JPS6016536U - 半導体処理液の熱交換器 - Google Patents

半導体処理液の熱交換器

Info

Publication number
JPS6016536U
JPS6016536U JP10793083U JP10793083U JPS6016536U JP S6016536 U JPS6016536 U JP S6016536U JP 10793083 U JP10793083 U JP 10793083U JP 10793083 U JP10793083 U JP 10793083U JP S6016536 U JPS6016536 U JP S6016536U
Authority
JP
Japan
Prior art keywords
processing liquid
semiconductor processing
heat exchanger
heat exchange
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10793083U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0132362Y2 (enrdf_load_stackoverflow
Inventor
森　勇鋼
Original Assignee
小松エレクトロニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 小松エレクトロニクス株式会社 filed Critical 小松エレクトロニクス株式会社
Priority to JP10793083U priority Critical patent/JPS6016536U/ja
Publication of JPS6016536U publication Critical patent/JPS6016536U/ja
Application granted granted Critical
Publication of JPH0132362Y2 publication Critical patent/JPH0132362Y2/ja
Granted legal-status Critical Current

Links

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  • Weting (AREA)
JP10793083U 1983-07-12 1983-07-12 半導体処理液の熱交換器 Granted JPS6016536U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10793083U JPS6016536U (ja) 1983-07-12 1983-07-12 半導体処理液の熱交換器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10793083U JPS6016536U (ja) 1983-07-12 1983-07-12 半導体処理液の熱交換器

Publications (2)

Publication Number Publication Date
JPS6016536U true JPS6016536U (ja) 1985-02-04
JPH0132362Y2 JPH0132362Y2 (enrdf_load_stackoverflow) 1989-10-03

Family

ID=30252001

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10793083U Granted JPS6016536U (ja) 1983-07-12 1983-07-12 半導体処理液の熱交換器

Country Status (1)

Country Link
JP (1) JPS6016536U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0132362Y2 (enrdf_load_stackoverflow) 1989-10-03

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