JPS60170869U - ウエハカウンタ - Google Patents

ウエハカウンタ

Info

Publication number
JPS60170869U
JPS60170869U JP5651984U JP5651984U JPS60170869U JP S60170869 U JPS60170869 U JP S60170869U JP 5651984 U JP5651984 U JP 5651984U JP 5651984 U JP5651984 U JP 5651984U JP S60170869 U JPS60170869 U JP S60170869U
Authority
JP
Japan
Prior art keywords
wafer
wafer storage
wafer counter
members
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5651984U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0124669Y2 (enrdf_load_stackoverflow
Inventor
若旅　易
Original Assignee
東京エレクトロン相模株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東京エレクトロン相模株式会社 filed Critical 東京エレクトロン相模株式会社
Priority to JP5651984U priority Critical patent/JPS60170869U/ja
Publication of JPS60170869U publication Critical patent/JPS60170869U/ja
Application granted granted Critical
Publication of JPH0124669Y2 publication Critical patent/JPH0124669Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging For Recording Disks (AREA)
  • Warehouses Or Storage Devices (AREA)
JP5651984U 1984-04-17 1984-04-17 ウエハカウンタ Granted JPS60170869U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5651984U JPS60170869U (ja) 1984-04-17 1984-04-17 ウエハカウンタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5651984U JPS60170869U (ja) 1984-04-17 1984-04-17 ウエハカウンタ

Publications (2)

Publication Number Publication Date
JPS60170869U true JPS60170869U (ja) 1985-11-12
JPH0124669Y2 JPH0124669Y2 (enrdf_load_stackoverflow) 1989-07-26

Family

ID=30580189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5651984U Granted JPS60170869U (ja) 1984-04-17 1984-04-17 ウエハカウンタ

Country Status (1)

Country Link
JP (1) JPS60170869U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6313344A (ja) * 1986-07-03 1988-01-20 Teru Saamuko Kk ウェハカウンタ及びウェハカウント方法
JPS64743A (en) * 1987-02-13 1989-01-05 Tokyo Electron Ltd Counter for wafer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6313344A (ja) * 1986-07-03 1988-01-20 Teru Saamuko Kk ウェハカウンタ及びウェハカウント方法
JPS64743A (en) * 1987-02-13 1989-01-05 Tokyo Electron Ltd Counter for wafer

Also Published As

Publication number Publication date
JPH0124669Y2 (enrdf_load_stackoverflow) 1989-07-26

Similar Documents

Publication Publication Date Title
JPS60170869U (ja) ウエハカウンタ
JPS60174388U (ja) スピ−カ用キヤビネツト
JPS58129844U (ja) 家具
JPS60150229U (ja) 屋根板の連結装置
JPS58159946U (ja) 仕切を傾斜させた書棚
JPS5921209U (ja) 時計バンド
JPS5981027U (ja) 収納用カセツト
JPS58158478U (ja) 棚板構成体
JPS607168U (ja) 端子台
JPS59157646U (ja) まないた
JPS6099032U (ja) 箱状構造物
JPS60926U (ja) 半導体基板の収納容器
JPS5978434U (ja) 両面兼用タイル
JPS60130844U (ja) 積ブロツク
JPS60119798U (ja) リ−ドレス電子部品のテ−ピング用マガジン
JPS6121384U (ja) 浴槽装置
JPS5983447U (ja) 引き出しの構造
JPS60175397U (ja) 収納ケ−ス
JPS60152391U (ja) 写真立て
JPS60191899U (ja) 焼結機用パレツトのサイドウオ−ル
JPS5983450U (ja) 壁面への棚取付構造
JPS5993235U (ja) 組み立て家具の構造
JPS58188445U (ja) 建築用面木
JPS6075275U (ja) 収容箱
JPS60130662U (ja) レ−ザダイオ−ド用整列治具