JPS60170869U - wafer counter - Google Patents
wafer counterInfo
- Publication number
- JPS60170869U JPS60170869U JP5651984U JP5651984U JPS60170869U JP S60170869 U JPS60170869 U JP S60170869U JP 5651984 U JP5651984 U JP 5651984U JP 5651984 U JP5651984 U JP 5651984U JP S60170869 U JPS60170869 U JP S60170869U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer storage
- wafer counter
- members
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Packaging For Recording Disks (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の実施例の斜視図、第２図は第１図の■
−■線部断面図、第３図は第２図のｍ−■線部断面図、
第４図は他の実施例の要部斜視図、第５図は第４図の使
用状態を示す正面図、番６図は各センサ受光部の作動状
態を示す線図、第７図は従来のウェハカウンタの使用状
態を示す斜視図、第８図は第７図の■−■線部断面図、
第９図は第８図のＩＸ−ＩＸ線部断面図である。
１・・・センサ受発光部、２・・・ウェハ収容溝、１１
・・・ウェハ収容溝２の底面を含む面、１２・・・空間
部、３ａ・・・センサ受発光部を固着した測板、３ａ′
・・・３ａに対応する側板、３ｂ・・・上下動可能な平
板。Fig. 1 is a perspective view of an embodiment of the present invention, and Fig. 2 is a perspective view of the embodiment of the present invention.
3 is a sectional view of the line m-■ in Figure 2,
Fig. 4 is a perspective view of the main parts of another embodiment, Fig. 5 is a front view showing the usage state of Fig. 4, Fig. 6 is a diagram showing the operating state of each sensor light receiving section, and Fig. 7 is a conventional FIG. 8 is a sectional view taken along the line ■-■ in FIG. 7.
FIG. 9 is a sectional view taken along the line IX--IX in FIG. 8. DESCRIPTION OF SYMBOLS 1...Sensor receiving/emitting part, 2...Wafer accommodation groove, 11
. . . A surface including the bottom surface of the wafer storage groove 2, 12 . . . Space portion, 3a .
...Side plate corresponding to 3a, 3b...Flat plate that can be moved up and down.
Claims (1)
、該センサ受発光部１を挾んで両側に互に対応するウェ
ハ収容溝２を有する部材を並設するとともに、該ウェハ
収容溝２の底面１１を含む面とセンサ受発光部１の頭部
との間に空間部１２を設けたことを特徴とするウェハカ
ウンタ。 ２ ウェハ収容溝を有する部材が互に対抗する一対の可
動側板３ ａ、 ３ａ’であることを特徴とする実用
新案登録請求の範囲第１項記載のウェハカウンタ。 ３ ウェハ収容溝２を有する部材が上下動が可能な平板
３ｂであることを特徴とする実用新案登録請求の範囲第
１項記載のウェハカウンタ。[Claims for Utility Model Registration] 1. A plurality of sensor receiving and emitting sections 1 are arranged in a line at regular intervals, and members having mutually corresponding wafer storage grooves 2 on both sides of the sensor receiving and emitting sections 1 are lined up. A wafer counter characterized in that a space 12 is provided between the surface including the bottom surface 11 of the wafer storage groove 2 and the head of the sensor light emitting/receiving section 1. 2. The wafer counter according to claim 1, wherein the members having wafer storage grooves are a pair of movable side plates 3a, 3a' facing each other. 3. The wafer counter according to claim 1, wherein the member having the wafer storage groove 2 is a flat plate 3b that is movable up and down.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5651984U JPS60170869U (en) | 1984-04-17 | 1984-04-17 | wafer counter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5651984U JPS60170869U (en) | 1984-04-17 | 1984-04-17 | wafer counter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60170869U true JPS60170869U (en) | 1985-11-12 |
| JPH0124669Y2 JPH0124669Y2 (en) | 1989-07-26 |
Family
ID=30580189
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5651984U Granted JPS60170869U (en) | 1984-04-17 | 1984-04-17 | wafer counter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60170869U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6313344A (en) * | 1986-07-03 | 1988-01-20 | Teru Saamuko Kk | Wafer counter |
| JPS64743A (en) * | 1987-02-13 | 1989-01-05 | Tokyo Electron Ltd | Counter for wafer |
-
1984
- 1984-04-17 JP JP5651984U patent/JPS60170869U/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6313344A (en) * | 1986-07-03 | 1988-01-20 | Teru Saamuko Kk | Wafer counter |
| JPS64743A (en) * | 1987-02-13 | 1989-01-05 | Tokyo Electron Ltd | Counter for wafer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0124669Y2 (en) | 1989-07-26 |
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