JPS60169145A - 基板位置決め装置 - Google Patents

基板位置決め装置

Info

Publication number
JPS60169145A
JPS60169145A JP59024676A JP2467684A JPS60169145A JP S60169145 A JPS60169145 A JP S60169145A JP 59024676 A JP59024676 A JP 59024676A JP 2467684 A JP2467684 A JP 2467684A JP S60169145 A JPS60169145 A JP S60169145A
Authority
JP
Japan
Prior art keywords
stoppers
stopper
substrate
substrates
moved
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59024676A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0236065B2 (enExample
Inventor
Takeshi Kimoto
木本　武
Eiji Sato
英治 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinkawa Ltd
Original Assignee
Shinkawa Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinkawa Ltd filed Critical Shinkawa Ltd
Priority to JP59024676A priority Critical patent/JPS60169145A/ja
Publication of JPS60169145A publication Critical patent/JPS60169145A/ja
Publication of JPH0236065B2 publication Critical patent/JPH0236065B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W99/00—Subject matter not provided for in other groups of this subclass

Landscapes

  • Wire Bonding (AREA)
  • Die Bonding (AREA)
JP59024676A 1984-02-13 1984-02-13 基板位置決め装置 Granted JPS60169145A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59024676A JPS60169145A (ja) 1984-02-13 1984-02-13 基板位置決め装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59024676A JPS60169145A (ja) 1984-02-13 1984-02-13 基板位置決め装置

Publications (2)

Publication Number Publication Date
JPS60169145A true JPS60169145A (ja) 1985-09-02
JPH0236065B2 JPH0236065B2 (enExample) 1990-08-15

Family

ID=12144741

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59024676A Granted JPS60169145A (ja) 1984-02-13 1984-02-13 基板位置決め装置

Country Status (1)

Country Link
JP (1) JPS60169145A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0375556U (enExample) * 1989-11-24 1991-07-29

Also Published As

Publication number Publication date
JPH0236065B2 (enExample) 1990-08-15

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