JPS60166262A - Surface activation treatment of alumina ceramics - Google Patents

Surface activation treatment of alumina ceramics

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Publication number
JPS60166262A
JPS60166262A JP59021276A JP2127684A JPS60166262A JP S60166262 A JPS60166262 A JP S60166262A JP 59021276 A JP59021276 A JP 59021276A JP 2127684 A JP2127684 A JP 2127684A JP S60166262 A JPS60166262 A JP S60166262A
Authority
JP
Japan
Prior art keywords
alumina ceramics
alumina
ceramics
plating
activation treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59021276A
Other languages
Japanese (ja)
Other versions
JPS6410476B2 (en
Inventor
弘 和田
三森 誠司
堀部 芳幸
秀次 桑島
上山 守
隆男 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonac Corp
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP59021276A priority Critical patent/JPS60166262A/en
Publication of JPS60166262A publication Critical patent/JPS60166262A/en
Publication of JPS6410476B2 publication Critical patent/JPS6410476B2/ja
Granted legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 (発明の属する技術分野) 本発明はアルミナセラミックスの表面活性化処理法に関
する。
DETAILED DESCRIPTION OF THE INVENTION (Technical field to which the invention pertains) The present invention relates to a surface activation treatment method for alumina ceramics.

(発明の技術的背景とその問題点) 最近の工業材料は種々の機能性が要求され、セラミック
スの分野においてセラミックスの表面を活性化して印刷
性や接着性を高め金属層やガラス組成物を直接強固に接
着する方法が強く要求され。
(Technical background of the invention and its problems) Modern industrial materials are required to have various functionalities, and in the field of ceramics, the surface of ceramics is activated to improve printability and adhesion, and metal layers and glass compositions are directly attached. There is a strong demand for a method for strongly adhering.

米国特許ス667.424号、同3,180,756号
等、数多くの方法が発明されている。このような方法と
しては1例えば同時焼成法、厚膜印刷焼成法、直接金属
メッキ法等がある。同時焼成法は特開昭54−4945
3号公報に示す如く未焼成のシート上に金属ペーストを
印刷等でもうけシートと金属ペーストとを同時に焼成す
る方法であり。
Many methods have been invented, such as US Pat. No. 667.424 and US Pat. No. 3,180,756. Examples of such methods include a simultaneous firing method, a thick film printing and firing method, and a direct metal plating method. The simultaneous firing method is disclosed in Japanese Patent Application Laid-open No. 54-4945.
As shown in Publication No. 3, this is a method in which a metal paste is printed on an unfired sheet and the sheet and the metal paste are fired simultaneously.

接着力はセラミックスの凝集破壊強さにまで達し約10
〜12Kpf/■2を示すが、工程が複雑であシ応用範
囲が限定されることおよび高価であることから、高い信
頼性の要求される分野へ適用されている。セラミックス
表面に金属粉を含有したガラスペーストを印刷し焼付け
る厚膜印刷焼成法はガラスが介在するため耐熱性に劣り
熱伝導、接着強さの信頼性等に問題がある。このため工
程を簡略化し、高い熱伝導性を得る他の方法として特開
昭58−79842号公報に示される直接メッキ法が考
えられている。この方法は焼結したセラミックスの表面
をエツチングして粗化するか或はそのままの状態でメッ
キシーダー処理を施しセラミックスの表面にメッキ活性
を賦与し直接メッキする方法であるが、この方法で行な
うと接着力が小さく信頼性に劣るなどの問題がある。
Adhesion strength reaches the cohesive failure strength of ceramics, approximately 10
-12 Kpf/2, but because the process is complicated, the scope of application is limited, and it is expensive, it is applied to fields that require high reliability. The thick film printing and firing method, in which glass paste containing metal powder is printed and baked on the surface of ceramics, has poor heat resistance due to the presence of glass, and has problems with reliability of heat conduction, adhesive strength, etc. Therefore, as another method for simplifying the process and obtaining high thermal conductivity, a direct plating method disclosed in Japanese Patent Application Laid-open No. 79842/1984 has been considered. In this method, the surface of sintered ceramics is etched to make it rough, or the surface of the sintered ceramic is subjected to plating cedar treatment to impart plating activity to the surface of the ceramic, and then directly plated. There are problems such as low adhesive strength and poor reliability.

一般に高アルミナセラミックスの表面はα−アルミナ粒
子が露出した状態になって訃り粒界はガラス質及び第二
結晶相で埋められている。従って焼成後の面は平滑であ
シメツキシーダーを施してもほとんどアルミナセラミッ
クスの表面に付着しないためメッキはほとんど析出しな
い。このため弗酸などを用いて表面を粗化することが従
来から行なわれているが、このような方法でエツチング
した粗化面は単に粒界のガラス層又は粒界のガラス層と
第二結晶相とがエツチングされるだけであるため、α−
アルミナ粒子のエツチングは起こらず粗化面は非常に粗
大でα−アルミナ粒子の脱粒による粗大な凹凸面が形成
される。このためメッキシーダーはこれらのα−アルミ
ナ粒子の粗大な凹凸に付着するがメッキ後の接着力は小
さい。また別の粗化方法として水酸化ナトリウムなどを
用いたアルカリ溶融処理によるアルミナセラミックスの
表面粗化法がある。この方法は水酸化ナトリウムを溶融
温度以上に加熱して融解液とし、この融解液にアルミナ
セラミックスを浸漬してエツチングしその後水洗するこ
とで清浄な表面粗化面を得る方法である。この方法では
、アルミナセラミックスの表面層のアルミナ、ガラス質
、第二結晶相等が溶融塩となって融解液の中に溶出する
ことで表面粗化が進行するものである。このためアルミ
ナセラミックス表面ではアルミナ及びガラス質又はアル
ミナ、ガラス質及び第二結晶相のエツチングによる溶出
と粗化が同時に進むため比較的緻密な粗化面が得られる
。しかし表面には単純な粗化面が形成されているだけの
ため充分な活性表面とはなりがたく、このためバラジュ
ームなどでメッキ活性化処理を行なって無電解メッキ法
でメッキ金属を析出させてもメッキ金属層の接着強さは
通常0.5〜1.5 Kff /mm2程度の値しか得
られない。
Generally, on the surface of high alumina ceramics, α-alumina particles are exposed, and the grain boundaries are filled with glassy and secondary crystal phases. Therefore, the surface after firing is smooth, and even if Shimetuki Seeder is applied, it hardly adheres to the surface of the alumina ceramics, so almost no plating is deposited. For this reason, it has conventionally been done to roughen the surface using hydrofluoric acid, etc., but the roughened surface etched by this method is simply the glass layer at the grain boundaries or the glass layer at the grain boundaries and the second crystal. α−
Etching of the alumina particles does not occur, and the roughened surface is extremely coarse, resulting in the formation of a coarsely uneven surface due to shedding of the α-alumina particles. Therefore, the plating seeder adheres to the coarse irregularities of these α-alumina particles, but the adhesive force after plating is small. Another roughening method is a method for roughening the surface of alumina ceramics by alkali melting treatment using sodium hydroxide or the like. In this method, sodium hydroxide is heated to a temperature higher than its melting temperature to form a molten liquid, and alumina ceramics are immersed in the molten liquid for etching, followed by washing with water to obtain a clean roughened surface. In this method, surface roughening progresses as alumina, glass, second crystal phase, etc. in the surface layer of alumina ceramics become molten salts and are eluted into the molten liquid. For this reason, on the alumina ceramic surface, elution of alumina and glass or alumina, glass and the second crystalline phase by etching and roughening proceed simultaneously, resulting in a relatively dense roughened surface. However, since the surface only has a simple roughened surface, it is difficult to obtain a sufficiently active surface. Therefore, plating activation treatment is performed with baladium, etc., and the plating metal is deposited by electroless plating. However, the adhesive strength of the plated metal layer is usually only about 0.5 to 1.5 Kff/mm2.

(発明の目的) 本発明の目的は上記した従来技術の欠点を除き。(Purpose of the invention) The object of the present invention is to eliminate the drawbacks of the prior art mentioned above.

金属層やガラス組成物を強固に接着するためのアルミナ
セラミックスの表面活性化処理法を提供するものである
The present invention provides a surface activation treatment method for alumina ceramics for firmly adhering metal layers and glass compositions.

(問題点を解決するための手段) 本発明者らは上記の欠点について種々検討したところ、
アルミナセラミックスの第二結晶相が微粒で比表面積が
非常に大きく、メッキシーダーの均一処理に適している
ことに着目し、アルミナセラミックスの表面をエツチン
グによシ粗化した後。
(Means for Solving the Problems) The present inventors conducted various studies regarding the above-mentioned drawbacks, and found that
After paying attention to the fact that the second crystalline phase of alumina ceramics is fine grained and has a very large specific surface area, making it suitable for uniform treatment with plating seeders, the surface of alumina ceramics was roughened by etching.

表面粗化面にアルミナセラミックスの第二結晶相を形成
させることによって金属層やガラス組成物をアルミナセ
ラミックスに強固に接着することができた。
By forming a second crystalline phase of the alumina ceramics on the roughened surface, it was possible to firmly adhere the metal layer and the glass composition to the alumina ceramics.

(発明の構成) 本発明はアルミナセラミックスの表面をエツチングして
粗化させる工程とこの表面粗化面にアルミナセラミック
スの第二結晶相を形成させる工程とからなるアルミナセ
ラミックスの表面活性化処理法に関する。
(Structure of the Invention) The present invention relates to a surface activation treatment method for alumina ceramics, which comprises the steps of etching and roughening the surface of alumina ceramics and forming a second crystalline phase of alumina ceramics on the roughened surface. .

本発明のアルミナセラミックスの第二結晶相は一般には
Anorthite (CaO・Al2O5・2SiO
z)+Calcium hexaluminate (
CaO@6AI!z03)。
The second crystalline phase of the alumina ceramics of the present invention is generally anorthite (CaO・Al2O5・2SiO
z)+Calcium hexaluminate (
CaO@6AI! z03).

Gehlenite (2Ca O・Al*Os ・5
in2) 、Mullite(3A/20g ・28i
0z)、 5pinel (MgO・AI!203)等
である。本発明においてはこれらを総称して用いられる
第1結晶相をいう。
Gehlenite (2Ca O・Al*Os ・5
in2), Mullite (3A/20g ・28i
0z), 5pinel (MgO・AI!203), etc. In the present invention, these are collectively referred to as the first crystal phase.

アルミナセラミックスの表面をエツチングして粗化する
方法としては9本発明では水酸化ナト’J −ラム、水
酸化カリウム、オルソ硅酸ナトリウム等のアルカリ水溶
液中で煮沸する表面粗化法が好ましい。表面粗化した後
焼成することにより第二結晶相が表面に形成される。
In the present invention, as a method for etching and roughening the surface of alumina ceramics, a surface roughening method in which the surface is boiled in an alkaline aqueous solution of sodium hydroxide, potassium hydroxide, sodium orthosilicate, etc. is preferred. By firing after surface roughening, a second crystal phase is formed on the surface.

(実施例) 以下実施例により本発明を説明する。(Example) The present invention will be explained below with reference to Examples.

容31200 mlのニッケルルツボに水酸化すl−I
Jウム50チ水溶液を100m1!入れ95±5℃に加
温した。次にこの溶液中に40X40X厚さ1.O胴の
寸法に成形した純度96チのアルミナセラミックスを入
れ10分間静かに煮沸した。その後アルミナセラミック
スをアルミナ質耐火物の七ツター上に並べ焼成した。焼
成条件は500℃まで1時間で昇温し、500℃で1時
間保持後冷却した。
Hydroxide l-I in a nickel crucible with a capacity of 31,200 ml.
100ml of Jum 50chi aqueous solution! and heated to 95±5°C. Then add 40X40X thickness 1. Alumina ceramics with a purity of 96 cm, which had been molded to the size of an O-shaped body, was placed and gently boiled for 10 minutes. After that, the alumina ceramics were placed on top of the alumina refractory and fired. The firing conditions were that the temperature was raised to 500°C over 1 hour, held at 500°C for 1 hour, and then cooled.

冷却後表面を水洗し次いで乾燥した。After cooling, the surface was washed with water and then dried.

次にこのアルミナセラミックスの表面に従来公公知の方
法によシ感受性化処理、活性化処理を行なった後N1メ
ッキを施した。その後熱処理を行ない半田付けして接着
力を測定した。接着力は4.0〜5.0 Kg f 7
m2であった。
Next, the surface of this alumina ceramic was subjected to sensitization treatment and activation treatment by conventionally known methods, and then N1 plating was applied. After that, heat treatment was performed, soldering was performed, and adhesive strength was measured. Adhesive strength is 4.0-5.0 Kg f7
It was m2.

(比較例) 一方ニッケルルツボに水酸化ナトリウムを入れバーナー
で加熱して水酸化ナトリウムを融解した後、その中に上
記と同寸法のアルミナセラミックスを入れアルカリ溶融
を行なった。次に感受性化処理、活性化処理を行なった
後Niメッキを施し接着力を測定したところ0.5〜L
 ON9 f /nun2であった。これは本発明の方
法においては水酸化ナトリウム水溶液中で煮沸中にα−
アルミナの表面の極く薄いガラス層がエツチングされ、
これが500℃昇温中及び保持中にアルミナセラミック
スの第二結晶相が形成され粗化面に強固に付着し複雑。
(Comparative Example) On the other hand, sodium hydroxide was placed in a nickel crucible and heated with a burner to melt the sodium hydroxide, and then an alumina ceramic having the same dimensions as above was placed in the crucible and alkali melting was performed. Next, after sensitization treatment and activation treatment, Ni plating was applied and the adhesive strength was measured, and it was 0.5~L
It was ON9 f /nun2. In the method of the present invention, α-
The extremely thin glass layer on the alumina surface is etched,
During heating and holding at 500°C, a second crystalline phase of alumina ceramics is formed and firmly adheres to the roughened surface, making it complicated.

かつ緻密な粗化面を形成しこれがメッキシーダーの付着
を容易にし、さらにメッキアンカーになっているものと
思われる。一方アルカリ溶融だけではアルミナセラミッ
クスの表面は粗化けされるが単純な粗面が形成されてい
るだけのため、メッキのアンカー効果が発現せず接着力
が小さいものと考えられる。
It also forms a densely roughened surface, which facilitates the adhesion of plating seeders and is thought to serve as a plating anchor. On the other hand, alkaline melting alone roughens the surface of alumina ceramics, but since only a simple rough surface is formed, the anchoring effect of plating is not expressed and the adhesive strength is considered to be low.

また従来の方法において接着力が小さいのは。Also, the adhesive strength of conventional methods is low.

従来のエツチング法では表面はエツチングされ凹凸は形
成されてもメッキシーダーは付着するが。
In the conventional etching method, the surface is etched and unevenness is formed, but the plating seeder still adheres.

引張り試験時にメッキが凹凸から抜けてしまうためであ
ると考えられる。
This is thought to be due to the plating coming off from the irregularities during the tensile test.

本発明によりすぐれた結果が得られたのはアルミナセラ
ミックスの焼成中にアルミナセラミックスの第二結晶相
が生成し、α−アルミナ粒子とモノシリツクに強固に結
合していること及びアルミナセラミックスのエツチング
で表面に緻密な凹凸が形成されたと同時にエツチングで
活性化されたα−アルミナの表面に緻密、かつ強固に接
着したアルミナセラミックの第二結晶相がアンカー効果
として接着方向上に寄与しているためである。
The reason why the excellent results of the present invention were obtained is that the second crystalline phase of the alumina ceramics is generated during firing of the alumina ceramics and is strongly bonded to the α-alumina particles in the monosilicon, and that the surface of the alumina ceramics is etched. This is because the second crystalline phase of the alumina ceramic, which adhered densely and firmly to the surface of the α-alumina activated by etching, contributed as an anchor effect in the adhesion direction. .

(発明の効果) 本発明はアルミナセラミックスの表面をエツチングして
粗化させる工程と、この表面粗化面にアルミナセラミッ
クスの第二結晶相を形成させる工程を経て、アルミナセ
ラミックスの表面活性化処理を行なうので金属層やガラ
ス組成物をアルミナセラミックスに強固に接着すること
ができる。
(Effects of the Invention) The present invention performs surface activation treatment on alumina ceramics through a process of etching and roughening the surface of alumina ceramics and a process of forming a second crystalline phase of alumina ceramics on this roughened surface. This allows the metal layer or glass composition to be firmly bonded to the alumina ceramics.

第1頁の続き 0発 明 者 上 山 守 @発明者山1)隆男 日立市東町4丁目1旙1号 日立化成工業株式会社茨城
研究所内 日立市東町4丁目1旙1号 日立化成工業株式会社茨城
研究所内
Continued from page 1 0 Inventor Mamoru Ueyama @ Inventor Yama 1) Takao Hitachi Chemical Co., Ltd. 4-1 Higashimachi, Hitachi City, Hitachi Chemical Co., Ltd., Ibaraki Laboratory, 4-1 Higashimachi, Hitachi City Inside Ibaraki Research Institute

Claims (1)

【特許請求の範囲】[Claims] 1、 アルミナセラミックスの表面をエツチングして粗
化させる工程とこの表面粗化面にアルミナセラミックス
の第二結晶相を形成させる工程とからなるアルミナセラ
ミックスの表面活性化処理法。
1. A surface activation treatment method for alumina ceramics, which comprises the steps of etching and roughening the surface of alumina ceramics and forming a second crystalline phase of alumina ceramics on this roughened surface.
JP59021276A 1984-02-07 1984-02-07 Surface activation treatment of alumina ceramics Granted JPS60166262A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59021276A JPS60166262A (en) 1984-02-07 1984-02-07 Surface activation treatment of alumina ceramics

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59021276A JPS60166262A (en) 1984-02-07 1984-02-07 Surface activation treatment of alumina ceramics

Publications (2)

Publication Number Publication Date
JPS60166262A true JPS60166262A (en) 1985-08-29
JPS6410476B2 JPS6410476B2 (en) 1989-02-21

Family

ID=12050599

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59021276A Granted JPS60166262A (en) 1984-02-07 1984-02-07 Surface activation treatment of alumina ceramics

Country Status (1)

Country Link
JP (1) JPS60166262A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62216979A (en) * 1986-03-18 1987-09-24 住友電気工業株式会社 Aluminum nitride sintered body with glass layer and manufacture
JPH02160681A (en) * 1988-12-13 1990-06-20 Fujitsu Ltd Treatment of ceramics
WO2003101608A1 (en) * 2002-06-03 2003-12-11 Chung, Kwang, Choon Stainless steel tubing/frit with sintered inorganic particle, the chromathography comprising it, and their manufacturing method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62216979A (en) * 1986-03-18 1987-09-24 住友電気工業株式会社 Aluminum nitride sintered body with glass layer and manufacture
JPH02160681A (en) * 1988-12-13 1990-06-20 Fujitsu Ltd Treatment of ceramics
WO2003101608A1 (en) * 2002-06-03 2003-12-11 Chung, Kwang, Choon Stainless steel tubing/frit with sintered inorganic particle, the chromathography comprising it, and their manufacturing method
US7132046B2 (en) 2002-06-03 2006-11-07 Won Jo Cheong Stainless steel tubing/frit with sintered inorganic particle, the chromatography comprising it, and their manufacturing method

Also Published As

Publication number Publication date
JPS6410476B2 (en) 1989-02-21

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