JPS5996828U - wafer jacket - Google Patents

wafer jacket

Info

Publication number
JPS5996828U
JPS5996828U JP19350382U JP19350382U JPS5996828U JP S5996828 U JPS5996828 U JP S5996828U JP 19350382 U JP19350382 U JP 19350382U JP 19350382 U JP19350382 U JP 19350382U JP S5996828 U JPS5996828 U JP S5996828U
Authority
JP
Japan
Prior art keywords
wafer
jacket
semiconductor wafer
wafer jacket
accommodates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19350382U
Other languages
Japanese (ja)
Inventor
稲田　義一
Original Assignee
日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気株式会社 filed Critical 日本電気株式会社
Priority to JP19350382U priority Critical patent/JPS5996828U/en
Publication of JPS5996828U publication Critical patent/JPS5996828U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案実施例のウェハジャケットの平面図、第
２図はその側面図である。 なお図において、１・・・・・・半導体ウェハ、２・・
・・・・ウェハジャケット、３・・・・・・情報機能部
、である。FIG. 1 is a plan view of a wafer jacket according to an embodiment of the present invention, and FIG. 2 is a side view thereof. In the figure, 1...semiconductor wafer, 2...
... wafer jacket, 3 ... information function section.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 半導体ウェハを１枚収容するとともにその外周部に該半
導体ウェハの個有情報を読み書き可能な情報機能部を具
備したことを特徴とするウェハジャケット。A wafer jacket that accommodates one semiconductor wafer and is equipped with an information function section on its outer periphery that can read and write unique information of the semiconductor wafer.
JP19350382U 1982-12-21 1982-12-21 wafer jacket Pending JPS5996828U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19350382U JPS5996828U (en) 1982-12-21 1982-12-21 wafer jacket

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19350382U JPS5996828U (en) 1982-12-21 1982-12-21 wafer jacket

Publications (1)

Publication Number Publication Date
JPS5996828U true JPS5996828U (en) 1984-06-30

Family

ID=30416170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19350382U Pending JPS5996828U (en) 1982-12-21 1982-12-21 wafer jacket

Country Status (1)

Country Link
JP (1) JPS5996828U (en)

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