JPS60169842U - Semiconductor manufacturing jig - Google Patents
Semiconductor manufacturing jigInfo
- Publication number
- JPS60169842U JPS60169842U JP5809384U JP5809384U JPS60169842U JP S60169842 U JPS60169842 U JP S60169842U JP 5809384 U JP5809384 U JP 5809384U JP 5809384 U JP5809384 U JP 5809384U JP S60169842 U JPS60169842 U JP S60169842U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor manufacturing
- manufacturing jig
- jig
- recognition symbol
- abstract
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例を示す斜視図、第２図は第１
図の治具の要部拡大正面図、第３図は第２図のＡ−Ａ線
に沿う断面図、第４図は本考案の他の実施例を説明する
ための治具要部断面図、第５図及び第６図は従来の半導
体ウェーハ製造治具の平面図及び正面図、第７図は第５
図のＢ−Ｂ線に沿う断面図である。
５・・・半導体ウェーハ、６・・・治具、１０・・・記
号〔バーコード〕。Fig. 1 is a perspective view showing one embodiment of the present invention, and Fig. 2 is a perspective view showing an embodiment of the present invention.
FIG. 3 is a sectional view taken along the line A-A in FIG. 2, and FIG. 4 is a sectional view of the main part of the jig for explaining another embodiment of the present invention. , FIGS. 5 and 6 are a plan view and a front view of a conventional semiconductor wafer manufacturing jig, and FIG.
FIG. 3 is a sectional view taken along line BB in the figure. 5... Semiconductor wafer, 6... Jig, 10... Symbol [barcode].
Claims (2)
て、外面に部分的に光学的な読み取りが行える治具認識
用記号を形成したことを特徴とする半導体製造治具。(1) A semiconductor manufacturing jig for arranging and storing a plurality of semiconductor wafers, characterized in that a jig recognition symbol that can be read optically is partially formed on the outer surface.
案登録請求の範囲第１項記載の半導体製造治具。(2) The semiconductor manufacturing jig according to claim 1, wherein the jig recognition symbol is a bar code.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5809384U JPS60169842U (en) | 1984-04-19 | 1984-04-19 | Semiconductor manufacturing jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5809384U JPS60169842U (en) | 1984-04-19 | 1984-04-19 | Semiconductor manufacturing jig |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60169842U true JPS60169842U (en) | 1985-11-11 |
Family
ID=30583263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5809384U Pending JPS60169842U (en) | 1984-04-19 | 1984-04-19 | Semiconductor manufacturing jig |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60169842U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58161340A (en) * | 1982-03-19 | 1983-09-24 | Hitachi Ltd | Receiving and delivering system of product |
-
1984
- 1984-04-19 JP JP5809384U patent/JPS60169842U/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58161340A (en) * | 1982-03-19 | 1983-09-24 | Hitachi Ltd | Receiving and delivering system of product |
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