031140A JP3114084A JPS60175465A JP S60175465 A JPS60175465 A JP S60175465A JP 59031140 A JP59031140 A JP 59031140A JP 3114084 A JP3114084 A JP 3114084A JP S60175465 A JPS60175465 A JP S60175465A
Authority
JP
Japan
Prior art keywords
silicon oxide
substrate
solar cell
oxide film
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59031140A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0438147B2 (enrdf_load_stackoverflow
Inventor
Hirotsugu Nagayama
永山　裕嗣
Masato Hyodo
正人 兵藤
Masao Misonoo
雅郎 御園生
Hisao Honda
本多　久男
Hideo Kawahara
秀夫 河原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Sheet Glass Co Ltd
Original Assignee
Nippon Sheet Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Sheet Glass Co Ltd filed Critical Nippon Sheet Glass Co Ltd
Priority to JP59031140A priority Critical patent/JPS60175465A/ja
Publication of JPS60175465A publication Critical patent/JPS60175465A/ja
Publication of JPH0438147B2 publication Critical patent/JPH0438147B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/70—Surface textures, e.g. pyramid structures
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Surface Treatment Of Glass (AREA)
  • Photovoltaic Devices (AREA)
JP59031140A 1984-02-21 1984-02-21 太陽電池基板 Granted JPS60175465A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59031140A JPS60175465A (ja) 1984-02-21 1984-02-21 太陽電池基板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59031140A JPS60175465A (ja) 1984-02-21 1984-02-21 太陽電池基板

Publications (2)

Publication Number Publication Date
JPS60175465A true JPS60175465A (ja) 1985-09-09
JPH0438147B2 JPH0438147B2 (enrdf_load_stackoverflow) 1992-06-23

Family

ID=12323130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59031140A Granted JPS60175465A (ja) 1984-02-21 1984-02-21 太陽電池基板

Country Status (1)

Country Link
JP (1) JPS60175465A (enrdf_load_stackoverflow)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6245079A (ja) * 1985-08-22 1987-02-27 Kanegafuchi Chem Ind Co Ltd 太陽電池用基板およびその製法
US4732621A (en) * 1985-06-17 1988-03-22 Sanyo Electric Co., Ltd. Method for producing a transparent conductive oxide layer and a photovoltaic device including such a layer
JPH01219043A (ja) * 1988-02-26 1989-09-01 Nippon Sheet Glass Co Ltd 透明電導ガラス基板及び太陽電池モジュール
JPH0650359U (ja) * 1992-11-30 1994-07-08 日本特殊陶業株式会社 半導体パッケージ端子修正治具
JP2002237610A (ja) * 2001-02-08 2002-08-23 Nippon Sheet Glass Co Ltd 光電変換装置およびその製造方法
US6504139B1 (en) 1999-05-28 2003-01-07 Nippon Sheet Glass Co., Ltd. Substrate for photoelectric conversion device, method of manufacturing the same, and photoelectric conversion device using the same
WO2003017377A1 (en) * 2001-08-10 2003-02-27 Nippon Sheet Glass Company, Limited Glass plate having electroconductive film formed thereon
WO2010050189A1 (ja) 2008-10-29 2010-05-06 株式会社アルバック 太陽電池の製造方法、エッチング装置及びｃｖｄ装置

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4732621A (en) * 1985-06-17 1988-03-22 Sanyo Electric Co., Ltd. Method for producing a transparent conductive oxide layer and a photovoltaic device including such a layer
JPS6245079A (ja) * 1985-08-22 1987-02-27 Kanegafuchi Chem Ind Co Ltd 太陽電池用基板およびその製法
JPH01219043A (ja) * 1988-02-26 1989-09-01 Nippon Sheet Glass Co Ltd 透明電導ガラス基板及び太陽電池モジュール
JPH0650359U (ja) * 1992-11-30 1994-07-08 日本特殊陶業株式会社 半導体パッケージ端子修正治具
US6504139B1 (en) 1999-05-28 2003-01-07 Nippon Sheet Glass Co., Ltd. Substrate for photoelectric conversion device, method of manufacturing the same, and photoelectric conversion device using the same
JP2002237610A (ja) * 2001-02-08 2002-08-23 Nippon Sheet Glass Co Ltd 光電変換装置およびその製造方法
WO2003017377A1 (en) * 2001-08-10 2003-02-27 Nippon Sheet Glass Company, Limited Glass plate having electroconductive film formed thereon
WO2010050189A1 (ja) 2008-10-29 2010-05-06 株式会社アルバック 太陽電池の製造方法、エッチング装置及びｃｖｄ装置
US8420436B2 (en) 2008-10-29 2013-04-16 Ulvac, Inc. Method for manufacturing solar cell, etching device, and CVD device

Also Published As

Publication number Publication date
JPH0438147B2 (enrdf_load_stackoverflow) 1992-06-23

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term