JPS60161508A - Surface roughness/shape measuring apparatus - Google Patents

Abstract

PURPOSE:To make it possible to analyze the surface state of an article to be measured by one-time measurement, by recording the undulation shape of the surface of an article to be measured and roughness obtained by adding an undulation shape applied to the position thereof on the same recording paper in a superposed state. CONSTITUTION:When an article 2 to be measured is fixed and a detection apparatus 14 is moved by a motor 8, a first probe needle 17 for measuring undulation picks up undulation regardless of fine surface roughness to output the same as an electric signal from a first detector 18. At this time, because not only a second fulcrum 19 but also a second measuring lever 20 move up and down according to undulation and a first lever 16 also moves up and down, there is no relative displacement due to undulation between both levers 20, 16 and a second detector 22 outputs only a signal of fine surface roughness. The detection signals of these first and second detectors 18, 22 are inputted to terminals Y1, Y2 of a two-pen type recorder through the circuit shown by the one-dot broken line 26 and an undulation signal is amplified at low magnification while a roughness signal is amplified at high magnification while amplified signals are recorded on recording paper.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a surface roughness/shape measuring device that records a waviness curve on the surface of a measured object on a recording paper and simultaneously records a roughness curve with the waviness superimposed on the same recording paper. It is.

Conventionally, to measure and record the roughness of objects with undulations on the surface, a stylus with a large curvature surface called a skid is applied to the surface of the object to be measured, and this is used as a guide to record only minute roughness, or the detection signal is The roughness was recorded by removing the waviness component through a high-pass filter circuit. However, although this conventional method can record fine roughness, it cannot record the undulation shape at the same time, much less record the roughness by superimposing it on the undulation shape. Therefore, it is difficult to easily analyze the surface of the object to be measured.

This invention improves this point by recording the undulation shape and roughness on the same figure in one measurement, and the figure shows the roughness of the surface of the object to be measured at high magnification and the undulation shape at low magnification. It records at the same position at the same magnification. An embodiment of the present invention will be described below with reference to the drawings.

In FIG. 1, a column 3 is fixed upright on a measuring table 1, and by rotating a vertical movement handle 4, an X-direction moving device 5 attached to the column 3 is moved in the vertical direction. A reference plate 7 is horizontally provided in the X-direction moving device 5, and by rotating a screw 9 connected to a motor 8, a moving plate 11 moves on the reference plate 7 via a nut 10.
It is driven straight along the direction. A detection device 14 is connected to the movable plate 11, and therefore, the rotation of the motor 8 drives the detection device 14 in the X direction.

The detection device 14 is extended to the left, and a first probe lever 16 is rotatably supported thereon by a first fulcrum 15. A first stylus 17 for measuring waviness is provided at the left end of the first stylus/e 16 downward, and a first stylus 17 for measuring waviness is provided at the right end of the stylus 16 for converting the amount of displacement into an electrical signal. A first detector 18 is provided. Said first probe lever 1
6 has a second stylus between its first fulcrum 15 and the first stylus 1-7.
A second stylus lever 20 is rotatably supported on this fulcrum 19, and a second stylus 21 for roughness measurement is provided at the left end of the fulcrum 19 facing downward. A second detector 22 is provided at the right end of the second probe lever 20 and between it and the first probe lever 16. The lower tip of the first stylus 17 has a shape with a large radius of curvature, and the tip of the second stylus 21 has an acute angle and a small radius of curvature. , their tips are arranged in a plane perpendicular to the moving direction of the detection device 14 so that the same point on the object 2 can be measured.

In the above structure, when the object to be measured 2 is fixed and the detection device 14 is moved by the motor 8, the first stylus 17 for measuring waviness can be adjusted regardless of the minute roughness of the surface.
The undulations are detected and outputted from the first detector 18 as an electrical signal.

At this time, the second fulcrum 19 also moves up and down according to this undulation. Therefore, the second probe lever t<-20 also moves up and down according to this undulation, but since the first probe lever 16 also moves up and down according to the undulation, there is no relative displacement between the two levers due to the undulation. The second detector 22 outputs only minute surface roughness signals.

Therefore, the detection signals of the first detector 18 and the second detector 22 are transmitted to the second detector 22 via the circuit shown by the dotted line 26 in FIGS. 1 and 2.
Input to the respective terminals Yl and Y2 of the Venn recorder.

That is, in FIG. 2, the output of the first detector 18 and the output of the second detector 22 are amplified by amplifiers 23 and 24 to respective specified magnifications. At this time, the waviness signal from the first detector 18 is amplified at a low magnification, and the roughness signal from the second detector 22 is amplified at a high magnification. The output signal of the amplifier 23 is then inputted to one terminal Y1 of the direct #c2 pen type recorder 13, and is recorded as a wave pattern on the recording paper as shown by A in FIG.

The output signal of the amplifier 24 is added to the output signal of the amplifier 23 in an adder 25, and the signal is added to the output signal of the two-venn recorder 1.
3 is manually applied to the other terminal Y2, and the roughness pattern is recorded on the recording paper as shown in B of FIG. As is clear from the figure, this roughness figure B is obtained by adding the undulation shapes, so the roughness figure B is superimposed on the undulation figure A and is recorded simultaneously.

Note that the two-ben type recorder 13 records the A figure and the 8 figure as described above, but since the recording pens are provided at the front and back with respect to the running direction of the recording paper, the previous recording pen - It is necessary to match the phase difference between the two-person signal and the signal entering the subsequent pen. Therefore, it is preferable to use a two-pen recorder that has a built-in delay circuit and corrects the phase difference. In addition, in the above explanation, an example was explained in which the present invention is applied to a method in which the object to be measured is fixed and the detector is moved, but conversely, when it is applied to a method in which the object to be measured is moved, tl can also record exactly the same figure.

As described above, in the present invention, it is possible to simultaneously record the undulation shape of the surface of the object to be measured and the roughness, which is the sum of the undulation shape at that position, on the same recording paper in an overlapping manner. This is extremely effective when analyzing the surface condition of an object to be measured from recorded figures.

[Brief explanation of drawings]

FIG. 1 is an explanatory diagram showing an embodiment of the present invention, FIG. 2 is a block diagram for electrical processing of an output signal, and FIG. 3 is a diagram showing an example of a graphic recorded by the present invention. 15: First fulcrum 16: First probe lever 17: First stylus 18: First detector 19: Second fulcrum 20: Second probe lever 21: Second stylus 22: Second detector patent application Hito Co., Ltd. Tokyo Seimitsu Diagram 2 Procedural Amendment (Method) % Formula % 1 Display of the case 1982 Patent Consultant No. 17808 2 Name of the invention Surface roughness/shape measuring device 3 Person making the correction Relationship with the case Patent Applicant address d 6H44j, 1. %'-fMi, "tA-chome 7-1 April 24, 1980 (shipment date) Full text of the specification subject to amendment 5 and contents of amendment 6 Figure 3

Claims (1)

[Claims] The first stylus lever is supported by the first fulcrum of the detector body, and a first stylus with a large radius of curvature is provided downward at the tip of this lever, and an electric signal is generated to indicate the displacement between the first stylus lever and the main body. Attach a first detector that converts to , a second detector is provided at an acute angle between a second stylus at the same position as the first stylus and a second lever on the opposite side of the lever;
The output signal of the first detector is input to one side of the two-pen recorder, and the signal obtained by adding the output signal of the first detector to the output signal of the second detector is input to the other side of the two-pen recorder. A surface roughness/shape measuring device that records two shapes simultaneously by inputting