JPS60167248A - 電子顕微鏡 - Google Patents

電子顕微鏡

Info

Publication number
JPS60167248A
JPS60167248A JP59021978A JP2197884A JPS60167248A JP S60167248 A JPS60167248 A JP S60167248A JP 59021978 A JP59021978 A JP 59021978A JP 2197884 A JP2197884 A JP 2197884A JP S60167248 A JPS60167248 A JP S60167248A
Authority
JP
Japan
Prior art keywords
electron beam
optical axis
current
output
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59021978A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0339378B2 (enrdf_load_stackoverflow
Inventor
Hideo Shiragami
白神　日出夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP59021978A priority Critical patent/JPS60167248A/ja
Publication of JPS60167248A publication Critical patent/JPS60167248A/ja
Publication of JPH0339378B2 publication Critical patent/JPH0339378B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP59021978A 1984-02-10 1984-02-10 電子顕微鏡 Granted JPS60167248A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59021978A JPS60167248A (ja) 1984-02-10 1984-02-10 電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59021978A JPS60167248A (ja) 1984-02-10 1984-02-10 電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS60167248A true JPS60167248A (ja) 1985-08-30
JPH0339378B2 JPH0339378B2 (enrdf_load_stackoverflow) 1991-06-13

Family

ID=12070110

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59021978A Granted JPS60167248A (ja) 1984-02-10 1984-02-10 電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS60167248A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3217419A1 (en) 2016-03-08 2017-09-13 Jeol Ltd. Beam alignment method and electron microscope
JP2022037922A (ja) * 2020-08-25 2022-03-09 エフ イー アイ カンパニ 位相差イメージングおよび電子エネルギー損失分光法を同時に行うためのシステムおよび方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5853361U (ja) * 1982-05-20 1983-04-11 日本電子株式会社 電子顕微鏡又は類似装置
JPS58106746A (ja) * 1981-12-17 1983-06-25 Fujitsu Ltd 電子レンズの軸合せ方法
JPS58167987A (ja) * 1982-03-29 1983-10-04 Toshiba Corp 粒子ビ−ム位置検出装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58106746A (ja) * 1981-12-17 1983-06-25 Fujitsu Ltd 電子レンズの軸合せ方法
JPS58167987A (ja) * 1982-03-29 1983-10-04 Toshiba Corp 粒子ビ−ム位置検出装置
JPS5853361U (ja) * 1982-05-20 1983-04-11 日本電子株式会社 電子顕微鏡又は類似装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3217419A1 (en) 2016-03-08 2017-09-13 Jeol Ltd. Beam alignment method and electron microscope
US10020162B2 (en) 2016-03-08 2018-07-10 Jeol Ltd. Beam alignment method and electron microscope
JP2022037922A (ja) * 2020-08-25 2022-03-09 エフ イー アイ カンパニ 位相差イメージングおよび電子エネルギー損失分光法を同時に行うためのシステムおよび方法
EP3965137A1 (en) * 2020-08-25 2022-03-09 FEI Company System and method for simultaneous phase contrast imaging and electron energy-loss spectroscopy

Also Published As

Publication number Publication date
JPH0339378B2 (enrdf_load_stackoverflow) 1991-06-13

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term